公开(公告)号：US20240371615A1

公开(公告)日：2024-11-07

申请号：US18770520

申请日：2024-07-11

Applicant: Applied Materials, Inc.

Inventor： DAVID JOHN PETERSON ,  CHUANG-CHIA LIN

IPC: H01J37/32

Abstract: Embodiments disclosed herein include sensor devices and methods of using the sensor devices. In an embodiment, a sensor device comprises a substrate, a support extending up from the substrate, and a resonator mechanically coupled to the support. In an embodiment, the sensor device further comprises an antenna that is configured to electromagnetically couple with the resonator, wherein the antenna is connected to a transmission line in the substrate.

公开(公告)号：US20240102876A1

公开(公告)日：2024-03-28

申请号：US18531478

申请日：2023-12-06

Applicant: Applied Materials, Inc.

Inventor： CHUANG-CHIA LIN ,  DAVID PETERSON ,  PHILIP ALLAN KRAUS ,  AMIR BAYATI

IPC: G01L19/00 ,  H03H9/02 ,  H03H9/145

CPC classification number: G01L19/0092 ,  H03H9/02015 ,  H03H9/02574 ,  H03H9/14502 ,  G01N29/022 ,  G01N2291/014

Abstract: Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure. In an embodiment, the first structure is different than the second structure.

公开(公告)号：US20240035896A1

公开(公告)日：2024-02-01

申请号：US17876392

申请日：2022-07-28

Applicant: Applied Materials, Inc.

Inventor： CHUANG-CHIA LIN ,  MARTIN HILKENE ,  AMIR BAYATI

IPC: G01K7/02 ,  H01L21/67 ,  H01J37/32 ,  G01K11/26

CPC classification number: G01K7/021 ,  H01L21/67248 ,  H01J37/32917 ,  G01K11/265

Abstract: Embodiments disclosed herein include sensor devices. In an embodiment, a sensor device comprises a substrate, a first sensor of a first type on the substrate, where a catalytic layer is provided as at least part of the first sensor, a second sensor of the first type on the substrate and adjacent to the first sensor, and a lid over the substrate, where an opening through the lid is provided over the first sensor and the second sensor.