公开(公告)号：US20210370259A1

公开(公告)日：2021-12-02

申请号：US17398891

申请日：2021-08-10

Applicant: ENTEGRIS, INC.

Inventor： Lawrence H. Dubois ,  Donald J. Carruthers ,  Melissa A. Petruska ,  Edward A. Sturm ,  Shaun M. Wilson ,  Steven M. Lurcott ,  Bryan C. Hendrix ,  Joseph D. Sweeney ,  Michael J. Wodjenski ,  Oleg Byl ,  Ying Tang ,  Joseph R. Despres ,  Matthew Thomas Marlow ,  Christopher Scannell ,  Daniel Elzer ,  Kavita Murthi

IPC: B01J20/10 ,  B01J20/20 ,  B01J20/22 ,  B01J20/28 ,  F17C11/00 ,  H01L21/67 ,  B01J20/26 ,  B01J20/02

Abstract: Adsorbents of varying types and forms are described, as usefully employed in gas supply packages that include a gas storage and dispensing vessel holding such adsorbent for storage of sorbate gas thereon, and a gas dispensing assembly secured to the vessel for discharging the sorbate gas from the gas supply package under dispensing conditions thereof. Corresponding gas supply packages are likewise described, and various methods of processing the adsorbent, and manufacturing the gas supply packages.

公开(公告)号：US20200206717A1

公开(公告)日：2020-07-02

申请号：US15773652

申请日：2016-11-04

Applicant: ENTEGRIS, INC.

Inventor： Lawrence H. Dubois ,  Donald J. Carruthers ,  Melissa A. Petruska ,  Edward A. Sturm ,  Shaun M. Wilson ,  Steven M. Lurcott ,  Bryan C. Hendrix ,  Joseph D. Sweeney ,  Michael J. Wodjenski ,  Oleg Byl ,  Ying Tang ,  Joseph R. Despres ,  Matthew Thomas Marlow ,  Christopher Scannell ,  Daniel Elzer ,  Kavita Murthi

IPC: B01J20/10 ,  B01J20/28 ,  B01J20/22 ,  B01J20/20 ,  H01L21/67 ,  F17C11/00

Abstract: Adsorbents of varying types and forms are described, as usefully employed in gas supply packages that include a gas storage and dispensing vessel holding such adsorbent for storage of sorbate gas thereon, and a gas dispensing assembly secured to the vessel for discharging the sorbate gas from the gas supply package under dispensing conditions thereof. Corresponding gas supply packages are likewise described, and various methods of processing the adsorbent, and manufacturing the gas supply packages.

公开(公告)号：US20190078696A1

公开(公告)日：2019-03-14

申请号：US15743109

申请日：2016-07-08

Applicant: Entegris, Inc.

Inventor： Glenn M. Tom ,  Karl W. Olander ,  James A. Dietz ,  Michael J. Wodjenski ,  Edward A. Sturm ,  Susan K. Dimascio ,  Luping Wang ,  James V. McManus ,  Steven M. Lurcott ,  Jose I. Amo ,  Paul J. Marganski ,  Joseph D. Sweeney ,  Shaun M. Wilson ,  Steven E. Bishop ,  Greg Nelson ,  Donald J. Carruthers ,  Sharad N. Yedave ,  Ying Tang ,  Joseph Despres ,  Barry Chambers ,  Richard Ray ,  Daniel Elzer

IPC: F16K17/00 ,  F16K17/04 ,  F16K31/00 ,  F16K31/06 ,  F17C13/04

Abstract: Fluid supply packages of varying types are described, which are useful for delivery of fluids to fluid-utilizing facilities such as semiconductor manufacturing facilities, solar panel manufacturing facilities, and flat-panel display manufacturing facilities. The fluid supply packages include fluid supply vessels and valve heads of varied configuration, as useful to constitute fluid supply packages that are pressure-regulated and/or adsorbent-based in character.