公开(公告)号：US08132782B2

公开(公告)日：2012-03-13

申请号：US12688235

申请日：2010-01-15

Applicant: Bernhard Duelli ,  Friedrich Geiser

Inventor： Bernhard Duelli ,  Friedrich Geiser

IPC: F16K29/00

CPC classification number: F16K51/02 ,  F16K3/18 ,  Y10T137/0396

Abstract: A method for controlling or regulating a vacuum valve that includes: a valve body (1) with a valve opening (2); a closing member (3) that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum valve and that closes the valve opening (2) in the closed position, in which at least one elastic seal (4) is pressed onto a seal face (35); an actuator (5) for moving the closing member (3); and a control device (9) by which the actuator (5) can be triggered; the point (p) of the closing path (s) at which the elastic seal (4) contacts the seal face (35) and/or a velocity (v) of the closing member (3) at that point is used as a controlling parameter for the control device (9).

Abstract translation: 一种用于控制或调节真空阀的方法，包括：具有阀门开口（2）的阀体（1）; 关闭构件（3），其能够在关闭所述真空阀的关闭路径上的打开位置和关闭位置之间移动，并且在所述关闭位置关闭所述阀开口（2），其中至少一个弹性 密封件（4）被压到密封面（35）上; 用于移动关闭构件（3）的致动器（5）; 以及可以触发致动器（5）的控制装置（9）; 弹性密封件（4）接触密封面（35）的闭合路径的点（p）和/或该点处的关闭构件（3）的速度（v）被用作控制 控制装置（9）的参数。

公开(公告)号：US07658367B2

公开(公告)日：2010-02-09

申请号：US11588354

申请日：2006-10-27

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K1/16

CPC classification number: F16K51/02 ,  F16K3/10

Abstract: The invention relates to a valve, in particular a pendulum or slide gate valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1; 1a) having a first wall (2) which has a first opening (3) and a first valve seat (4), a valve disk (5) having a closing side (6) with a sealing ring (7) and at least one drive (8). Through drive (8), the valve disk (5) is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (4), and the perpendicular distance between the valve disk (5), and the first valve seat (4) can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the sealing ring (7) and the first valve seat (4). The valve disk (5) includes an outer disk section (9), which is connected to the drive (8) and fixes the sealing ring (7) in the perpendicular direction to the first valve seat (4), and an inner disk section (10) which has an outer circumferential area (11) and which is mounted so as to be movable relative to the outer disk section (9) in a direction (Z) essentially perpendicular to the first valve seat (4). The outer circumferential area (11) is enclosed essentially gastight with an inner seal by the sealing ring (7). Thus, in the closed position (C), a pressure difference at the valve disk (5) acts essentially on the inner disk section (10) so that the inner disk section (10), decoupled from the outer disk section (9), is supported perpendicularly on a section of the valve housing (1), in particular the first valve seat (4) or a lateral groove (27).

Abstract translation: 本发明涉及一种用于基本上气密地关闭流路（F）的阀，特别是摆锤或滑动闸阀。 所述阀包括具有第一壁（2）的阀壳（1; 1a），所述第一壁具有第一开口（3）和第一阀座（4），阀盘（5）具有封闭侧（6） 密封环（7）和至少一个驱动器（8）。 通过驱动（8），阀盘（5）可从基本上平行于第一阀座（4）的打开位置（A）枢转或移动，并且阀盘（5）与第一阀 座（4）可以减小，使得在关闭位置（C）中，通过密封环（7）和第一阀座（4）之间的轴向密封接触，流路（F）基本上气密地闭合。 阀盘（5）具有与驱动装置（8）连接并与第一阀座（4）垂直的方向固定密封环（7）的外盘部（9），内盘部 （10），其具有外周区域（11），并且安装成能够相对于外盘部分（9）沿基本上垂直于第一阀座（4）的方向（Z）移动。 通过密封环（7），外圆周区域（11）通过内部密封件基本上气密地封闭。 因此，在关闭位置（C）中，阀盘（5）的压差基本上在内盘部（10）上作用，使得与外盘部（9）脱离的内盘部（10） 垂直地支撑在阀壳体（1）的一部分上，特别是第一阀座（4）或横向凹槽（27）上。

公开(公告)号：US20070138426A1

公开(公告)日：2007-06-21

申请号：US11641114

申请日：2006-12-19

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K1/16

CPC classification number: F16K51/02 ,  F16K3/10

Abstract: The invention relates to a valve, in particular a pendulum or slide gate valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1) having a first wall (2) which has a first opening (3) and a first valve seat (4), a valve plate (5) having a closing side (6) with a first sealing ring (7) and at least one drive (8). By action of the drive (8), the valve plate (5) is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (4), and the perpendicular distance between the valve plate (5), and the first valve seat (4) can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the first sealing ring (7) and the first valve seat (4). The valve plate (5) includes support part (9), which is connected to the drive (8) and fixes the first sealing ring (7) in the perpendicular direction to the first valve seat (4), and a sealing part (10) which has an inner circumferential area (11) and which is mounted so as to be movable relative to the support part (9) in a direction (Z) essentially perpendicular to the first valve seat (4). The inner circumferential area (11) encloses the first sealing ring (7) in an essentially gastight way with an inner seal. Thus, in the closed position (C), a pressure difference at the valve plate (5) acts essentially on the sealing part (10) so that sealing part (10), decoupled from the support part (9), is supported perpendicularly on a section of the valve housing (1), in particular the first valve seat (4) or a lateral groove (27).

Abstract translation: 本发明涉及一种用于基本上气密地关闭流路（F）的阀，特别是摆锤或滑动闸阀。 阀包括具有第一壁（2）的阀壳（1），该第一壁具有第一开口（3）和第一阀座（4），阀板（5）具有封闭侧（6） 环（7）和至少一个驱动器（8）。 通过驱动器（8）的作用，阀板（5）可从基本平行于第一阀座（4）的打开位置（A）枢转或移动，并且阀板（5）与阀板 可以减小第一阀座（4），使得在关闭位置（C）中，通过第一密封环（7）和第一阀座（6）之间的轴向密封接触，流动路径（F）基本上气密地闭合 4）。 阀板（5）包括支撑部分（9），其连接到驱动器（8）并且沿与第一阀座（4）垂直的方向固定第一密封环（7），并且密封部件 ），其具有内圆周区域（11），并且安装成能够相对于支撑部件（9）沿基本上垂直于第一阀座（4）的方向（Z）移动。 内周区域（11）以基本上气密的方式围绕第一密封环（7）以内密封封闭。 因此，在关闭位置（C）中，阀板（5）处的压力差基本上在密封部件（10）上作用，使得与支撑部件（9）分离的密封部件（10）垂直地支撑在 阀壳体（1）的一部分，特别是第一阀座（4）或横向凹槽（27）。

公开(公告)号：US08622368B2

公开(公告)日：2014-01-07

申请号：US13020248

申请日：2011-02-03

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K1/16

CPC classification number: H01L21/67126 ,  F16K1/2007 ,  F16K1/2028 ,  F16K1/205 ,  F16K51/02 ,  H01L21/67751 ,  H01L21/67772

Abstract: A flap transfer valve is disclosed for the transfer of semiconductor elements or substrates into a semiconductor or substrate processing process chamber having an elongated first opening, which is surrounded in the form of a frame by a first sealing surface on a first sealing plane, and an elongated valve closure beam, having a second sealing surface which corresponds to the first sealing surface, can be brought into gas-tight contact with it, and is located on a second sealing plane. A support is arranged on the rear face of the valve closure beam, which is arranged such that it can pivot through a limited pivoting angle about a tilting axis. The support together with the valve closure beam can pivot about a pivoting axis, which lies on the first sealing plane, and the tilting axis lies on the second sealing plane.

Abstract translation: 公开了一种用于将半导体元件或衬底转移到具有细长的第一开口的半导体或衬底处理室中的片状转换阀，该细长的第一开口以第一密封平面上的第一密封表面以框架的形式包围， 具有对应于第一密封表面的第二密封表面的细长阀闭合梁可以与其气密性接触并且位于第二密封平面上。 在阀闭合梁的后表面上布置有支撑件，该支撑件布置成使得其能够围绕倾斜轴线枢转通过有限的枢转角度。 支撑件与阀闭合梁一起可以围绕位于第一密封平面上的枢转轴线枢转，并且倾斜轴线位于第二密封平面上。

公开(公告)号：US07396001B2

公开(公告)日：2008-07-08

申请号：US11311434

申请日：2005-12-20

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K1/16 ,  F16K25/00

CPC classification number: F16K51/02 ,  F16K3/10

Abstract: The invention relates to a valve, in particular a shuffle or sliding valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1;1a) having a first wall (2) which has a first opening (3) and a first valve seat (4), a valve disk (5) having a closing side (6) with a sealing ring (7) and at least one drive (8). Through the drive (8), the valve disk (5) is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (4), and the perpendicular distance between the valve disk (5), and the first valve seat (4) can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the sealing ring (7) and the first valve seat (4). The valve disk (5) includes an outer disk section (9), which is connected to the drive (8) and fixes the sealing ring (7) in the perpendicular direction to the first valve seat (4), and an inner disk section (10) which has an outer circumferential area (11) and which is mounted so as to be movable relative to the outer disk section (9) in a direction (Z) essentially perpendicular to the first valve seat (4). The outer circumferential area (11) is enclosed essentially gastight with an inner seal by the sealing ring (7). Thus, in the closed position (C), a pressure difference at the valve disk (5) acts essentially on the inner disk section (10) so that the inner disk section (10), decoupled from the outer disk section (9), is supported perpendicularly on a section of the valve housing (1), in particular the first valve seat (4) or a lateral groove (27).

Abstract translation: 本发明涉及一种用于基本上气密地关闭流路（F）的阀，特别是洗牌或滑动阀。 所述阀包括具有第一壁（2）的阀壳（1; 1a），所述第一壁具有第一开口（3）和第一阀座（4），阀盘（5）具有封闭侧（6） 密封环（7）和至少一个驱动器（8）。 通过驱动（8），阀盘（5）可从基本上平行于第一阀座（4）的打开位置（A）枢转或移动，并且阀盘（5）与第一阀 可以减小阀座（4），使得在关闭位置（C）中，通过密封环（7）和第一阀座（4）之间的轴向密封接触，流路（F）基本上气密地闭合。 阀盘（5）具有与驱动装置（8）连接并与第一阀座（4）垂直的方向固定密封环（7）的外盘部（9），内盘部 （10），其具有外周区域（11），并且安装成能够相对于外盘部分（9）沿基本上垂直于第一阀座（4）的方向（Z）移动。 通过密封环（7），外圆周区域（11）通过内部密封件基本上气密地封闭。 因此，在关闭位置（C）中，阀盘（5）的压差基本上在内盘部（10）上作用，使得与外盘部（9）脱离的内盘部（10） 垂直地支撑在阀壳体（1）的一部分上，特别是第一阀座（4）或横向凹槽（27）上。

公开(公告)号：US20060049374A1

公开(公告)日：2006-03-09

申请号：US10936163

申请日：2004-09-08

Applicant: Florian Ehrne ,  Christof Bachmann ,  Friedrich Geiser

Inventor： Florian Ehrne ,  Christof Bachmann ,  Friedrich Geiser

IPC: F16K3/00

CPC classification number: F16K3/0227 ,  F16K3/0218 ,  F16K3/14 ,  F16K51/02

Abstract: A vacuum valve comprises a valve housing with a valve opening having a longitudinal axis and a valve seat, a valve plate which is displaceable in a straight line in a displacement direction between an open position in which it releases the valve opening and a closed position in which its contacts the valve seat of the valve housing and closes and seals the valve opening, this valve plate being arranged on at least one valve rod which is displaceable axial to the displacement of the valve plate, a flexible sealing ring which is arranged at a front side of the valve plate or at the valve seat of the valve housing, a sealing surface which is arranged at the valve seat of the valve housing or at the front side of the valve plate and which is contacted by the sealing ring in the closed position of the valve plate, wherein the sealing surface and the sealing ring are arranged in parallel planes which are inclined relative to the displacement direction of the valve plate around an axis extending at right angles to the displacement direction and at right angles to the longitudinal axis of the valve opening, and at least one sliding-spacing part which is arranged at the front side of the valve plate next to the sealing ring or sealing surface or at the valve seat next to the sealing surface or sealing ring and which forms a sliding bearing for the valve plate relative to the valve housing when closing the valve along a final section of the displacement path of the valve plate until the closed position of the valve plate is reached and which keeps the valve plate at a distance from the valve housing in the closed position of the valve plate and accordingly limits the pressing of the sealing ring.

Abstract translation: 真空阀包括具有纵向轴线和阀座的阀开口的阀壳体，阀板，其在释放阀开口的打开位置和释放阀开口的打开位置之间在位移方向上以直线移位， 其与阀壳体的阀座接触并关闭并密封阀开口，该阀板布置在至少一个阀杆上，该阀杆可以与阀板的位移轴向移动;柔性密封环，其布置在 阀板的前侧或阀壳的阀座处的密封表面设置在阀壳体的阀座处或阀板的前侧，并且在密封环中与密封环接触 阀板的位置，其中密封表面和密封环布置成平行的平面，相对于围绕轴线延伸的阀板的位移方向倾斜 与所述阀开口的纵向轴线成直角并且与所述阀开口的纵向轴线成直角;以及至少一个滑动间隔部分，所述至少一个滑动间隔部分布置在所述阀板的前侧，靠近所述密封环或密封表面 阀座靠近密封表面或密封环，并且当沿着阀板的位移路径的最后部分关闭阀门时，阀板相对于阀壳体形成滑动轴承，直到阀板的关闭位置 并且在阀板的关闭位置中使阀板保持与阀壳体一定距离，从而限制了密封环的按压。

公开(公告)号：US20060033065A1

公开(公告)日：2006-02-16

申请号：US10917641

申请日：2004-08-13

Applicant: Bernhard Duelli ,  Friedrich Geiser

Inventor： Bernhard Duelli ,  Friedrich Geiser

IPC: F16K25/00

CPC classification number: F16K31/12 ,  F16K3/0254 ,  F16K51/02 ,  Y10T137/7762

Abstract: A method for controlling a vacuum valve arranged between two vacuum chambers comprises a valve body with a valve opening, a closure member which closes the valve opening in a closed state of the vacuum valve and which releases the valve opening in an open state of the vacuum valve, wherein, for closing the valve opening by the closure member in the closed state of the vacuum valve, at least one flexible seal contacts a sealing surface of the vacuum valve, which sealing surface is acted upon by a pressing force in the closed state of the vacuum valve, an actuating device for opening and closing the vacuum valve with at least one actuator by which the seal is placed against the sealing surface for closing the vacuum valve, and with a control unit which controls this at least one actuator, pressure measurement values being supplied to this control unit as input signals from pressure sensors which detect the respective pressure in the two vacuum chambers, wherein a differential pressure between the two vacuum chambers is determined by the control unit and the magnitude of the pressing force acting on the seal in the closed state of the vacuum valve is controlled by the control unit depending on the determined differential pressure by controlling the at least one actuator.

Abstract translation: 一种设置在两个真空室之间的真空阀的控制方法包括具有阀开口的阀体，封闭构件，其在真空阀的关闭状态下关闭阀开口，并且在真空的打开状态下释放阀开口 阀，其中，为了在真空阀的关闭状态下通过关闭构件关闭阀开口，至少一个柔性密封件接触真空阀的密封表面，该密封表面由闭合状态下的压力作用 的致动装置，用于打开和关闭具有至少一个致动器的真空阀的致动装置，通过该致动器将密封件抵靠密封表面放置以关闭真空阀;以及控制单元，其控制该至少一个致动器，压力 作为来自压力传感器的输入信号提供给该控制单元的测量值，该压力传感器检测两个真空室中的相应压力，其中差压为 两个真空室之间的吐温由控制单元确定，并且在真空阀的关闭状态下作用在密封件上的按压力的大小由控制单元根据所确定的压差由控制至少一个致动器来控制。

公开(公告)号：US06357475B1

公开(公告)日：2002-03-19

申请号：US09759099

申请日：2001-01-11

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F15B1307

CPC classification number: F15B13/07 ,  Y10T137/87169

Abstract: A pneumatic sequential control valve for successive aeration and deaeration of two consumers, wherein for purposes of aeration compressed air is initially applied to the first consumer and only subsequently to the second consumer, and for deaeration the compressed air is initially let off from the second consumer and only subsequently from the first consumer, comprises a valve body with connections for a compressed air line and a first consumer and second consumer, wherein a cavity is provided in the valve body, bore holes extend from the connections for the consumers and for the compressed air line to this cavity. A control slide is mounted in this cavity so as to be displaceable, wherein a control space is provided between an end side of the control slide, at which a piston surface is arranged, and the valve body, and this control space communicates, via a choke line, with the bore hole which is connected with the connection for the compressed air line, and the control slide is pretensioned in direction of its first end position by means of a spring arrangement.

Abstract translation: 用于两个使用者的连续曝气和脱气的气动顺序控制阀，其中为了曝气压缩空气的目的最初被施加到第一消费者并且仅次于第二消费者，并且为了脱气，压缩空气最初从第二消费者 并且仅随后从第一消费者中包括具有用于压缩空气管线和第一消费者和第二消费者的连接的阀体，其中在阀体中设置有空腔，钻孔从用于消费者的连接件延伸并且用于压缩 空气管线到这个空腔。 控制滑块安装在该空腔中以便可移动，其中控制空间设置在控制滑块的端部侧，活塞表面设置在该端部侧与阀体之间，并且该控制空间经由 扼流线，其中孔与压缩空气管线的连接部连接，并且控制滑块通过弹簧装置在其第一端部位置的方向上被预张紧。

公开(公告)号：US5379983A

公开(公告)日：1995-01-10

申请号：US171598

申请日：1993-12-21

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K3/18 ,  F16K3/316 ,  F16K3/00

CPC classification number: F16K3/316 ,  F16K3/18

Abstract: A shut-off slide valve for use in pipelines or for closing a container aperture includes a housing, a shut-off member formed of a sealing plate and a counter element spaced from the sealing plate and displaceable in the housing, and an actuation member for displacing the shut-off member in the housing, with the actuation member having a portion extending between the sealing plate and the counter element, and at least one of the sealing plate and the counter element having a collar substantially bridging the space between the sealing plate and the counter element, so that the shut-off member has a shape similar to that of a lid-covered can.

Abstract translation: 用于管道或用于关闭容器孔的截止滑阀包括壳体，由密封板形成的切断构件和与密封板间隔开并可在壳体中移位的相对构件，以及致动构件，用于 所述致动构件具有在所述密封板和所述相对元件之间延伸的部分，并且所述密封板和所述对置元件中的至少一个具有基本上桥接所述密封板和所述对置元件之间的空间的套环， 和相对元件，使得切断构件具有与覆盖盖的罐相似的形状。

公开(公告)号：US4921213A

公开(公告)日：1990-05-01

申请号：US404897

申请日：1989-09-08

Applicant: Friedrich Geiser

Inventor： Friedrich Geiser

IPC: F16K3/02 ,  F16K3/12 ,  F16K3/16 ,  F16K3/18 ,  F16K51/02

CPC classification number: F16K51/02 ,  F16K3/0218 ,  F16K3/12 ,  F16K3/184

Abstract: A valve slide includes a slide housing and defines a slide passage opening. The slide passage opening is closable by a closing member which is slidable in the plane of the slide. A sealing surface surrounds the slide passage opening. In the closed position of the closing member, a circumferentially closed sealing member rests against the sealing surface. Imaginary straight generatrices of the sealing surface extend at a right angle to the plane in which the axis of the slide and the sliding direction of the closing member are located. In the direction of the generatrices of the sealing surfaces, the sealing surface has an upper portion, a middle portion and a lower portion. The upper portion and the lower portion each include an obtuse angle with the middle portion. The planes of the upper portion and the lower extend approximately perpendicularly to the sliding direction of the closing member. At least the components of the sealing member which interact with the middle portion of the sealing surface extend along straight lines and parallel to that plane which includes the axis of the slide and the direction of sliding of the closing member.

Abstract translation: 阀滑块包括滑动壳体并且限定滑动通道开口。 滑动通道开口可通过能够在滑块的平面中滑动的关闭构件来关闭。 密封表面围绕滑动通道开口。 在关闭构件的关闭位置，周向封闭的密封构件抵靠密封表面。 密封表面的虚拟直的母线与滑动件的轴线和闭合件的滑动方向所在的平面成直角地延伸。 在密封面的母线方向上，密封面具有上部，中部和下部。 上部和下部各自包括与中间部分的钝角。 上部和下部的平面大致垂直于闭合件的滑动方向延伸。 至少与密封表面的中间部分相互作用的密封件的部件沿着直线延伸并平行于包括滑动件的轴线和闭合件的滑动方向的平面。