公开(公告)号：US20150326979A1

公开(公告)日：2015-11-12

申请号：US14653820

申请日：2012-12-18

Applicant: EPCOS AG

Inventor： Jan Tue Ravnkilde ,  Marcel Giesen ,  Kurt Rasmussen ,  Morten Ginnerup ,  Pirmin Hermann Otto Rombach ,  Wolfgang Pahl ,  Anton Leidl ,  Armin Schober ,  Jürgen Portmann

IPC: H04R19/04 ,  H04R1/04 ,  H04R31/00 ,  H04R19/00

CPC classification number: H04R19/005 ,  B81B7/0016 ,  B81B2207/115 ,  H04R1/04 ,  H04R19/04 ,  H04R31/00 ,  H04R31/006 ,  H04R2201/003

Abstract: A top-port MEMS-microphone has an upper side and a bottom side. The microphone includes a MEMS chip with a monolithically connected protection element at the upper side, a backplate, and a membrane. The microphone also includes a sound inlet at the upper side and a mechanical or electrical connection at the bottom side.

Abstract translation: 顶端MEMS麦克风具有上侧和底侧。 麦克风包括在上侧具有单片连接的保护元件的MEMS芯片，背板和膜。 麦克风还包括在上侧的声音入口和在底侧的机械或电气连接。

公开(公告)号：US10136226B2

公开(公告)日：2018-11-20

申请号：US14653820

申请日：2012-12-18

Applicant: EPCOS AG

Inventor： Jan Tue Ravnkilde ,  Marcel Giesen ,  Kurt Rasmussen ,  Morten Ginnerup ,  Pirmin Hermann Otto Rombach ,  Wolfgang Pahl ,  Anton Leidl ,  Armin Schober ,  Jürgen Portmann

IPC: H04R19/00 ,  H04R1/04 ,  H04R31/00 ,  H04R19/04 ,  B81B7/00

Abstract: A top-port MEMS-microphone has an upper side and a bottom side. The microphone includes a MEMS chip with a monolithically connected protection element at the upper side, a backplate, and a membrane. The microphone also includes a sound inlet at the upper side and a mechanical or electrical connection at the bottom side.