PRESSURE SENSOR
    2.
    发明申请
    PRESSURE SENSOR 审中-公开

    公开(公告)号:US20190120709A1

    公开(公告)日:2019-04-25

    申请号:US16226998

    申请日:2018-12-20

    Abstract: The present disclosure provides a pressure sensor configured to generate an electrical output according to a fluid pressure in a detection space applied to a diaphragm. The diaphragm is flexibly deformable in a thickness direction. The pressure sensor includes a pressure receiving recess defining the detection space and a protection film covering the pressure receiving recess. The protection film has a corner portion provided in an inner corner area of the pressure receiving recess. The corner portion is located outside the diaphragm in an in-plane direction orthogonal to the thickness direction.

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