公开(公告)号：US11821953B2

公开(公告)日：2023-11-21

申请号：US17534179

申请日：2021-11-23

Applicant: Brooks Automation, Inc.

Inventor： Jairo T Moura ,  Nathan Spiker ,  Aaron Gawlik ,  Jayaraman Krishnasamy

IPC: G01R31/34 ,  G01L3/22 ,  H02P23/12 ,  H02P23/00 ,  H02P6/10 ,  H02P25/098

CPC classification number: G01R31/34 ,  G01L3/22 ,  H02P6/10 ,  H02P23/0031 ,  H02P23/12 ,  H02P25/098

Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.

公开(公告)号：US20210098276A1

公开(公告)日：2021-04-01

申请号：US17014575

申请日：2020-09-08

Applicant: Brooks Automation, Inc.

Inventor： Jairo T Moura ,  Aaron Gawlik ,  Reza Saeidpourazar

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.