APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR DISCHARGING SUPERCRITICAL FLUID
    5.
    发明申请
    APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR DISCHARGING SUPERCRITICAL FLUID 有权
    用于处理基板的装置和排出超临界流体的方法

    公开(公告)号:US20130000144A1

    公开(公告)日:2013-01-03

    申请号:US13537960

    申请日:2012-06-29

    IPC分类号: F26B25/06 F26B7/00

    CPC分类号: H01L21/67017 Y10T137/1189

    摘要: Provided are an apparatus for treating a substrate and a method for discharge a supercritical fluid, and more particularly, an apparatus for treating a substrate using a supercritical fluid and a method for discharging the supercritical fluid using the same. The apparatus for treating the substrate includes a container for providing a supercritical fluid, a vent line through which the supercritical fluid is discharged from the container, and a freezing prevention unit disposed in the vent line to prevent the supercritical fluid from being frozen.

    摘要翻译: 本发明提供一种处理基板的设备和用于排出超临界流体的方法,更具体地说,涉及一种使用超临界流体处理基板的设备以及使用该超临界流体排出超临界流体的方法。 用于处理基板的装置包括用于提供超临界流体的容器,超临界流体从容器排出的排放管线,以及设置在排气管线中以防止超临界流体被冻结的防冻单元。

    Wafer spin chuck and an etcher using the same
    6.
    发明授权
    Wafer spin chuck and an etcher using the same 有权
    晶圆旋转卡盘和使用其的蚀刻器

    公开(公告)号:US08211269B2

    公开(公告)日:2012-07-03

    申请号:US13190041

    申请日:2011-07-25

    IPC分类号: H01L21/30

    摘要: A wafer spin chuck and an etcher using the same are provided. According to an aspect of the present invention, there is provide a wafer spin chuck device comprising: a spin body which spins a wafer; and a stationary body which holds the spin body and is under the spin body with a space between the spin body and the stationary body, wherein the stationary body includes a blocking unit which blocks the space with a fluid.

    摘要翻译: 提供了晶片旋转卡盘和使用其的蚀刻器。 根据本发明的一个方面,提供了一种晶片自旋卡盘装置,包括:旋转晶片的旋转体; 以及固定体,其在旋转体和静止体之间具有空间的方式保持旋转体并且位于旋转体下方,其中,静止体包括阻挡空间的阻塞单元。

    Wafer Spin Chuck and an Etcher Using the Same
    7.
    发明申请
    Wafer Spin Chuck and an Etcher Using the Same 有权
    晶圆旋转卡盘和使用相同的蚀刻机

    公开(公告)号:US20110272871A1

    公开(公告)日:2011-11-10

    申请号:US13190041

    申请日:2011-07-25

    IPC分类号: H01L21/30

    摘要: A wafer spin chuck and an etcher using the same are provided. According to an aspect of the present invention, there is provide a wafer spin chuck device comprising: a spin body which spins a wafer; and a stationary body which holds the spin body and is under the spin body with a space between the spin body and the stationary body, wherein the stationary body includes a blocking unit which blocks the space with a fluid.

    摘要翻译: 提供了晶片旋转卡盘和使用其的蚀刻器。 根据本发明的一个方面,提供了一种晶片自旋卡盘装置,包括:旋转晶片的旋转体; 以及固定体,其在旋转体和静止体之间具有空间的方式保持旋转体并且位于旋转体下方,其中,静止体包括阻挡空间的阻塞单元。

    Wafer spin chuck and an etcher using the same
    8.
    发明授权
    Wafer spin chuck and an etcher using the same 有权
    晶圆旋转卡盘和使用其的蚀刻器

    公开(公告)号:US08007634B2

    公开(公告)日:2011-08-30

    申请号:US12053908

    申请日:2008-03-24

    摘要: A wafer spin chuck and an etcher using the same are provided. According to an aspect of the present invention, there is provide a wafer spin chuck device comprising: a spin body which spins a wafer; and a stationary body which holds the spin body and is under the spin body with a space between the spin body and the stationary body, wherein the stationary body includes a blocking unit which blocks the space with a fluid.

    摘要翻译: 提供了晶片旋转卡盘和使用其的蚀刻器。 根据本发明的一个方面,提供了一种晶片自旋卡盘装置,包括:旋转晶片的旋转体; 以及固定体,其在旋转体和静止体之间具有空间的方式保持旋转体并且位于旋转体下方,其中,静止体包括阻挡空间的阻塞单元。

    Liquid detergent dispensing system for a washing machine
    9.
    发明授权
    Liquid detergent dispensing system for a washing machine 有权
    用于洗衣机的液体洗涤剂分配系统

    公开(公告)号:US07980102B2

    公开(公告)日:2011-07-19

    申请号:US12051158

    申请日:2008-03-19

    IPC分类号: D06F29/00 D06F35/00

    CPC分类号: D06F39/022

    摘要: Disclosed is a washing machine, which prevents solidification of liquid detergent by rapidly recovering the liquid detergent left in a liquid detergent supply passage and a liquid detergent supply pump by forming a negative pressure differential by use of the liquid detergent supply pump for a set period of time after the supply of liquid detergent is finished.

    摘要翻译: 公开了一种洗衣机,其通过利用液体洗涤剂供给泵形成负压差来快速回收残留在液体洗涤剂供给通道和液体洗涤剂供给泵中的液体洗涤剂,从而防止液体洗涤剂的固化, 液体洗涤剂供应完成后的时间。