公开(公告)号：US20220003803A1

公开(公告)日：2022-01-06

申请号：US17329172

申请日：2021-05-25

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Andrew Ronaldi TANDIO ,  Hung-Chan CHIANG ,  Bo-Fan TSAI

IPC: G01R29/22 ,  H01L41/257 ,  G01R29/12

Abstract: A method for monitoring polarization quality of a piezoelectric film is described. In this method, a detection step is performed on a piezoelectric film by using a detection device with a non-contact method during a polarization process of the piezoelectric film, to obtain a static electricity information or a transmittance information. A determination step is performed by using the static electricity information or the transmittance information to determine a polarization degree of the piezoelectric film.

公开(公告)号：US20160258816A1

公开(公告)日：2016-09-08

申请号：US14849567

申请日：2015-09-09

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Yi-Ming HSU ,  Li-Min WANG ,  Yu-Chun HUANG ,  Yen-Cheng CHEN

IPC: G01J3/443 ,  G01J1/42

CPC classification number: G01J3/443 ,  G01J3/28 ,  G01J3/2803

Abstract: An optical method for monitoring plasma discharging glow is described, which includes the following steps. Plasma discharging glow is detected to obtain various optical signals using a detector. The optical signals are captured and converted into various electric signals by using a sensing circuit. A calculation step is performed according to the electric signals to obtain various light intensities corresponding to various locations in the plasma discharging glow using an arithmetic unit. An image of the plasma discharging glow is reconstructed according to the locations in the plasma discharging glow and the corresponding light intensities using an image reconstruction unit.

Abstract translation: 描述了用于监测等离子体放电辉光的光学方法，其包括以下步骤。 检测等离子体放电辉光以使用检测器获得各种光信号。 通过使用感测电路将光信号捕获并转换成各种电信号。 根据电信号执行计算步骤，以使用运算单元来获得对应于等离子体放电辉光中的各种位置的各种光强度。 根据等离子体放电辉光中的位置和使用图像重建单元的对应光强度重建等离子体放电辉光的图像。

公开(公告)号：US20210320242A1

公开(公告)日：2021-10-14

申请号：US17163585

申请日：2021-02-01

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Andrew Ronaldi TANDIO ,  Bo-Fan TSAI

IPC: H01L41/257 ,  H01L41/193 ,  H01L41/317

Abstract: A method for polarizing a piezoelectric film is described. In this method, a piezoelectric film is formed by using an injection deposition method. The piezoelectric film is flat adhered to a surface of a conductive substrate. A polarization process is performed on the piezoelectric film while the piezoelectric film is flat adhered to the surface of the conductive substrate.

公开(公告)号：US20210160995A1

公开(公告)日：2021-05-27

申请号：US17087577

申请日：2020-11-02

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Andrew Ronaldi TANDIO

IPC: H05H1/24

Abstract: A polarization apparatus includes a conductive carrier, a dielectric barrier discharge (DBD) plasma source, an electric net, a DBD power supply, and a DC power supply. The conductive carrier has a carrying surface which is configured to carry a work piece. The work piece includes a piezoelectric material film, and the conductive carrier is grounded. The DBD plasma source is disposed over the carrying surface and is configured to apply plasma toward the piezoelectric material film. The electric net is disposed between the carrying surface and the DBD plasma source. The DBD power supply includes a first electrode and a second electrode, in which the first electrode is electrically connected to the DBD plasma source, and the second electrode is grounded. The DC power supply includes a third electrode and a fourth electrode. The third electrode is electrically connected to the electric net, and the fourth electrode is grounded.

公开(公告)号：US20180008989A1

公开(公告)日：2018-01-11

申请号：US15622069

申请日：2017-06-13

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Min-Sheng YU ,  Guan-Hung SHEN ,  Andrew Ronaldi TANDIO

IPC: B03C3/38 ,  A61L9/22 ,  F24F3/16 ,  H01T23/00

CPC classification number: B03C3/38 ,  A61L9/22 ,  B03C3/12 ,  B03C3/41 ,  B03C3/47 ,  B03C3/60 ,  B03C2201/06 ,  B03C2201/10 ,  F24F3/166 ,  H01T23/00

Abstract: A plasma purification module is described. The plasma purification module includes a first electrode plate, a second electrode plate, at least one long electrode and a catchment element. The first electrode plate is configured to be connected to a first electrode of a power supply. The second electrode plate is disposed over a surface of the first electrode plate, and is configured to be connected to a second electrode of the power supply, in which the second electrode plate has a channel. The long electrode is configured to form a discharge area. The long electrode is disposed on the surface of the first electrode plate and passes through the channel. The long electrode has a tip. The catchment element is disposed adjacent to the tip, and is configured to provide the discharge area with mist or water.