公开(公告)号：US5397830A

公开(公告)日：1995-03-14

申请号：US186199

申请日：1994-01-24

申请人： Aziz S. Shaikh ,  Gordon J. Roberts ,  Gautam Sarkar

发明人： Aziz S. Shaikh ,  Gordon J. Roberts ,  Gautam Sarkar

IPC分类号： C03C3/072 ,  C03C3/105 ,  C03C8/10 ,  C08K3/40 ,  C03C3/04 ,  C03C3/07 ,  C03C3/083

CPC分类号： C03C3/072 ,  C03C3/105 ,  C03C8/10

摘要： The present invention provides new and improved dielectric materials. In one preferred embodiment such novel dielectric material is formed by firing a composition including a glass composition comprising in weight percent from about 22% to about 45% ZnO, from about 4% to about 22% MgO, from about 1% to about 16% Al.sub.2 O.sub.3, from about 20% to about 49% SiO.sub.2, from about 2% to about 11% BaO, up to about 10% ZrO.sub.2, from about 0.05% to about 1.1% Fe.sub.2 O.sub.3 and from about 0.05% to about 0.95% PbO.

摘要翻译： 本发明提供了新的和改进的电介质材料。 在一个优选实施方案中，通过焙烧包含重量百分比约22％至约45％ZnO，约4％至约22％MgO，约1％至约16％ 约20％至约49％的SiO 2，约2％至约11％的BaO，至多约10％的ZrO 2，约0.05％至约1.1％的Fe 2 O 3和约0.05％至约0.95％的PbO。

公开(公告)号：US06602801B2

公开(公告)日：2003-08-05

申请号：US10012294

申请日：2001-11-13

申请人： Siew Yong Kong ,  Alex See ,  Simon Chooi ,  Gautam Sarkar

发明人： Siew Yong Kong ,  Alex See ,  Simon Chooi ,  Gautam Sarkar

IPC分类号： H01L21469

CPC分类号： H01L21/02126 ,  H01L21/02118 ,  H01L21/02203 ,  H01L21/02282 ,  H01L21/31695 ,  H01L21/7682 ,  H01L23/5329 ,  H01L2924/0002 ,  Y10S977/827 ,  H01L2924/00

摘要： A method for forming a region of low dielectric constant nanoporous material is disclosed. In one embodiment, the present method includes the step of combining a plurality of materials to form a solution. In the present embodiment, the plurality of materials comprising a low dielectric constant material, a pore generator material, and a solvent. In this embodiment, the present method then applies the solution to a surface above which it is desired to form the region of low dielectric constant nanoporous material. Next, the present embodiment subjects the solution, which has been applied to the surface, to a thermal process such that a region of low dielectric constant nanoporous material is formed above the surface.

摘要翻译： 公开了一种形成低介电常数纳米多孔材料区域的方法。 在一个实施例中，本方法包括组合多种材料以形成溶液的步骤。 在本实施例中，包括低介电常数材料，孔发生器材料和溶剂的多种材料。 在本实施例中，本方法然后将溶液施加到希望形成低介电常数纳米多孔材料区域的表面上。 接下来，本实施例将已经施加到表面的溶液作为热处理，使得在表面上方形成低介电常数纳米多孔材料的区域。