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公开(公告)号：US09748048B2
公开(公告)日：2017-08-29
申请号：US14262188
申请日：2014-04-25
Applicant: Analog Devices Global
Inventor： Padraig L. Fitzgerald , Jo-ey Wong , Raymond C. Goggin , Bernard P. Stenson , Paul Lambkin , Mark Schirmer
CPC classification number: H01H1/0036 , H01H59/0009 , H01H2001/0084 , H01H2059/0018 , H01H2059/0072
Abstract: Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.
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公开(公告)号：US20150311021A1
公开(公告)日：2015-10-29
申请号：US14278362
申请日：2014-05-15
Applicant: Analog Devices Global
Inventor： Check F. Lee , Raymond C. Goggin , Padraig L. Fitzgerald , Bernard P. Stenson , Mark Schirmer , Jo-ey Wong
CPC classification number: H01H59/0009 , B81B7/007 , B81C1/00341 , H01H1/0036 , H01H2001/0084
Abstract: A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base.
Abstract translation: MEMS开关具有由具有顶表面的基底和形成在顶表面的至少一部分上的绝缘体形成的基底。 接合材料将盖固定到基部以形成内部室。 盖子有效地形成在内部室外部的基部的外部区域。 MEMS开关还具有可移动构件（在内部室中），其具有构件接触部分，内部接触件（也在内部腔室中）以及在基部的外部区域处的外部接触件。 可动构件的接触部分构造成交替地接触内部触点。 至少部分地在绝缘体层内的导体电连接内部触点和外部触点。 导体与将盖固定到基座的接合材料间隔开并与之电隔离。
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公开(公告)号：US11228310B2
公开(公告)日：2022-01-18
申请号：US17080785
申请日：2020-10-26
Applicant: Analog Devices Global Unlimited Company
Inventor： Ying Zhao , Alan O'Donnell , Michael James Twohig , Olly J. Kierse , James Thomas Sheeran , Michael C. W. Coln , Paul W. Stevens , Bruce A. Hecht , Padraig Fitzgerald , Mark Schirmer
Abstract: Optically isolated micromachined (MEMS) switches and related methods are described. The optically isolated MEMS switches described herein may be used to provide isolation between electronic devices. For example, the optically isolated MEMS switches of the types described herein can enable the use of separate grounds between the receiving electronic device and the control circuitry. Isolation of high-voltage signals and high-voltage power supplies can be achieved by using an optical isolator and a MEMS switch, where the optical isolator controls the state of the MEMS switch. In some embodiments, utilizing optical isolators to provide high voltages, the need for electric high-voltage sources such as high-voltage power supplies and charge pumps may be removed, thus removing the cause of potential damage to the receiving electronic device. In one example, the optical isolator and the MEMS switch may be co-packaged on the same substrate.
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Patent Agency Ranking
公开(公告)号：US20210067160A1
公开(公告)日：2021-03-04
申请号：US17080785
申请日：2020-10-26
Applicant: Analog Devices Global Unlimited Company
Inventor： Ying Zhao , Alan O'Donnell , Michael James Twohig , Olly J. Kierse , James Sheeran , Michael C.W. Coln , Paul W. Stevens , Bruce A. Hecht , Padraig Fitzgerald , Mark Schirmer
Abstract: Optically isolated micromachined (MEMS) switches and related methods are described. The optically isolated MEMS switches described herein may be used to provide isolation between electronic devices. For example, the optically isolated MEMS switches of the types described herein can enable the use of separate grounds between the receiving electronic device and the control circuitry. Isolation of high-voltage signals and high-voltage power supplies can be achieved by using an optical isolator and a MEMS switch, where the optical isolator controls the state of the MEMS switch. In some embodiments, utilizing optical isolators to provide high voltages, the need for electric high-voltage sources such as high-voltage power supplies and charge pumps may be removed, thus removing the cause of potential damage to the receiving electronic device. In one example, the optical isolator and the MEMS switch may be co-packaged on the same substrate.
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公开(公告)号：US20190288686A1
公开(公告)日：2019-09-19
申请号：US16137640
申请日：2018-09-21
Applicant: Analog Devices Global Unlimited Company
Inventor： Ying Zhao , Alan O'Donnell , Michael James Twohig , Olly J. Kierse , James Thomas Sheeran , Michael C.W. Coln , Paul W. Stevens , Bruce A. Hecht , Padraig Fitzgerald Fitzgerald , Mark Schirmer
Abstract: Optically isolated micromachined (MEMS) switches and related methods are described. The optically isolated MEMS switches described herein may be used to provide isolation between electronic devices. For example, the optically isolated MEMS switches of the types described herein can enable the use of separate grounds between the receiving electronic device and the control circuitry. Isolation of high-voltage signals and high-voltage power supplies can be achieved by using an optical isolator and a MEMS switch, where the optical isolator controls the state of the MEMS switch. In some embodiments, utilizing optical isolators to provide high voltages, the need for electric high-voltage sources such as high-voltage power supplies and charge pumps may be removed, thus removing the cause of potential damage to the receiving electronic device. In one example, the optical isolator and the MEMS switch may be co-packaged on the same substrate.
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公开(公告)号：US20180033565A1
公开(公告)日：2018-02-01
申请号：US15663628
申请日：2017-07-28
Applicant: Analog Devices Global
Inventor： Padraig Fitzgerald , Jo-ey Wong , Raymond C. Goggin , Bernard Patrick Stenson , Paul Lambkin , Mark Schirmer
CPC classification number: H01H1/0036 , H01H59/0009 , H01H2001/0084 , H01H2059/0018 , H01H2059/0072
Abstract: Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.
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公开(公告)号：US09583294B2
公开(公告)日：2017-02-28
申请号：US14278362
申请日：2014-05-15
Applicant: Analog Devices Global
Inventor： Check F. Lee , Raymond C. Goggin , Padraig L. Fitzgerald , Bernard P. Stenson , Mark Schirmer , Jo-ey Wong
CPC classification number: H01H59/0009 , B81B7/007 , B81C1/00341 , H01H1/0036 , H01H2001/0084
Abstract: A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base.
Abstract translation: MEMS开关具有由具有顶表面的基底和形成在顶表面的至少一部分上的绝缘体形成的基底。 接合材料将盖固定到基部以形成内部室。 盖子有效地形成在内部室外部的基部的外部区域。 MEMS开关还具有可移动构件（在内部室中），其具有构件接触部分，内部接触件（也在内部腔室中）以及在基部的外部区域处的外部接触件。 可动构件的接触部分构造成交替地接触内部触点。 至少部分地在绝缘体层内的导体电连接内部触点和外部触点。 导体与将盖固定到基座的接合材料间隔开并与之电隔离。
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公开(公告)号：US20150311003A1
公开(公告)日：2015-10-29
申请号：US14262188
申请日：2014-04-25
Applicant: Analog Devices Global
Inventor： Padraig L. Fitzgerald , Jo-ey Wong , Raymond C. Goggin , Bernard P. Stenson , Paul Lambkin , Mark Schirmer
CPC classification number: H01H1/0036 , H01H59/0009 , H01H2001/0084 , H01H2059/0018 , H01H2059/0072
Abstract: Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.
Abstract translation: 公开了几个提高MEMS开关的操作性能的特征，使得它们表现出改善的使用寿命和对开关的更好控制。
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