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1.发明授权Reaction chamber design to minimize particle generation in chemical vapor deposition reactors 失效反应室设计，以尽量减少化学气相沉积反应器中的颗粒产生
公开(公告)号：US5368646A
公开(公告)日：1994-11-29
申请号：US180495
申请日：1994-01-12
IPC分类号： H01L21/205 , C23C16/44 , C23C16/513 , H01J37/32 , C23C16/50
CPC分类号： H01J37/32623 , C23C16/4401 , C23C16/513 , H01J37/32633
摘要： A method of controlling deposition quality of line-of-sight and target surfaces in a plasma-enhanced chemical vapor deposition apparatus. Adhesion and integrity of deposited film on the surfaces is improved by one or more of (1) avoiding differential thermal expansion of the film and the underlying surfaces, (2) controlling geometry of the surfaces to eliminate edges which generate stress in the deposited film, and (3) using material for the surfaces which provides strong adhesion of the deposited film. For instance, differential thermal expansion can be avoided by maintaining the surfaces at a substantially constant temperature such as ambient temperature.Apparatus for controlling deposition quality of line-of-sight and target surfaces in a plasma-enhanced chemical vapor deposition apparatus. The apparatus includes a plasma shield having a line-of-sight surface and a plasma target having a target surface. The line-of-sight surface defines a bore through the plasma shield and is located out of direct contact with a plasma stream, such as oxygen, which passes from a plasma chamber, through the bore, and into a reaction chamber. A semiconductor specimen is mounted on a support in the reaction chamber. The target surface surrounds the specimen. The line-of-sight and target surfaces are maintained at a substantially constant temperature by circulating a fluid medium through fluid passages in the plasma shield and plasma target. The plasma target can include a removable plate having the target surface on one side thereof. The plasma shield can include a removable gas ring for ejecting gas, such as SiH.sub.4, into the bore.
摘要翻译： 一种控制等离子体增强化学气相沉积设备中视线和目标表面的沉积质量的方法。 通过（1）避免膜和下面的表面的不同的热膨胀，（2）控制表面的几何形状以消除在沉积膜中产生应力的边缘的一个或多个，提高了表面上沉积膜的粘附和完整性， 和（3）使用提供沉积膜强粘附的表面的材料。 例如，通过将表面保持在基本恒定的温度例如环境温度，可以避免差分热膨胀。 用于控制等离子体增强化学气相沉积装置中的视线和目标表面的沉积质量的装置。 该装置包括具有视线表面的等离子体屏蔽和具有目标表面的等离子体靶。 视线表面限定穿过等离子体屏蔽的孔，并且位于与等离子体流（例如氧等离子体）直接接触，等离子体流从等离子体室通过孔并进入反应室。 将半导体样品安装在反应室中的载体上。 目标表面围绕着试样。 视线和目标表面通过使流体介质通过等离子体屏蔽和等离子体靶中的流体通道循环而保持在基本上恒定的温度。 等离子体靶可以包括其一侧上具有目标表面的可移除板。 等离子体屏蔽件可以包括用于将诸如SiH 4的气体喷射到孔中的可移除气体环。
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2.发明授权Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors 失效化学蒸气沉积反应器中反应室设计和最小化颗粒生成的方法
公开(公告)号：US5200232A
公开(公告)日：1993-04-06
申请号：US623090
申请日：1990-12-11
IPC分类号： H01L21/205 , C23C16/44 , C23C16/513 , H01J37/32
CPC分类号： H01J37/32623 , C23C16/4401 , C23C16/513 , H01J37/32633
摘要： A method of controlling deposition quality of line-of-sight and specimen surrounding surfaces in a plasma-enhanced chemical vapor deposition apparatus. Adhesion and integrity of deposited film on the surfaces is improved by one or more of (1) avoiding differential thermal expansion of the film and the underlying surfaces, (2) controlling geometry of the surfaces to eliminate edges which generate stress in the deposited film, and (3) using material for the surface which provides strong adhesion of the deposited film. For instance, differential thermal expansion can be avoided by maintaining the surfaces at a substantially constant temperature such as ambient temperature.
摘要翻译： 一种控制等离子体增强化学气相沉积设备中视线和样品周围表面的沉积质量的方法。 通过（1）避免膜和下面的表面的不同的热膨胀，（2）控制表面的几何形状以消除在沉积膜中产生应力的边缘的一个或多个，提高了表面上沉积膜的粘附和完整性， 和（3）使用提供沉积膜强粘附性的表面材料。 例如，通过将表面保持在基本恒定的温度例如环境温度，可以避免差分热膨胀。
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公开(公告)号：US4715469A
公开(公告)日：1987-12-29
申请号：US770796
申请日：1985-08-29
CPC分类号： G01V11/005 , E21B23/01 , G01V1/52 , Y10S181/401 , Y10S367/911
摘要： A seismic receiver is provided for measuring seismic signals transmitted through the earth and received in a well borehole. A reversible electrical motor drives a harmonic drive reducer which amplifies the torque provided to drive a ball screw. The ball screw moves linearly along the axis of the well borehole to control the extension of a clamp arm into and out of an extended position in contact with subsurface earth adjacent the well borehole. A releasable electric clutch is provided so the receiver is retrievable in the event of a power failure while the clamp arm is extended.
摘要翻译： 提供地震接收机用于测量通过地球传输并接收在井眼中的地震信号。 可逆电动机驱动谐波驱动减速器，其放大提供用于驱动滚珠丝杠的扭矩。 滚珠丝杠沿着井眼的轴线线性移动，以控制夹臂延伸到与靠近井眼的地下地球接触的延伸位置。 提供可释放的电动离合器，使得当夹臂延伸时，接收器在断电的情况下可回收。
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