CONFOCAL INSPECTION SYSTEM HAVING AVERAGED ILLUMINATION AND AVERAGED COLLECTION PATHS

    公开(公告)号:US20180039055A1

    公开(公告)日:2018-02-08

    申请号:US15529451

    申请日:2015-12-22

    Applicant: Apple Inc.

    Abstract: A confocal inspection system can optically characterize a sample. An objective lens, or separate incident and return lenses, can deliver incident light from a light source to the sample, and can collect light from the sample. Confocal optics can direct the collected light onto a detector. The system can average the incident light over multiple locations at the sample, for example, by scanning the incident light with a pivotable mirror in the incident and return optical paths, or by illuminating and collecting with multiple spaced-apart confocal apertures. The system can average the collected light, for example, by directing the collected light onto a single-pixel detector, or by directing the collected light onto a multi-pixel detector and averaging the pixel output signals to form a single electronic signal. Averaging the incident and/or return light can be advantageous for structured or inhomogeneous samples.

    MULTIPLEXING AND ENCODING FOR REFERENCE SWITCHING

    公开(公告)号:US20190137337A1

    公开(公告)日:2019-05-09

    申请号:US16095323

    申请日:2017-04-13

    Applicant: Apple Inc.

    Abstract: Methods and systems for measuring one or more properties of a sample are disclosed. The methods and systems can include multiplexing measurements of signals associated with a plurality of wavelengths without adding any signal independent noise and without increasing the total measurement time. One or more levels of encoding, where, in some examples, a level of encoding can be nested within one or more other levels of encoding. Multiplexing can include wavelength, position, and detector state multiplexing. In some examples, SNR can be enhanced by grouping together one or more signals based on one or more properties including, but not limited to, signal intensity, drift properties, optical power detected, wavelength, location within one or more components, material properties of the light sources, and electrical power. In some examples, the system can be configured for optimizing the conditions of each group individually based on the properties of a given group.

    CONFOCAL INSPECTION SYSTEM HAVING NON-OVERLAPPING ANNULAR ILLUMINATION AND COLLECTION REGIONS

    公开(公告)号:US20180017772A1

    公开(公告)日:2018-01-18

    申请号:US15717573

    申请日:2017-09-27

    Applicant: Apple Inc.

    Abstract: A confocal inspection system can optically characterize a sample. An objective lens, which can be a single lens or a combination of separate illumination and collection lenses, can have a pupil. The objective lens can deliver incident light to the sample through an annular illumination region of the pupil, and can collect scattered light returning from the sample to form collected light. Confocal optics can be positioned to receive the collected light. A detector can be configured with the confocal optics so that the detector generates signals from light received from a specified depth at or below a surface of the sample and rejects signals from light received from depths away from the specified depth. An optical element, such as a mask, a reconfigurable panel, or the detector, can define the annular collection region to be non-overlapping with the annular illumination region in the pupil.

    OPTICAL SYSTEM FOR REFERENCE SWITCHING
    9.
    发明申请

    公开(公告)号:US20190128734A1

    公开(公告)日:2019-05-02

    申请号:US16095311

    申请日:2017-04-13

    Applicant: Apple Inc.

    Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultanous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

    REFERENCE SWITCH ARCHITECTURES FOR NONCONTACT SENSING OF SUBSTANCES

    公开(公告)号:US20180238794A1

    公开(公告)日:2018-08-23

    申请号:US15751095

    申请日:2016-08-29

    Applicant: Apple Inc.

    Abstract: This relates to systems and methods for measuring a concentration and type of substance in a sample at a sampling interface. The systems can include a light source, optics, one or more modulators, a reference, a detector, and a controller. The systems and methods disclosed can be capable of accounting for drift originating from the light source, one or more optics, and the detector by sharing one or more components between different measurement light paths. Additionally, the systems can be capable of differentiating between different types of drift and eliminating erroneous measurements due to stray light with the placement of one or more modulators between the light source and the sample or reference. Furthermore, the systems can be capable of detecting the substance along various locations and depths within the sample by mapping a detector pixel and a microoptics to the location and depth in the sample.

Patent Agency Ranking