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公开(公告)号：US20180112974A1
公开(公告)日：2018-04-26
申请号：US15849911
申请日：2017-12-21
Applicant: CKD Corporation
Inventor： Tsuyoshi Ohyama , Norihiko Sakaida , Takahiro Mamiya , Hiroyuki Ishigaki
CPC classification number: G01B11/2513 , G01B11/0608 , G01B11/2527 , G01N21/956 , G01N2021/95646 , G06T7/001 , G06T7/521 , G06T7/60 , G06T2200/04 , G06T2207/10152 , G06T2207/30141 , G06T2207/30148 , G06T2207/30152 , H05K13/08
Abstract: A three-dimensional measurement device includes a light source and grid that irradiate a measurement object; a luminance controller that changes luminance levels of the light; a phase controller that changes phase levels of the light pattern; a camera that takes an image of the measurement object; and a processor that three-dimensionally measures a first measurement object area based on different image data taken by radiating a first light pattern in different phases; determines a relationship between a gain and offset determined according to an imaging condition based on the different image data; and three-dimensionally measures a second measurement object area based on two different image data taken by radiating a second light pattern in two different phases by using a gain and offset regarding each pixel determined according to a luminance value of each pixel in the two different image data and the determined relationship.
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公开(公告)号：US20230366668A1
公开(公告)日：2023-11-16
申请号：US18354635
申请日：2023-07-18
Applicant: CKD CORPORATION , UTSUNOMIYA UNIVERSITY
Inventor： Hiroyuki Ishigaki , Tomoru Okada , Ikuo Futamura , Takahiro Mamiya , Yoshio Hayasaki
IPC: G01B9/02015 , G01B9/02001
CPC classification number: G01B9/0203 , G01B9/02007 , G01B9/02024 , G01B2290/45
Abstract: A three-dimensional measurement device includes: an optical system including an optical device that splits an incident light, irradiates a measurement object with a measurement light, irradiates a reference plane with a reference light, and combines at least part of the reflected measurement light with at least part of the reflected reference light to emit a combined light; a first light emitter that emits a first light that has a first wavelength; a second light emitter that emits a second light that has a second wavelength; a first imaging device that takes an image of an output light output from the optical device in which the first light enters; a second imaging device that takes an image of an output light output from the optical device in which the second light enters; and a control device that executes three-dimensional measurement of the measurement object.
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公开(公告)号：US10782122B2
公开(公告)日：2020-09-22
申请号：US16194576
申请日：2018-11-19
Applicant: CKD Corporation
Inventor： Hiroyuki Ishigaki , Takahiro Mamiya
Abstract: A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measurement object and the other as reference light to a reference surface, and recombines the two lights to emit combined light; a first irradiation unit that emits first light entering the optical system; a second irradiation unit that emits second light entering the optical system; a first imaging unit into which output light that is obtained from the first light and is emitted from the optical system enters; a second imaging unit into which output light that is obtained from the second light and is emitted from the optical system enters; and an image processor that executes three-dimensional measurement of the measurement object, based on interference fringe images taken by the first imaging unit and the second imaging unit.
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公开(公告)号：US10704888B2
公开(公告)日：2020-07-07
申请号：US15820816
申请日：2017-11-22
Applicant: CKD Corporation
Inventor： Hiroyuki Ishigaki , Takahiro Mamiya
Abstract: A three-dimensional measurement device includes an optical system that: splits an incident light into two lights; radiates one light to a measurement object and the other light to a reference surface; and emits the combined light; a first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first element of the optical system; a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second element of the optical system; a first camera that takes an image of the first light emitted from the second element when the first light enters the first element; a second camera that takes an image of the second light emitted from the first element when the second light enters the second element; and an image processor that performs measurement based on the images.
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公开(公告)号：US10514253B2
公开(公告)日：2019-12-24
申请号：US15596788
申请日：2017-05-16
Applicant: CKD Corporation
Inventor： Tsuyoshi Ohyama , Norihiko Sakaida , Takahiro Mamiya , Hiroyuki Ishigaki
Abstract: A measurement apparatus includes an illumination device irradiating an object with a first and a second pattern, a camera taking image data of the object, a motor displacing the object, and a processor measuring the object, obtaining a first value of the object based on a first number of image data taken with the first pattern at a first number of phases at a first position, obtaining a gain and/or offset based on the first number of image data, obtaining a second value of the object based on the gain and/or offset and a second number of image data taken with the second pattern at a second number of phases at a second position, obtaining height data of the object based on the first and the second value, and obtaining the second value with an average of the gain and/or offset of pixels adjacent to each pixel.
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Patent Agency Ranking
公开(公告)号：US20190178625A1
公开(公告)日：2019-06-13
申请号：US16279297
申请日：2019-02-19
Applicant: CKD CORPORATION
Inventor： Hiroyuki Ishigaki , Takahiro Mamiya
Abstract: A measurement device includes: an optical system that splits incident light into two lights to emit one light as measurement light to a measurement object and the other light as reference light to a reference surface, and recombines the two lights to emit combined light; a light emitter that emits light entering the optical system; an imaging system that takes an image of output light emitted from the optical system; and a processor that executes measurement with regard to a predetermined measurement area of the measurement object, based on an interference fringe image taken by the imaging system, wherein the processor: obtains complex amplitude data at a predetermined position in an optical axis direction at predetermined intervals in at least a predetermined range in the optical axis direction, with regard to a specific area set in advance in the measurement area based on the interference fringe image.
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公开(公告)号：US20190094016A1
公开(公告)日：2019-03-28
申请号：US16194576
申请日：2018-11-19
Applicant: CKD Corporation
Inventor： Hiroyuki Ishigaki , Takahiro Mamiya
Abstract: A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measurement object and the other as reference light to a reference surface, and recombines the two lights to emit combined light; a first irradiation unit that emits first light entering the optical system; a second irradiation unit that emits second light entering the optical system; a first imaging unit into which output light that is obtained from the first light and is emitted from the optical system enters; a second imaging unit into which output light that is obtained from the second light and is emitted from the optical system enters; and an image processor that executes three-dimensional measurement of the measurement object, based on interference fringe images taken by the first imaging unit and the second imaging unit.
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公开(公告)号：US20180106590A1
公开(公告)日：2018-04-19
申请号：US15820816
申请日：2017-11-22
Applicant: CKD Corporation
Inventor： Hiroyuki Ishigaki , Takahiro Mamiya
CPC classification number: G01B9/0203 , G01B9/02007 , G01B9/02011 , G01B9/02018 , G01B9/02024 , G01B9/02027 , G01B9/02057 , G01B9/02079 , G01B9/02081 , G01B11/2441 , G01B2290/45 , G01B2290/70 , G01J3/0205 , H01L22/12 , H05K3/00
Abstract: A three-dimensional measurement device includes an optical system that: splits an incident light into two lights; radiates one light to a measurement object and the other light to a reference surface; and emits the combined light; a first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first element of the optical system; a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second element of the optical system; a first camera that takes an image of the first light emitted from the second element when the first light enters the first element; a second camera that takes an image of the second light emitted from the first element when the second light enters the second element; and an image processor that performs measurement based on the images.
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公开(公告)号：US11118895B2
公开(公告)日：2021-09-14
申请号：US16874222
申请日：2020-05-14
Applicant: CKD CORPORATION
Inventor： Hiroyuki Ishigaki , Takahiro Mamiya
Abstract: A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measured object and the other of the two lights as reference light to a reference surface, and recombines the two lights into combined light to emit the combined light; a light emitter that emits predetermined light entering the predetermined optical system; an imaging system that takes an image of output light emitted from the optical system; and an image processor that performs three-dimensional measurement of a predetermined measurement area of the measured object based on an interference fringe image obtained by the imaging system. The image processor obtains intensity image data at a predetermined position along an optical axis direction at each coordinate position in the measurement area by reconstruction based on an interference fringe image of the measurement area.
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公开(公告)号：US20200271434A1
公开(公告)日：2020-08-27
申请号：US16874222
申请日：2020-05-14
Applicant: CKD CORPORATION
Inventor： Hiroyuki Ishigaki , Takahiro Mamiya
IPC: G01B9/021
Abstract: A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measured object and the other of the two lights as reference light to a reference surface, and recombines the two lights into combined light to emit the combined light; a light emitter that emits predetermined light entering the predetermined optical system; an imaging system that takes an image of output light emitted from the optical system; and an image processor that performs three-dimensional measurement of a predetermined measurement area of the measured object based on an interference fringe image obtained by the imaging system. The image processor obtains intensity image data at a predetermined position along an optical axis direction at each coordinate position in the measurement area by reconstruction based on an interference fringe image of the measurement area.
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