公开(公告)号：US10450226B2

公开(公告)日：2019-10-22

申请号：US15818016

申请日：2017-11-20

Applicant: AGC Inc.

Inventor： Izuru Kashima ,  Yusuke Fujiwara ,  Kiyoshi Tamai ,  Yuichi Suzuki ,  Daisuke Kobayashi ,  Yoichi Sera ,  Taku Yamada

IPC: C03C21/00 ,  G01B5/28 ,  C03C23/00 ,  C03C3/085 ,  C03C3/091 ,  C03C3/087 ,  C03C15/00

Abstract: A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which the glass has a surface roughness (Ra) of 0.20 nm or higher, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (μm), a surface strength F (N) measured by a ball-on-ring test under the following conditions is (F≥1500×t2) relative to a sheet thickness t (mm) of the glass, and a surface of the glass has no polishing flaw: Y=aX+b  (I) in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as H2O, mol/L); X: depth from the outermost surface of the glass (μm); a: −0.270 to −0.005; and b: 0.020 to 0.220.

公开(公告)号：US11150550B2

公开(公告)日：2021-10-19

申请号：US16056786

申请日：2018-08-07

Applicant: AGC INC.

Inventor： Hiroshi Hanekawa ,  Tsuyoshi Kakuta ,  Yoichi Sera ,  Sadatatsu Ikeda

IPC: G03F1/24 ,  G03F1/48 ,  G03F1/52 ,  G03F1/54

Abstract: A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2θ) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.

公开(公告)号：US10927039B2

公开(公告)日：2021-02-23

申请号：US15651353

申请日：2017-07-17

Applicant: AGC Inc.

Inventor： Izuru Kashima ,  Yusuke Fujiwara ,  Kiyoshi Tamai ,  Yuichi Suzuki ,  Yoichi Sera ,  Daisuke Kobayashi

IPC: C03C21/00 ,  C03C15/00 ,  C03C19/00 ,  C03C23/00 ,  C03C3/091 ,  G02F1/1333

Abstract: An object of the present invention is to provide a chemically strengthened glass that can effectively suppress strength of a glass from being deteriorated even though performing chemical strengthening and has high transmittance (that is, low reflectivity). The present invention relates to a chemically strengthened glass having a compressive stress layer formed on a surface layer thereof by an ion exchange method, in which the glass contains sodium and boron, and has a delta transmittance being +0.1% or more, and in which a straight line obtained by a linear approximation of a hydrogen concentration Y in a region of a depth X from an outermost surface of the glass satisfies a specific relational equation in X=0.1 to 0.4 (μm).

公开(公告)号：US11703751B2

公开(公告)日：2023-07-18

申请号：US17463724

申请日：2021-09-01

Applicant: AGC INC.

Inventor： Hiroshi Hanekawa ,  Tsuyoshi Kakuta ,  Yoichi Sera ,  Sadatatsu Ikeda

IPC: G03F1/24 ,  G03F1/48 ,  G03F1/54 ,  G03F1/52

CPC classification number: G03F1/24 ,  G03F1/48 ,  G03F1/52 ,  G03F1/54

Abstract: A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2θ) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.

公开(公告)号：US10308549B2

公开(公告)日：2019-06-04

申请号：US15000719

申请日：2016-01-19

Applicant: AGC Inc.

Inventor： Izuru Kashima ,  Yusuke Fujiwara ,  Kiyoshi Tamai ,  Yuichi Suzuki ,  Daisuke Kobayashi ,  Yoichi Sera ,  Taku Yamada ,  Noriko Tanabe

IPC: C03C21/00 ,  C03C15/02 ,  C03C23/00 ,  C03C3/085 ,  C03C3/087 ,  C03C3/091 ,  G01B5/28 ,  C03C15/00

Abstract: A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which a surface of the glass has polishing flaws, the glass has a texture direction index (Stdi) of 0.30 or more, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (μm), and a surface strength F (N) measured by a ball-on-ring test is (F≥1400×t2) relative to a sheet thickness t (mm) of the glass: Y=aX+b  (I) in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as H2O, mol/L), X: depth from the outermost surface of the glass (μm), a: −0.300 or more, and b: 0.220 or less.