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公开(公告)号:US20180039055A1
公开(公告)日:2018-02-08
申请号:US15529451
申请日:2015-12-22
Applicant: Apple Inc.
Inventor: Mark Alan ARBORE , Matthew A. TERREL , Edward L. HULL
Abstract: A confocal inspection system can optically characterize a sample. An objective lens, or separate incident and return lenses, can deliver incident light from a light source to the sample, and can collect light from the sample. Confocal optics can direct the collected light onto a detector. The system can average the incident light over multiple locations at the sample, for example, by scanning the incident light with a pivotable mirror in the incident and return optical paths, or by illuminating and collecting with multiple spaced-apart confocal apertures. The system can average the collected light, for example, by directing the collected light onto a single-pixel detector, or by directing the collected light onto a multi-pixel detector and averaging the pixel output signals to form a single electronic signal. Averaging the incident and/or return light can be advantageous for structured or inhomogeneous samples.
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公开(公告)号:US20190137337A1
公开(公告)日:2019-05-09
申请号:US16095323
申请日:2017-04-13
Applicant: Apple Inc.
Inventor: Trent D. RIDDER , Mark Alan ARBORE , Gary SHAMBAT , Robert CHEN , David I. SIMON , Miikka M. KANGAS
Abstract: Methods and systems for measuring one or more properties of a sample are disclosed. The methods and systems can include multiplexing measurements of signals associated with a plurality of wavelengths without adding any signal independent noise and without increasing the total measurement time. One or more levels of encoding, where, in some examples, a level of encoding can be nested within one or more other levels of encoding. Multiplexing can include wavelength, position, and detector state multiplexing. In some examples, SNR can be enhanced by grouping together one or more signals based on one or more properties including, but not limited to, signal intensity, drift properties, optical power detected, wavelength, location within one or more components, material properties of the light sources, and electrical power. In some examples, the system can be configured for optimizing the conditions of each group individually based on the properties of a given group.
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3.
公开(公告)号:US20180017491A1
公开(公告)日:2018-01-18
申请号:US15717651
申请日:2017-09-27
Applicant: Apple Inc.
Inventor: Mark Alan ARBORE , Matthew A. TERREL
CPC classification number: G01N21/59 , G01N21/49 , G01N2021/1782 , G01N2021/4709 , G01N2021/4711 , G01N2201/066 , G01N2201/0691 , G01N2201/0696 , G01N2201/12
Abstract: An illuminator/collector assembly can deliver incident light to a sample and collect return light returning from the sample. A sensor can measure ray intensities as a function of ray position and ray angle for the collected return light. A ray selector can select a first subset of rays from the collected return light at the sensor that meet a first selection criterion. In some examples, the ray selector can aggregate ray intensities into bins, each bin corresponding to rays in the collected return light that traverse within the sample an estimated optical path length within a respective range of optical path lengths. A characterizer can determine a physical property of the sample, such as absorptivity, based on the ray intensities, ray positions, and ray angles for the first subset of rays. Accounting for variations in optical path length traversed within the sample can improve accuracy.
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公开(公告)号:US20180183207A1
公开(公告)日:2018-06-28
申请号:US15570683
申请日:2016-04-27
Applicant: Apple Inc.
Inventor: Ross M. AUDET , Mark Alan ARBORE , Alfredo BISMUTO , Yves BIDAUX , Camille TARDY , Tobias GRESCH , Antoine Jean André MÜLLER
IPC: H01S5/0625 , H01S5/125 , H01S5/042 , H01S5/0683 , H01S5/12
CPC classification number: H01S5/06256 , H01S5/0425 , H01S5/0612 , H01S5/06258 , H01S5/06837 , H01S5/1206 , H01S5/1209 , H01S5/1218 , H01S5/125 , H01S5/3401
Abstract: Disclosed is a Vernier effect DBR laser that has uniform laser injection current pumping along the length of the laser. The laser can include one or more tuning elements, separate from the laser injection element, and these tuning elements can be used to control the temperature or modal refractive index of one or more sections of the laser. The refractive indices of each diffraction grating can be directly controlled by temperature changes, electro optic effects, or other means through the one or more tuning elements. With direct control of the temperature and/or refractive indices of the diffraction gratings, the uniformly pumped Vernier effect DBR laser can be capable of a wider tuning range. Additionally, uniform pumping of the laser through a single electrode can reduce or eliminate interfacial reflections caused by, for example, gaps between metal contacts atop the laser ridge, which can minimize multi-mode operation and mode hopping.
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公开(公告)号:US20180083421A1
公开(公告)日:2018-03-22
申请号:US15555049
申请日:2016-03-04
Applicant: Apple Inc.
Inventor: Ross M. AUDET , Mark Alan ARBORE , Alfredo BISMUTO , Yves BIDAUX , Antoine Jean André MÜLLER
CPC classification number: H01S5/0683 , H01S5/0224 , H01S5/02453 , H01S5/026 , H01S5/0261 , H01S5/0607 , H01S5/0612 , H01S5/06256 , H01S5/06832 , H01S5/0687 , H01S5/12 , H01S5/125 , H01S5/141 , H01S5/227
Abstract: Methods for driving a tunable laser with integrated tuning elements are disclosed. The methods can include modulating the tuning current and laser injection current such that the laser emission wavelength and output power are independently controllable. In some examples, the tuning current and laser injection current are modulated simultaneously and a wider tuning range can result. In some examples, one or both of these currents is sinusoidally modulated. In some examples, a constant output power can be achieved while tuning the emission wavelength. In some examples, the output power and tuning can follow a linear relationship. In some examples, injection current and tuning element drive waveforms necessary to achieve targeted output power and tuning waveforms can be achieved through optimization based on goodness of fit values between the targeted and actual output power and tuning waveforms.
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6.
公开(公告)号:US20180017772A1
公开(公告)日:2018-01-18
申请号:US15717573
申请日:2017-09-27
Applicant: Apple Inc.
Inventor: Mark Alan ARBORE , Matthew A. TERREL , Edward L. HULL
Abstract: A confocal inspection system can optically characterize a sample. An objective lens, which can be a single lens or a combination of separate illumination and collection lenses, can have a pupil. The objective lens can deliver incident light to the sample through an annular illumination region of the pupil, and can collect scattered light returning from the sample to form collected light. Confocal optics can be positioned to receive the collected light. A detector can be configured with the confocal optics so that the detector generates signals from light received from a specified depth at or below a surface of the sample and rejects signals from light received from depths away from the specified depth. An optical element, such as a mask, a reconfigurable panel, or the detector, can define the annular collection region to be non-overlapping with the annular illumination region in the pupil.
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7.
公开(公告)号:US20190204221A1
公开(公告)日:2019-07-04
申请号:US16296010
申请日:2019-03-07
Applicant: Apple Inc.
Inventor: Mark Alan ARBORE , Matthew A. TERREL
CPC classification number: G01N21/59 , G01N21/49 , G01N2021/1782 , G01N2021/4709 , G01N2021/4711 , G01N2201/066 , G01N2201/0691 , G01N2201/0696 , G01N2201/12
Abstract: An illuminator/collector assembly can deliver incident light to a sample and collect return light returning from the sample. A sensor can measure ray intensities as a function of ray position and ray angle for the collected return light. A ray selector can select a first subset of rays from the collected return light at the sensor that meet a first selection criterion. In some examples, the ray selector can aggregate ray intensities into bins, each bin corresponding to rays in the collected return light that traverse within the sample an estimated optical path length within a respective range of optical path lengths. A characterizer can determine a physical property of the sample, such as absorptivity, based on the ray intensities, ray positions, and ray angles for the first subset of rays. Accounting for variations in optical path length traversed within the sample can improve accuracy.
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公开(公告)号:US20190190233A1
公开(公告)日:2019-06-20
申请号:US16282176
申请日:2019-02-21
Applicant: Apple Inc.
Inventor: Ross M. AUDET , Mark Alan ARBORE , Alfredo BISMUTO , Yves BIDAUX , Antoine Jean André MÜLLER
CPC classification number: H01S5/0683 , H01S5/0224 , H01S5/02453 , H01S5/026 , H01S5/0261 , H01S5/0607 , H01S5/0612 , H01S5/06256 , H01S5/06832 , H01S5/0687 , H01S5/12 , H01S5/125 , H01S5/141 , H01S5/227
Abstract: Methods for driving a tunable laser with integrated tuning elements are disclosed. The methods can include modulating the tuning current and laser injection current such that the laser emission wavelength and output power are independently controllable. In some examples, the tuning current and laser injection current are modulated simultaneously and a wider tuning range can result. In some examples, one or both of these currents is sinusoidally modulated. In some examples, a constant output power can be achieved while tuning the emission wavelength. In some examples, the output power and tuning can follow a linear relationship. In some examples, injection current and tuning element drive waveforms necessary to achieve targeted output power and tuning waveforms can be achieved through optimization based on goodness of fit values between the targeted and actual output power and tuning waveforms.
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公开(公告)号:US20190128734A1
公开(公告)日:2019-05-02
申请号:US16095311
申请日:2017-04-13
Applicant: Apple Inc.
Inventor: Mark Alan ARBORE , Gary SHAMBAT , Matthew A. TERREL
Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultanous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.
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公开(公告)号:US20180238794A1
公开(公告)日:2018-08-23
申请号:US15751095
申请日:2016-08-29
Applicant: Apple Inc.
Inventor: Miikka M. KANGAS , Mark Alan ARBORE , David I. SIMON , Michael J. BISHOP , James W. HILLENDAHL , Robert CHEN
Abstract: This relates to systems and methods for measuring a concentration and type of substance in a sample at a sampling interface. The systems can include a light source, optics, one or more modulators, a reference, a detector, and a controller. The systems and methods disclosed can be capable of accounting for drift originating from the light source, one or more optics, and the detector by sharing one or more components between different measurement light paths. Additionally, the systems can be capable of differentiating between different types of drift and eliminating erroneous measurements due to stray light with the placement of one or more modulators between the light source and the sample or reference. Furthermore, the systems can be capable of detecting the substance along various locations and depths within the sample by mapping a detector pixel and a microoptics to the location and depth in the sample.
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