公开(公告)号：US20180048169A1

公开(公告)日：2018-02-15

申请号：US15233454

申请日：2016-08-10

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Abner BELLO ,  Stephanie WAITE ,  William J. FOSNIGHT

IPC: H02J7/00 ,  H02J50/10 ,  H01L21/677 ,  H02J7/02 ,  H01L21/67

CPC classification number: H02J50/10 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67396 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67775 ,  H02J7/0044 ,  H02J7/025

Abstract: Rechargeable wafer carrier systems and methods are provided. A rechargeable wafer carrier system includes, for instance, a housing for holding at least one wafer and at least one electronics system therein, a rechargeable power source operably connected to the housing for powering the at least one electronics system, and a charging interface for receiving a supply of power for charging the rechargeable power source. The housing may be configured for transport within an automated material handling system. Also provided are methods of charging a rechargeable wafer carrier system, which includes, for instance, providing a rechargeable wafer carrier system having at least one electronics system and a rechargeable power source, operably connecting the rechargeable wafer carrier system to a charging base, and supplying power from the charging base to the rechargeable power source.

公开(公告)号：US20170372924A1

公开(公告)日：2017-12-28

申请号：US15193502

申请日：2016-06-27

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Abner BELLO ,  Stephanie WAITE ,  William J. FOSNIGHT ,  Thomas BEEG

IPC: H01L21/673 ,  G01N21/21 ,  G01J5/00 ,  H01L21/66 ,  G01N21/55 ,  G01J5/08

CPC classification number: G01J5/0096 ,  G01J5/0007 ,  G01J5/025 ,  G01J5/0825 ,  G01J5/0896 ,  G01N21/211 ,  G01N21/55 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01N2201/12 ,  G01R27/00 ,  H01L21/67253 ,  H01L21/6732 ,  H01L21/67353 ,  H01L21/67386 ,  H01L22/12

Abstract: A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.

公开(公告)号：US20180143077A1

公开(公告)日：2018-05-24

申请号：US15876472

申请日：2018-01-22

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Abner BELLO ,  Stephanie WAITE ,  William J. FOSNIGHT ,  Thomas BEEG

IPC: G01J5/00

CPC classification number: H01L21/6732 ,  G01J5/0007 ,  G01J5/025 ,  G01J5/0825 ,  G01J5/0896 ,  G01N21/211 ,  G01N21/55 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01N2201/12 ,  G01R27/00 ,  G05B2219/37224 ,  H01L21/67253 ,  H01L21/67353 ,  H01L21/67386 ,  H01L21/67745 ,  H01L22/12

Abstract: A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.