公开(公告)号：US5689749A

公开(公告)日：1997-11-18

申请号：US521845

申请日：1995-08-31

Applicant: Hideya Tanaka ,  Norimitsu Morioka ,  Kosuke Yoshihara

Inventor： Hideya Tanaka ,  Norimitsu Morioka ,  Kosuke Yoshihara

IPC: B05C11/08 ,  G03F7/30 ,  G03D3/02

CPC classification number: G03F7/3021 ,  B05C11/08

Abstract: A developing apparatus for developing a photoresist-coated substrate comprises a spin chuck having a supporting surface smaller in size than the substrate and adapted to be spin-driven with the photoresist-coated substrate surface held upward, a cup surrounding the spin chuck, a developing solution nozzle for applying a developing solution on the photoresist-coated substrate held on the spin chuck, a first washing solution nozzle for applying a washing solution to the photoresist-coated surface of the substrate held on the spin chuck, a second washing solution nozzle for applying the washing solution to a rear surface of the substrate on the spin chuck, a liquid seal ring mounted substantially coaxial with the spin chuck and having a diameter greater than the supporting surface of the spin chuck and smaller than the substrate, and a liquid film forming section provided on an upper end of the liquid seal ring and located near and opposite a peripheral edge portion of a rear surface of the substrate on the spin chuck to provide a clearance relative to the peripheral edge portion of the rear surface of the substrate, in which the liquid film forming section includes a first wall portion situated substantially orthogonal to the rear surface of the substrate and in an outwardly facing relation, and a second wall portion gently inclined relative to the rear surface of the substrate and situated in an inwardly facing relation.

Abstract translation: 用于显影光致抗蚀剂涂覆的基板的显影装置包括旋转卡盘，该旋转卡盘的尺寸小于基底的支撑表面，并且适于被光刻胶涂覆的基底表面保持向上旋转驱动，围绕旋转卡盘的杯，显影 溶液喷嘴，用于将显影液施加在保持在旋转卡盘上的光致抗蚀剂涂覆的基材上;第一洗涤溶液喷嘴，用于将洗涤溶液施加到保持在旋转卡盘上的基材的光致抗蚀剂涂覆表面;第二洗涤溶液喷嘴， 将所述洗涤溶液施加到所述旋转卡盘上的所述基板的后表面;液体密封环，其与所述旋转卡盘大致同轴地安装，并且具有大于所述旋转卡盘的支撑表面的直径并小于所述基板;以及液膜 形成部分设置在液体密封环的上端并且位于与t的后表面的周边边缘附近和相对的位置 旋转卡盘上的衬底以提供相对于衬底的后表面的周边部分的间隙，其中液体膜形成部分包括第一壁部分，该第一壁部分基本上垂直于衬底的后表面并且向外 以及相对于基板的后表面轻轻地倾斜并且位于向内的关系中的第二壁部分。

公开(公告)号：US06379469B1

公开(公告)日：2002-04-30

申请号：US09677894

申请日：2000-10-03

Applicant: Hideya Tanaka ,  Kenichi Miyamoto ,  Minoru Kubota ,  Walter Swanson

Inventor： Hideya Tanaka ,  Kenichi Miyamoto ,  Minoru Kubota ,  Walter Swanson

IPC: B08B700

CPC classification number: H01L21/67051 ,  B08B1/007 ,  B08B1/04 ,  H01L21/67046 ,  Y10S134/902

Abstract: A substrate washing apparatus, comprising a spin chuck for holding and rotating a substrate W, a brushing section including a scrubbing member which is brought into contact with a washing surface of the substrate held on the spin chuck and revolved on its own axis together with rotation of the spin chuck, a washing liquid supply mechanism for supplying a washing liquid through the brushing section onto the washing surface of the substrate, a pressure control mechanism for controlling a pressing force of the scrubbing member against the washing surface of the substrate, and a moving means for moving the scrubbing member relative to the substrate in a radial direction of the substrate, wherein the scrubbing member includes an abutting portion which is brought into contact with the washing surface of the substrate, and a non-contact peripheral portion positioned about the abutting portion and formed not to contact the washing surface of the substrate when the abutting portion is in contact with the washing surface of the substrate.

Abstract translation: 一种基板清洗装置，包括用于保持和旋转基板W的旋转卡盘，包括洗涤部件的刷洗部分，该擦洗部件与保持在旋转卡盘上的基板的清洗表面接触并与其自身的轴线一起旋转 旋转卡盘的洗涤液供给机构，用于将洗涤液通过刷洗部供给到基材的洗涤面上的洗涤液供给机构，用于控制洗涤部件抵靠基材的洗涤面的按压力的压力控制机构， 移动装置，用于沿着衬底的径向移动洗涤构件相对于衬底，其中擦洗构件包括与衬底的洗涤表面接触的邻接部分和围绕衬底的非接触周边部分 邻接部分形成为不邻接基板的清洗表面 与基材的洗涤表面。

公开(公告)号：US20070223909A1

公开(公告)日：2007-09-27

申请号：US11727250

申请日：2007-03-26

Applicant: Hideya Tanaka

Inventor： Hideya Tanaka

IPC: G03B17/18

CPC classification number: H04N1/00307 ,  G06T3/4038 ,  H04N1/00442 ,  H04N1/00453 ,  H04N1/3876 ,  H04N5/23232 ,  H04N5/23293 ,  H04N2201/0414 ,  H04N2201/0424

Abstract: A camera phone according to an embodiment of the invention assists a user in photography upon generating a composite image based on captured images through mosaicing processing or super-resolution processing with the optimum amount of photography images. To that end, a photographing condition analyzing unit analyzing a current photographing condition is provided, and a condition analysis result from the photographing condition analyzing unit is displayed for a user.

Abstract translation: 根据本发明的实施例的相机电话通过使用最佳摄影图像的镶嵌处理或超分辨率处理，基于捕获的图像生成合成图像来帮助用户拍摄。 为此，提供了分析当前拍摄条件的拍摄条件分析单元，并且为用户显示来自拍摄条件分析单元的条件分析结果。

公开(公告)号：US6158075A

公开(公告)日：2000-12-12

申请号：US970617

申请日：1997-11-14

Applicant: Hideya Tanaka ,  Kenichi Miyamoto ,  Minoru Kubota ,  Walter Swanson

Inventor： Hideya Tanaka ,  Kenichi Miyamoto ,  Minoru Kubota ,  Walter Swanson

IPC: B08B1/04 ,  H01L21/00 ,  A47L25/00

CPC classification number: H01L21/67051 ,  B08B1/007 ,  B08B1/04 ,  H01L21/67046 ,  Y10S134/902

Abstract: A substrate washing apparatus, comprising a spin chuck for holding and rotating a substrate W, a brushing section including a scrubbing member which is brought into contact with a washing surface of the substrate held on the spin chuck and revolved on its own axis together with rotation of the spin chuck, a washing liquid supply mechanism for supplying a washing liquid through the brushing section onto the washing surface of the substrate, a pressure control mechanism for controlling a pressing force of the scrubbing member against the washing surface of the substrate, and a moving means for moving the scrubbing member relative to the substrate in a radial direction of the substrate, wherein the scrubbing member includes an abutting portion which is brought into contact with the washing surface of the substrate, and a non-contact peripheral portion positioned about the abutting portion and formed not to contact the washing surface of the substrate when the abutting portion is in contact with the washing surface of the substrate.

公开(公告)号：US6059891A

公开(公告)日：2000-05-09

申请号：US120551

申请日：1998-07-22

Applicant: Minoru Kubota ,  Kenichi Miyamoto ,  Hideya Tanaka ,  Ryoji Higuchi

Inventor： Minoru Kubota ,  Kenichi Miyamoto ,  Hideya Tanaka ,  Ryoji Higuchi

IPC: B08B3/04 ,  B08B1/00 ,  B08B1/04 ,  B08B3/02 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306 ,  B08B7/04

CPC classification number: H01L21/02052 ,  B08B1/007 ,  B08B1/04 ,  B08B3/02 ,  H01L21/67046 ,  H01L21/67051 ,  Y10S134/902

Abstract: An apparatus for washing a substrate comprises a spin chuck for holding and rotating a substrate, washing brush mechanism for supplying a washing liquid onto a surface of the substrate held on the spin chuck, and applying a physical force to contaminants present on a surface of the substrate so as to remove contaminants, a supporting arm for supporting the washing brush mechanism, an arm driving mechanism for driving the supporting arm to move the washing means along the surface from a central portion toward a peripheral portion of the substrate, and a control device for controlling the operation of at least one of the washing means, the spin chuck and the arm driving mechanism so as to control the physical force acting on the contaminants present on the surface of the substrate depending on the state of the contaminants.

Abstract translation: 用于洗涤基板的装置包括用于保持和旋转基板的旋转卡盘，用于将洗涤液供给到保持在旋转卡盘上的基板的表面上的洗涤刷机构，并且对存在于旋转卡盘的表面上的污染物施加物理力 基板，以去除污染物，用于支撑洗涤刷机构的支撑臂，用于驱动支撑臂以使洗涤装置沿基板的中心部分朝向基板的周边部分的表面移动的臂驱动机构，以及控制装置 用于控制洗涤装置，旋转卡盘和臂驱动机构中的至少一个的操作，以便根据污染物的状态来控制作用在基板表面上的污染物的物理力。

公开(公告)号：US5679226A

公开(公告)日：1997-10-21

申请号：US528500

申请日：1995-09-14

Applicant: Keizo Furusaki ,  Tatsuya Okumura ,  Hideya Tanaka ,  Yasuhiro Yamada

Inventor： Keizo Furusaki ,  Tatsuya Okumura ,  Hideya Tanaka ,  Yasuhiro Yamada

IPC: G01N27/409 ,  G01N27/407

CPC classification number: G01N27/4078 ,  G01N27/4062 ,  G01N27/407

Abstract: An oxygen sensor includes a tubular metal shell, a tubular housing having an end attached to the metal shell and another end sealed by a seal member. A solid electrolyte tube is attached to the metal shell and has on inner and outer surfaces thereof electrode layers and lead layers connected to the electrode layers, respectively. A pair of lead wires extend through the seal member between inside and outside of a housing assembly constituted by the metal shell and housing while being sealingly held by the seal member. A pair of metallic leads are disposed inside of the housing assembly for connection between the lead layers and the lead wires, the metallic leads having at one end thereof electrode connecting portions having a spring property, the electrode connecting portions being attached to the inner and outer surfaces of the solid electrolyte tube and held in contact with the lead layers under spring pressure. A stopper is interposed between the seal member and the open end of the solid electrolyte tube so as to obstruct axial movement of the electrode connecting portions of the metallic leads relative to the solid electrolyte tube when the lead wires are pulled outward of the housing assembly.

Abstract translation: 氧传感器包括管状金属外壳，管状外壳，其端部连接到金属外壳，另一端由密封构件密封。 固体电解质管附着在金属壳上，其内表面和外表面分别与电极层连接，电极层和引线层。 一对引线在由密封构件密封地保持的同时由金属壳和壳体构成的壳体组件的内部和外部之间延伸穿过密封构件。 一对金属引线设置在壳体组件的内部，用于引线层和引线之间的连接，金属引线的一端具有弹簧特性的电极连接部分，电极连接部分附接到内外 固体电解质管的表面并在弹簧压力下与引线层保持接触。 当密封构件和固体电解质管的开口端之间插入有止动件，以便当引线被拉出到壳体组件的外部时，阻止金属引线的电极连接部分相对于固体电解质管的轴向移动。

公开(公告)号：US20070273750A1

公开(公告)日：2007-11-29

申请号：US11797958

申请日：2007-05-09

Applicant: Hideya Tanaka

Inventor： Hideya Tanaka

IPC: H04N7/14

CPC classification number: H04N1/00307 ,  H04N1/00488 ,  H04N1/107 ,  H04N2201/0438 ,  H04N2201/0468

Abstract: A camera phone according to an embodiment of the present invention supports a user to obtain the optimum amount of images to generate a composite image based on captured images through mosaicing processing or super-resolution processing. For that purpose, the camera phone includes a photography condition analyzing unit for analyzing current photography conditions. The photography condition analyzing unit includes a motion detecting unit for detecting a moving speed. If the detected moving speed is not within a predetermined range, for example, a speaker gives warning beeps to inform a user of this situation.

Abstract translation: 根据本发明的实施例的相机电话支持用户通过镶嵌处理或超分辨率处理，基于捕获的图像来获得最佳图像量以生成合成图像。 为此目的，照相手机包括用于分析当前拍摄条件的拍摄条件分析单元。 摄影条件分析单元包括用于检测移动速度的运动检测单元。 如果检测到的移动速度不在预定范围内，则扬声器会发出警告声，通知用户这种情况。

公开(公告)号：US5826130A

公开(公告)日：1998-10-20

申请号：US868963

申请日：1997-06-05

Applicant: Hideya Tanaka ,  Norimitsu Morioka ,  Kosuke Yoshihara

Inventor： Hideya Tanaka ,  Norimitsu Morioka ,  Kosuke Yoshihara

IPC: B05C11/08 ,  G03F7/30 ,  G03D3/02

CPC classification number: G03F7/3021 ,  B05C11/08

Abstract: A developing apparatus for developing a photoresist-coated substrate comprises a spin chuck having a supporting surface smaller in size than the substrate and adapted to be spin-driven with the photoresist-coated substrate surface held upward, a cup surrounding the spin chuck, a developing solution nozzle for applying a developing solution on the photoresist-coated substrate held on the spin chuck, a first washing solution nozzle for applying a washing solution to the photoresist-coated surface of the substrate held on the spin chuck, a second washing solution nozzle for applying the washing solution to a rear surface of the substrate on the spin chuck, a liquid seal ring mounted substantially coaxial with the spin chuck and having a diameter greater than the supporting surface of the spin chuck and smaller than the substrate, and a liquid film forming section provided on an upper end of the liquid seal ring and located near and opposite a peripheral edge portion of a rear surface of the substrate on the spin chuck to provide a clearance relative to the peripheral edge portion of the rear surface of the substrate, in which the liquid film forming section includes a first wall portion situated substantially orthogonal to the rear surface of the substrate and in an outwardly facing relation, and a second wall portion gently inclined relative to the rear surface of the substrate and situated in an inwardly facing relation.

Abstract translation: 用于显影光致抗蚀剂涂覆的基板的显影装置包括旋转卡盘，该旋转卡盘的尺寸小于基底的支撑表面，并且适于被光刻胶涂覆的基底表面保持向上旋转驱动，围绕旋转卡盘的杯，显影 溶液喷嘴，用于将显影液施加在保持在旋转卡盘上的光致抗蚀剂涂覆的基材上;第一洗涤溶液喷嘴，用于将洗涤溶液施加到保持在旋转卡盘上的基材的光致抗蚀剂涂覆表面;第二洗涤溶液喷嘴， 将所述洗涤溶液施加到所述旋转卡盘上的所述基板的后表面;液体密封环，其与所述旋转卡盘大致同轴地安装，并且具有大于所述旋转卡盘的支撑表面的直径并小于所述基板;以及液膜 形成部分设置在液体密封环的上端并且位于与t的后表面的周边边缘附近和相对的位置 旋转卡盘上的衬底以提供相对于衬底的后表面的周边部分的间隙，其中液体膜形成部分包括第一壁部分，该第一壁部分基本上垂直于衬底的后表面并且向外 以及相对于基板的后表面轻轻地倾斜并且位于向内的关系中的第二壁部分。

公开(公告)号：US4272352A

公开(公告)日：1981-06-09

申请号：US45932

申请日：1979-06-06

Applicant: Tanzo Jizaimaru ,  Hideya Tanaka ,  Yasuo Sajima

Inventor： Tanzo Jizaimaru ,  Hideya Tanaka ,  Yasuo Sajima

IPC: C25B9/00 ,  C25B9/08 ,  C25B9/20 ,  C25B9/02 ,  C25B9/04 ,  C25B15/08

CPC classification number: C25B9/206

Abstract: An electrode compartment is a part of a filter press type electrolytic cell for electrolyzing an alkali metal chloride. The electrode compartment comprises lower, upper and side frames to form an electrolyzing chamber, and current lead bars which are inserted from the bottom of the lower frame in the vertical direction to be parallel to lifting flow of an electrolyte and the electrode being mechanically held through fitting means on the lead bars in the electrolyzing chamber.

Abstract translation: 电极室是用于电解碱金属氯化物的压滤型电解槽的一部分。 电极室包括下部，上部和侧部框架以形成电解室，并且电流引线从下部框架的底部沿垂直方向插入以平行于电解质的提升流动，并且电极机械地保持通过 在电解室中引线上的装配装置。