公开(公告)号：US20190078696A1

公开(公告)日：2019-03-14

申请号：US15743109

申请日：2016-07-08

Applicant: Entegris, Inc.

Inventor： Glenn M. Tom ,  Karl W. Olander ,  James A. Dietz ,  Michael J. Wodjenski ,  Edward A. Sturm ,  Susan K. Dimascio ,  Luping Wang ,  James V. McManus ,  Steven M. Lurcott ,  Jose I. Amo ,  Paul J. Marganski ,  Joseph D. Sweeney ,  Shaun M. Wilson ,  Steven E. Bishop ,  Greg Nelson ,  Donald J. Carruthers ,  Sharad N. Yedave ,  Ying Tang ,  Joseph Despres ,  Barry Chambers ,  Richard Ray ,  Daniel Elzer

IPC: F16K17/00 ,  F16K17/04 ,  F16K31/00 ,  F16K31/06 ,  F17C13/04

Abstract: Fluid supply packages of varying types are described, which are useful for delivery of fluids to fluid-utilizing facilities such as semiconductor manufacturing facilities, solar panel manufacturing facilities, and flat-panel display manufacturing facilities. The fluid supply packages include fluid supply vessels and valve heads of varied configuration, as useful to constitute fluid supply packages that are pressure-regulated and/or adsorbent-based in character.

公开(公告)号：US09132412B2

公开(公告)日：2015-09-15

申请号：US14035834

申请日：2013-09-24

Applicant: Entegris, Inc.

Inventor： J. Donald Carruthers ,  Karl Boggs ,  Luping Wang ,  Shaun M. Wilson ,  Jose I. Arno ,  Paul J. Marganski ,  Steven M. Bilodeau ,  Peng Zou ,  Brian Bobita ,  Joseph D. Sweeney ,  Douglas Edwards

IPC: B01J20/26 ,  B01J20/28 ,  F25B17/08 ,  F25B27/00 ,  F25B35/04 ,  B01J20/20 ,  B01J20/30 ,  C09K5/04 ,  F25B37/00

CPC classification number: B01J20/26 ,  B01J20/20 ,  B01J20/28054 ,  B01J20/28092 ,  B01J20/30 ,  B01J20/305 ,  B01J20/3078 ,  B01J2220/445 ,  C09K5/047 ,  F25B17/08 ,  F25B27/007 ,  F25B35/04 ,  F25B37/00 ,  F25B2500/01

Abstract: An adsorption structure is described that includes at least one adsorbent member formed of an adsorbent material and at least one porous member provided in contact with a portion of the adsorbent member to allow gas to enter and exit the portion of the adsorbent member. Such adsorption structure is usefully employed in adsorbent-based refrigeration systems. A method also is described for producing an adsorbent material, in which a first polymeric material provided having a first density and a second polymeric material is provided having a second density, in which the second polymeric material is in contact with the first polymeric material to form a structure. The structure is pyrolyzed to form a porous adsorbent material including a first region corresponding to the first polymeric material and a second region corresponding to the second polymeric material, in which at least one of the pore sizes and the pore distribution differs between the first region and the second region.

Abstract translation: 描述了吸附结构，其包括由吸附剂材料形成的至少一个吸附构件和与吸附构件的一部分接触设置的至少一个多孔构件，以允许气体进入和离开吸附构件的该部分。 这种吸附结构在吸附剂型制冷系统中有用。 还描述了一种用于生产吸附材料的方法，其中提供具有第一密度的第一聚合物材料和第二聚合物材料，其具有第二密度，其中第二聚合物材料与第一聚合物材料接触以形成 一个结构。 该结构被热解以形成多孔吸附材料，其包括对应于第一聚合物材料的第一区域和对应于第二聚合物材料的第二区域，其中孔径和孔分布中的至少一个在第一区域和第 第二个地区。