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公开(公告)号：US09024709B2
公开(公告)日：2015-05-05
申请号：US13122370
申请日：2009-10-03
申请人： Himanshu Joshi , Hjalti Hreinn Sigmarsson , Dimitrios Peroulis , William J. Chappell , Xiaoguang Liu
发明人： Himanshu Joshi , Hjalti Hreinn Sigmarsson , Dimitrios Peroulis , William J. Chappell , Xiaoguang Liu
CPC分类号： H01P1/219 , H01P7/06 , H01P11/007
摘要： A tunable filter having an electronically tunable center frequency and dynamic bandwidth control over a large tuning range. High-Q continuously tunable evanescent-mode cavity resonators and filters using reliable RF MEMS actuators. One embodiment is a 3.4-6.2 GHz (1.8:1 tuning ratio) continuously tunable electrostatic MEMS resonator with quality factor of 460-530, with a volume of 18×30×4 mm including the actuation scheme and biasing lines. A tunable resonators is also disclosed with a 2.8:1 (5.0-1.9 GHz) tuning ratio, and Q of 300-650.
摘要翻译： 一种可调谐滤波器，具有电子可调谐的中心频率和大调谐范围内的动态带宽控制。 使用可靠的RF MEMS执行器的高Q连续可调ev逝腔谐振器和滤波器。 一个实施例是质量因子为460-530的3.4-6.2GHz（1.8：1调谐比）连续可调静电MEMS谐振器，体积为18×30×4mm，包括致动方案和偏置线。 还公开了可调谐谐振器，具有2.8:1（5.0-1.9GHz）调谐比，Q为300-650。
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公开(公告)号：US20110241802A1
公开(公告)日：2011-10-06
申请号：US13122370
申请日：2009-10-03
申请人： Himanshu Joshi , Hjalti Hreinn Sigmarsson , Dimitrios Peroulis , William J. Chappell , Xiaoguang Liu
发明人： Himanshu Joshi , Hjalti Hreinn Sigmarsson , Dimitrios Peroulis , William J. Chappell , Xiaoguang Liu
IPC分类号： H01P1/207
CPC分类号： H01P1/219 , H01P7/06 , H01P11/007
摘要： A tunable filter having an electronically tunable center frequency and dynamic bandwidth control over a large tuning range. High-Q continuously tunable evanescent-mode cavity resonators and filters using reliable RF MEMS actuators. One embodiment is a 3.4-6.2 GHz (1.8:1 tuning ratio) continuously tunable electrostatic MEMS resonator with quality factor of 460-530, with a volume of 18×30×4 mm including the actuation scheme and biasing lines. A tunable resonators is also disclosed with a 2.8:1 (5.0-1.9 GHz) tuning ratio, and Q of 300-650.
摘要翻译： 一种可调谐滤波器，具有电子可调谐的中心频率和大调谐范围内的动态带宽控制。 使用可靠的RF MEMS执行器的高Q连续可调ev逝腔谐振器和滤波器。 一个实施例是质量因子为460-530的3.4-6.2GHz（1.8：1调谐比）连续可调静电MEMS谐振器，体积为18×30×4mm，包括致动方案和偏置线。 还公开了可调谐谐振器，具有2.8:1（5.0-1.9GHz）调谐比，Q为300-650。
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公开(公告)号：US08665040B1
公开(公告)日：2014-03-04
申请号：US13044295
申请日：2011-03-09
CPC分类号： H01P1/2053 , H01P1/2039 , H01P1/2088 , H01P1/209
摘要： A field programmable filter array with high spectral isolation and reconfigurability. A bank of resonators can be programmed at will and on the fly to give any type of filtering response. The order, type and bandwidth of the filter are electronically reconfigured. Each subset of resonators can switch between bandstop and bandpass configurations and form custom filter shapes consisting of combinations of bandstop and bandpass filters. The filter can include a unit cell of a resonator with a series of switches to enable coupling to any of its nearest neighbors. The path in which the flow of energy takes through the array of resonators is dynamic, and the filtering function which is created is dialable on demand.
摘要翻译： 具有高光谱隔离和可重构性的现场可编程滤波器阵列。 一组谐振器可以随意编程，并可以进行任何类型的滤波响应。 滤波器的顺序，类型和带宽是电子重新配置的。 谐振器的每个子集可以在带阻和带通配置之间切换，并形成由带阻和带通滤波器的组合组成的自定义滤波器形状。 滤波器可以包括具有一系列开关的谐振器的单元，以使得能够耦合到任何最近的邻居。 通过谐振器阵列的能量流动的路径是动态的，并且所产生的滤波功能可根据需要进行拨号。
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公开(公告)号：US09935349B2
公开(公告)日：2018-04-03
申请号：US14974324
申请日：2015-12-18
申请人： Thomas J. Johnson , Jack Chuang , Dimitrios Peroulis , Eric Naglich , Souleymane Gnanou , Curtis M. Grens , Mark Hickle , Michael D. Sinanis , Mark E. Stuenkel , Paul D. Zemany
发明人： Thomas J. Johnson , Jack Chuang , Dimitrios Peroulis , Eric Naglich , Souleymane Gnanou , Curtis M. Grens , Mark Hickle , Michael D. Sinanis , Mark E. Stuenkel , Paul D. Zemany
摘要： An evanescent-mode cavity filter with an improved MEMS tuner design is disclosed. The MEMS tuner design allows for the independent control of individual poles in a multi-pole filter, which increases the adaptability of the filter in a crowded RF environment. The filter is further designed to minimize tuning voltages and hysteresis effects. A closed loop control system provides highly responsive tuning of the filter. The closed loop control allows for accurate and stable tuning that compensates for temperature and vibrational effects, while the tuner design enables fast tuning and significantly increases the resolution of the feedback measurement by eliminating charge buildup in the tuner substrate.
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5.发明申请公开(公告)号：US20180128926A1
公开(公告)日：2018-05-10
申请号：US15863508
申请日：2018-01-05
申请人： Sean M. Scott , Daniel John Valentino , P. Alexander Walerow , Mark Raymond Salasky , Dimitrios Peroulis
发明人： Sean M. Scott , Daniel John Valentino , P. Alexander Walerow , Mark Raymond Salasky , Dimitrios Peroulis
IPC分类号： G01T1/02 , G01T7/00 , H01L27/144 , H01L31/18 , H01L31/119
CPC分类号： G01T1/026 , G01T7/00 , G01T7/005 , H01L27/1443 , H01L31/119 , H01L31/1804
摘要： A low-power wireless ionizing radiation measurement system is present that is intended to be used in a wearable dosimeter for occupational radiation monitoring. The detector element is a custom MOS capacitor that traps holes in proportion to the amount of ionizing radiation incident upon the detector, thus permanently causing a lateral shift in the CV-curve (toward more negative threshold voltage). The circuit measures the capacitance value of several redundant sensors at a given voltage in the depletion region, records this value over time and occasionally transmits the stored values to a base station. From the change in capacitance, the dose that has been delivered can be determined.
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公开(公告)号：US20120318650A1
公开(公告)日：2012-12-20
申请号：US13404880
申请日：2012-02-24
申请人： Dimitrios Peroulis , Adam Fruehling
发明人： Dimitrios Peroulis , Adam Fruehling
IPC分类号： H01H59/00
CPC分类号： H01H1/0036 , H01H59/0009
摘要： A radio frequency (RF) micro-electro-mechanical systems (MEMS) switch and high yield manufacturing method. The switch can be fabricated with very high yield despite the high variability of the manufacturing process parameters. The switch is fabricated with monocrystalline material, e.g., silicon, as the moving portion. The switch fabrication process is compatible with CMOS electronics fabricated on Silicon-on-Insulator (SOI) substrates. The switch comprises a movable portion having conductive portion selectively positioned with a bias voltage to conductively bridge a gap in a signal line.
摘要翻译： 射频（RF）微机电系统（MEMS）开关和高产量制造方法。 尽管制造工艺参数的高度变化，开关可以以非常高的产量制造。 开关由单晶材料（例如硅）制成，作为移动部分。 开关制造工艺与在绝缘体上硅（SOI）衬底上制造的CMOS电子器件兼容。 开关包括具有导电部分的可移动部分，该导电部分选择性地定位有偏置电压以导电地桥接信号线中的间隙。
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公开(公告)号：US20070046397A1
公开(公告)日：2007-03-01
申请号：US11496881
申请日：2006-07-31
申请人： Anil Bajaj , Ashwin Vyas , Arvind Raman , Dimitrios Peroulis
发明人： Anil Bajaj , Ashwin Vyas , Arvind Raman , Dimitrios Peroulis
IPC分类号： H03H9/00
CPC分类号： H03H9/02244 , H03H9/2405 , H03H9/505 , H03H2009/02496
摘要： A micromechanical resonator having a structure defining a first mode and a second mode and permitting non-linear internal resonance between the first and second modes. The resonator may further include a first component embodying a first mode and a second component embodying a second mode such that the first and second modes are substantially completely non-linearly coupled with each other while the second component vibrates at a frequency approximately twice the at least one first natural resonance frequency.
摘要翻译： 一种具有限定第一模式和第二模式并且允许第一和第二模式之间的非线性内部谐振的结构的微机械谐振器。 谐振器还可以包括体现第一模式的第一组件和体现第二模式的第二组件，使得第一模式和第二模式在彼此基本上完全非线性耦合，而第二组件至少以至少两倍的频率振动 首先是天然共振频率。
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公开(公告)号：US20160182013A1
公开(公告)日：2016-06-23
申请号：US14974324
申请日：2015-12-18
申请人： Thomas J. Johnson , Jack Chuang , Dimitrios Peroulis , Eric Naglich , Souleymane Gnanou , Curtis M. Grens , Mark Hickle , Michael D. Sinanis , Mark E. Stuenkel , Paul D. Zemany
发明人： Thomas J. Johnson , Jack Chuang , Dimitrios Peroulis , Eric Naglich , Souleymane Gnanou , Curtis M. Grens , Mark Hickle , Michael D. Sinanis , Mark E. Stuenkel , Paul D. Zemany
摘要： An evanescent-mode cavity filter with an improved MEMS tuner design is disclosed. The MEMS tuner design allows for the independent control of individual poles in a multi-pole filter, which increases the adaptability of the filter in a crowded RF environment. The filter is further designed to minimize tuning voltages and hysteresis effects. A closed loop control system provides highly responsive tuning of the filter. The closed loop control allows for accurate and stable tuning that compensates for temperature and vibrational effects, while the tuner design enables fast tuning and significantly increases the resolution of the feedback measurement by eliminating charge buildup in the tuner substrate.
摘要翻译： 公开了一种具有改进的MEMS调谐器设计的ev逝模式空腔滤波器。 MEMS调谐器设计允许独立控制多极滤波器中的各个极，这增加了在拥挤的RF环境中滤波器的适应性。 该滤波器进一步设计用于最小化调谐电压和滞后效应。 闭环控制系统提供过滤器的高响应性调谐。 闭环控制允许精确和稳定的调谐，补偿温度和振动效应，而调谐器设计可以快速调谐，并通过消除调谐器基板中的电荷积累，显着提高反馈测量的分辨率。
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公开(公告)号：US20100263999A1
公开(公告)日：2010-10-21
申请号：US12808002
申请日：2008-12-15
申请人： Dimitrios Peroulis , Adam Fruehling
发明人： Dimitrios Peroulis , Adam Fruehling
CPC分类号： H01H1/0036 , H01H59/0009
摘要： A radio frequency (RF) micro-electro-mechanical systems (MEMS) switch and high yield manufacturing method. The switch can be fabricated with very high yield despite the high variability of the manufacturing process parameters. The switch is fabricated with monocrystalline material, e.g., silicon, as the moving portion. The switch fabrication process is compatible with CMOS electronics fabricated on Silicon-on-Insulator (SOI) substrates. The switch comprises a movable portion having conductive portion selectively positioned with a bias voltage to conductively bridge a gap in a signal line.
摘要翻译： 射频（RF）微机电系统（MEMS）开关和高产量制造方法。 尽管制造工艺参数的高度变化，开关可以以非常高的产量制造。 开关由单晶材料（例如硅）制成，作为移动部分。 开关制造工艺与在绝缘体上硅（SOI）衬底上制造的CMOS电子器件兼容。 开关包括具有导电部分的可移动部分，该导电部分选择性地定位有偏置电压以导电地桥接信号线中的间隙。
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公开(公告)号：US07726189B2
公开(公告)日：2010-06-01
申请号：US11809070
申请日：2007-05-31
申请人： Ashwin Vyas , Anil K. Bajaj , Dimitrios Peroulis
发明人： Ashwin Vyas , Anil K. Bajaj , Dimitrios Peroulis
CPC分类号： H03H9/2405 , H03H9/02244 , H03H9/505 , H03H2009/02496
摘要： A micromechanical resonator having an actuator configured to provide an excitation, a second component configured to move within a plane at a second frequency in response to the excitation of the actuator, and a first component coupled with the second component such that the movement of the second component at the second frequency induces resonant excitation of the first component that is substantially completely out of the plane.
摘要翻译： 具有被配置为提供激励的致动器的微机械谐振器，被配置为响应于致动器的激励以第二频率在平面内移动的第二部件，以及与第二部件耦合的第一部件，使得第二部件 第二频率的分量引起基本上完全离开平面的第一分量的谐振激励。
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