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    Method and apparatus for brushless electrical machine control
    1.
    发明授权
    Method and apparatus for brushless electrical machine control 有权

    公开(公告)号：US10564221B2

    公开(公告)日：2020-02-18

    申请号：US14540077

    申请日：2014-11-13

    Applicant: Brooks Automation, Inc.

    Inventor： Jairo T. Moura ,  Nathan Spiker ,  Aaron Gawlik ,  Jayaraman Krishnasamy

    IPC: G01R31/34 ,  G01L3/22

    Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.

    Substrate processing apparatus
    2.
    发明授权
    Substrate processing apparatus 有权

    公开(公告)号：US10325795B2

    公开(公告)日：2019-06-18

    申请号：US15849002

    申请日：2017-12-20

    Applicant: BROOKS AUTOMATION, INC.

    Inventor： Robert T. Caveney ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo T. Moura

    IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

    Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

    Time-optimal trajectories for robotic transfer devices
    3.
    发明授权
    Time-optimal trajectories for robotic transfer devices 有权

    公开(公告)号：US10058998B2

    公开(公告)日：2018-08-28

    申请号：US15376119

    申请日：2016-12-12

    Applicant: BROOKS AUTOMATION, INC.

    Inventor： Jayaraman Krishnasamy ,  Martin Hosek

    IPC: H01L21/67 ,  B25J9/16 ,  H01L21/677 ,  G05B19/416

    CPC classification number: B25J9/1664 ,  G05B19/416 ,  G05B2219/40449 ,  G05B2219/40466 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67766 ,  Y02P90/083

    Abstract: A time-optimal trajectory generation method, for a robotic manipulator haying a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.

    Time-optimal trajectories for robotic transfer devices
    4.
    发明授权
    Time-optimal trajectories for robotic transfer devices 有权

    公开(公告)号：US10967511B2

    公开(公告)日：2021-04-06

    申请号：US16115505

    申请日：2018-08-28

    Applicant: BROOKS AUTOMATION, INC.

    Inventor： Jayaraman Krishnasamy ,  Martin Hosek

    IPC: B25J9/16 ,  H01L21/67 ,  H01L21/677 ,  G05B19/416

    Abstract: A time-optimal trajectory generation method, for a robotic manipulator having a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time-optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.

    SUBSTRATE PROCESSING APPARATUS
    9.
    发明申请
    SUBSTRATE PROCESSING APPARATUS 有权

    公开(公告)号：US20220172972A1

    公开(公告)日：2022-06-02

    申请号：US17544844

    申请日：2021-12-07

    Applicant: Brooks Automation, Inc.

    Inventor： Robert T. CAVENEY ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo Moura

    IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

    Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

    Substrate processing apparatus
    10.
    发明授权
    Substrate processing apparatus 有权

    公开(公告)号：US10600665B2

    公开(公告)日：2020-03-24

    申请号：US16444225

    申请日：2019-06-18

    Applicant: BROOKS AUTOMATION, INC.

    Inventor： Robert T. Caveney ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo T. Moura

    IPC: H01L21/00 ,  H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

    Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

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