Heating device of the light irradiation type
    1.
    发明授权
    Heating device of the light irradiation type 失效
    光照射型加热装置

    公开(公告)号:US07912359B2

    公开(公告)日:2011-03-22

    申请号:US11848359

    申请日:2007-08-31

    IPC分类号: F21V9/00 F21V7/04

    摘要: A heating device of the light irradiation type having an article to be heated, a guard ring located on the periphery of that article, multiple lamps located above the article to be heated and the guard ring, and a reflecting mirror located above the lamps, in which a light diffusion part is located in the upper region corresponding to the article to be heated so that the diffused light projects onto the entire surface of the article to be heated. The light diffusion part can be formed, for example, on a reflecting mirror, an optically transparent window part located between the article to be heated and the lamps or a light diffusion area formed on the light-emitting bulbs of the lamps. The size of the region occupied by the light diffusion part is such that diffused light is not projected to the guard ring.

    摘要翻译: 一种具有待加热物品的光照射型加热装置,位于该物品周边的保护环,位于被加热物上方的多个灯和防护环,以及位于灯的上方的反射镜, 光扩散部位于对应于被加热物的上部区域,使得漫射光投射到待加热物品的整个表面上。 光漫射部可以例如形成在反射镜上,位于待加热物品与灯之间的光学透明窗部或形成在灯的发光灯泡上的光扩散区域。 由光扩散部占据的区域的大小使得漫射光不会被投射到防护环。

    Overlay measuring pattern, and photomask
    4.
    发明授权
    Overlay measuring pattern, and photomask 失效
    覆盖测量图案和光掩模

    公开(公告)号:US06326106B1

    公开(公告)日:2001-12-04

    申请号:US09265858

    申请日:1999-03-11

    申请人: Tetsuya Kitagawa

    发明人: Tetsuya Kitagawa

    IPC分类号: G03F900

    CPC分类号: G03F7/70633

    摘要: An overlay measuring pattern has a rectangular portion and band-shaped portions separated from opposite sides of the rectangular portion by an equal distance and parallel to the sides. Even when a photoresist shrinks upon heating after the overlay measuring pattern is transferred to the photoresist, the taper amounts of the sides of the rectangular portion transferred to the photoresist equal each other in their sections between opposite sides. Hence, the overlay shift can be accurately obtained.

    摘要翻译: 覆盖测量图案具有矩形部分和带状部分,该矩形部分和矩形部分从矩形部分的相对侧分开相等距离并平行于侧面。 即使在将覆盖测量图案转印到光致抗蚀剂之后光致抗蚀剂在加热时收缩,转移到光致抗蚀剂的矩形部分的边的锥形量在相对侧之间的部分彼此相等。 因此,可以准确地获得覆盖偏移。

    Inference engine with conflict resolution based upon the availability of
a resource
    5.
    发明授权
    Inference engine with conflict resolution based upon the availability of a resource 失效
    基于资源可用性的具有冲突解决的推理引擎

    公开(公告)号:US5204940A

    公开(公告)日:1993-04-20

    申请号:US687516

    申请日:1991-04-19

    IPC分类号: G06F9/44 G06N5/04

    CPC分类号: G06N5/046

    摘要: An inference system is disclosed, the inference system comprising rule storing portion for storing a plurality of production rules, each of which is composed of an "if statement" and a "then statement", fact information storing portion for storing fact information, condition comparing portion for comparing the "if statement" of each production rule stores in the rule storing portion with the fact information stored in the fact information storing portion successively until a resource of the process system or the inference system is consumed, conflict resolving portion for selecting one of at least one production rule obtained as the results of the comparison by the condition comparing portion when the resource is consumed, and rule executing portion for executing the "then statement" of the production rule being selected by the conflict resolving.

    摘要翻译: 公开了一种推理系统,所述推理系统包括用于存储多个生产规则的规则存储部分,每个生产规则由“if语句”和“then语句”组成,用于存储事实信息的事实信息存储部分,条件比较 用于比较每个生产规则的“if语句”的部分连续存储在规则存储部分中的事实信息存储部分中的事实信息,直到消耗了处理系统或推理系统的资源,冲突解决部分用于选择一个 作为当资源被消耗时的条件比较部分的比较结果获得的至少一个生产规则,以及用于执行通过冲突解决选择的生产规则的“then语句”的规则执行部分。

    LIGHT EMISSION TYPE HEATING METHOD AND LIGHT EMISSION TYPE HEATING APPARATUS
    6.
    发明申请
    LIGHT EMISSION TYPE HEATING METHOD AND LIGHT EMISSION TYPE HEATING APPARATUS 审中-公开
    轻型排气式加热方式和轻型排气式加热装置

    公开(公告)号:US20090214193A1

    公开(公告)日:2009-08-27

    申请号:US12392481

    申请日:2009-02-25

    IPC分类号: F26B3/28

    CPC分类号: H01L21/67115

    摘要: A light emission type heating apparatus comprises a first lamp unit which includes two or more lamps, in which at least one of the lamps includes two or more filaments in its light emission bulb, and intensity of light emitted from each filament is independently controlled, and a second lamp unit which is made up of two or more lamps, and wherein the lamps of the first lamp unit are grouped, in each of which a filament of at least one of the lamps and a filament of another one of the lamps are arranged to form groups, wherein a temperature of the workpiece is detected, and electric power to be applied to each of the groups of filaments is controlled based on the detected temperature of the workpiece.

    摘要翻译: 发光型加热装置包括:第一灯单元,其包括两个或更多个灯,其中至少一个灯在其发光灯泡中包括两根或更多根灯丝,并且独立地控制从每根灯丝发射的光的强度,以及 第二灯单元,其由两个或更多个灯组成,并且其中第一灯单元的灯分组,其中至少一个灯的灯丝和另一个灯的灯丝布置 以形成组,其中检测到工件的温度,并且基于检测到的工件温度来控制施加到每组长丝的电力。

    FILAMENT LAMP AND LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS
    7.
    发明申请
    FILAMENT LAMP AND LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS 有权
    灯具灯和光照射类型热处理设备

    公开(公告)号:US20080203924A1

    公开(公告)日:2008-08-28

    申请号:US12035509

    申请日:2008-02-22

    IPC分类号: H01J13/46

    摘要: A filament lamp comprising a bulb which has a hermetically sealed portion on at least one end and multiple filament assemblies, each filament assembly comprising a coiled filament and connected leads to supply power to that filament, the filament assemblies being sequentially arranged in the axial direction of the bulb, the leads of each filament assembly being electrically connected to respective multiple conductive parts set in the sealed portions, and power being independently suppliable to each of the filaments. A respective one of the coiled filaments is located in a respective first quadrant formed by intersecting planes that are perpendicular to each other and that are tangent to an outer coil diameter of the respective coiled filament. The leads are positioned in quadrants other than the quadrant in which the coiled filament is located. A light irradiation type heat treatment apparatus uses a plurality of such filament lamps.

    摘要翻译: 一种灯丝灯,其包括在至少一端具有气密密封部分的灯泡和多个灯丝组件,每个灯丝组件包括螺旋灯丝并被连接,导致向该灯丝供电,灯丝组件沿轴向方向依次布置 灯泡,每个灯丝组件的引线电连接到设置在密封部分中的相应的多个导电部件,并且功率独立地供应到每个灯丝。 卷绕长丝中的相应一个位于相应的第一象限中,该第一象限由彼此垂直的相交平面形成,并且与相应螺旋丝的外部线圈直径相切。 引线定位在除了卷绕长丝所在的象限之外的象限中。 光照射型热处理装置使用多个这样的白炽灯。

    FILAMENT LAMP AND LIGHT-IRRADIATION-TYPE HEAT TREATMENT DEVICE
    8.
    发明申请
    FILAMENT LAMP AND LIGHT-IRRADIATION-TYPE HEAT TREATMENT DEVICE 有权
    灯具灯和光辐射型热处理装置

    公开(公告)号:US20080050104A1

    公开(公告)日:2008-02-28

    申请号:US11778374

    申请日:2007-07-16

    IPC分类号: H01L21/26 H05B1/00

    摘要: A filament lamp that allows independent control of the state of luminescence of multiple filaments and that reliably prevents the occurrence of unwanted discharge between adjacent portions of neighboring filaments, even when a high voltage is injected into the filaments to achieve a desired irradiation distribution, and light-irradiation-type heat treatment device that can heat the article to be treated uniformly. The filament lamp has multiple filament assemblies, each having a filament and respective leads arrangement sequentially within a light emitting bulb, in the axial direction of the light emitting bulb. With alternating current power supplied to each filament independently, the current will be supplied with the same phase and mutually adjacent terminals of neighboring filament assemblies will have the same potential, and with direct current power supplied to each filament independently, adjacent terminals of neighboring filament assemblies will be of the same polarity. The light-irradiation-type heat treatment device uses multiple filament lamps of this type.

    摘要翻译: 一种白炽灯,其允许独立地控制多根灯丝的发光状态,并且即使当将高电压注入到灯丝中以实现期望的照射分布时,也可靠地防止相邻灯丝的相邻部分之间的不期望的放电的发生,以及光 能够均匀加热待处理物品的照射型热处理装置。 灯丝灯具有多个灯丝组件,每个灯丝组件在发光灯泡的轴向方向上均具有灯丝和相应的引线排列顺序地在发光灯泡内。 随着独立地向每个灯丝提供交流电力,电流将被提供相同的相位,并且相邻灯丝组件的相互相邻的端子将具有相同的电位,并且随着独立地向每个灯丝提供直流电力,相邻灯丝组件的相邻端子 将具有相同的极性。 光照式热处理装置使用这种多种白炽灯。

    Filament lamp and light-irradiation-type heat treatment device
    10.
    发明授权
    Filament lamp and light-irradiation-type heat treatment device 有权
    灯丝灯和光照射型热处理装置

    公开(公告)号:US07639930B2

    公开(公告)日:2009-12-29

    申请号:US11778374

    申请日:2007-07-16

    IPC分类号: A21B2/00

    摘要: A filament lamp that allows independent control of the state of luminescence of multiple filaments and that reliably prevents the occurrence of unwanted discharge between adjacent portions of neighboring filaments, even when a high voltage is injected into the filaments to achieve a desired irradiation distribution, and light-irradiation-type heat treatment device that can heat the article to be treated uniformly. The filament lamp has multiple filament assemblies, each having a filament and respective leads arrangement sequentially within a light emitting bulb, in the axial direction of the light emitting bulb. With alternating current power supplied to each filament independently, the current will be supplied with the same phase and mutually adjacent terminals of neighboring filament assemblies will have the same potential, and with direct current power supplied to each filament independently, adjacent terminals of neighboring filament assemblies will be of the same polarity. The light-irradiation-type heat treatment device uses multiple filament lamps of this type.

    摘要翻译: 一种白炽灯,其允许独立地控制多根灯丝的发光状态,并且即使当将高电压注入到灯丝中以实现期望的照射分布时,也可靠地防止相邻灯丝的相邻部分之间的不期望的放电的发生,以及光 能够均匀加热待处理物品的照射型热处理装置。 灯丝灯具有多个灯丝组件,每个灯丝组件在发光灯泡的轴向方向上均具有灯丝和相应的引线排列顺序地在发光灯泡内。 随着独立地向每个灯丝提供交流电力,电流将被提供相同的相位,并且相邻灯丝组件的相互相邻的端子将具有相同的电位,并且随着独立地向每个灯丝提供直流电力,相邻灯丝组件的相邻端子 将具有相同的极性。 光照式热处理装置使用这种多种白炽灯。