公开(公告)号：US07835411B2

公开(公告)日：2010-11-16

申请号：US12402573

申请日：2009-03-12

申请人： Hiroki Masuda ,  Kaoru Miyata ,  Hisayoshi Sakai

发明人： Hiroki Masuda ,  Kaoru Miyata ,  Hisayoshi Sakai

IPC分类号： H01S3/13

CPC分类号： H01S3/1392 ,  H01S3/08004 ,  H01S3/09415 ,  H01S3/109 ,  H01S3/137 ,  H01S3/1396 ,  H01S3/1398 ,  H01S3/1611 ,  H01S3/1673

摘要： A laser frequency stabilizing device comprises a laser light producer operative to produce and emit a laser light containing a first and a second longitudinal mode light having different wavelengths; a spectrometer operative to spectrally decompose the laser light into the first longitudinal mode light and the second longitudinal mode light; a first detector operative to detect the light output signal from a absorption cell; a second and third detector operative to detect the signal intensity of the first and second longitudinal mode light; an actuator operative to change the resonant cavity length; a first drive controller operative to detect the saturated absorption signal from the light output signal detected at the first detector and control driving the actuator based on the saturated absorption signal; a second drive controller operative to control driving the actuator such that the signal intensity of the first longitudinal mode light detected at the second detector and the signal intensity of the second longitudinal mode light detected at the third detector have a ratio of a certain value; and a switcher operative to switch the control of the detector between the control by the first drive controller and the control by the second drive controller.

摘要翻译： 一种激光频率稳定装置，包括一个可以产生和发射含有不同波长的第一和第二纵模光的激光的激光发生器; 光谱仪，用于将激光光谱分解成第一纵向模式光和第二纵模光; 用于检测来自吸收单元的光输出信号的第一检测器; 第二和第三检测器，用于检测第一和第二纵模光的信号强度; 可操作地改变谐振腔长度的致动器; 第一驱动控制器，用于根据在第一检测器处检测的光输出信号检测饱和吸收信号，并且基于饱和吸收信号控制驱动致动器; 第二驱动控制器，其操作以控制驱动致动器，使得在第二检测器处检测到的第一纵向模式光的信号强度和在第三检测器处检测到的第二纵向模式光的信号强度具有特定值的比率; 以及切换器，其操作以在第一驱动控制器的控制和第二驱动控制器的控制之间切换检测器的控制。

公开(公告)号：US20100027026A1

公开(公告)日：2010-02-04

申请号：US12458828

申请日：2009-07-23

申请人： Kaoru Miyata

发明人： Kaoru Miyata

IPC分类号： G01B9/02

CPC分类号： G01B9/0207 ,  G01B2290/15 ,  G01B2290/60 ,  G01B2290/70

摘要： A laser interferometric measuring instrument includes: a light source that emits a laser beam of 1064 nm and another laser beam of 532 nm; a polarizing beam splitter; a dichroic mirror that splits a long-wavelength laser beam provided in a measurement optical path; a long-wavelength corner cube that reflects the split laser beam; a measurement corner cube that is displaceable along the measurement optical path; a reference corner cube that is displaceable along a reference optical path; a optical path changing unit that changes an optical path length of the long-wavelength laser beam; a phase detector that outputs interference signals; a sum signal computer that calculates a sum signal; a displacement controller that displaces the reference corner cube so as not to change a phase of the sum signal; a reference displacement detector that detects a displacement of the reference corner cube; and a measurement displacement computer that calculates a displacement of the measurement corner cube.

摘要翻译： 激光干涉测量仪器包括：发射1064nm激光的光源和532nm的另一激光束; 偏振分束器; 二分色镜，其分离设置在测量光路中的长波长激光束; 反射分裂激光束的长波长角立方体; 可沿测量光路移动的测量角立方体; 参考角立方体，其可以沿着参考光学路径移位; 改变长波长激光束的光路长度的光路改变单元; 输出干扰信号的相位检测器; 和信号计算机，计算和信号; 位移控制器，其移位参考角立方体，以便不改变和信号的相位; 参考位移检测器，其检测参考角立方体的位移; 以及计算测量角立方体的位移的测量位移计算机。

公开(公告)号：US08368900B2

公开(公告)日：2013-02-05

申请号：US12511406

申请日：2009-07-29

申请人： Kazuhiko Kawasaki ,  Kaoru Miyata

发明人： Kazuhiko Kawasaki ,  Kaoru Miyata

IPC分类号： G01B11/02

CPC分类号： G01B9/02008 ,  G01B9/02005 ,  G01B9/02069 ,  G01B2290/60

摘要： The oscillation wavelength of a variable wavelength laser is measured by using an optical comb, and a feedback control is performed, whereby laser beams of plural predetermined wavelengths are obtained, or a variable wavelength laser is caused to oscillate at plural arbitrary wavelengths to obtain plural distance measurement values. The wavelengths (frequencies) of laser beams when the respective distance measurement values are obtained are measured by the optical comb, and used in calculation of the geometric distance. Plural lasers are used, and the geometric distance is obtained while the wavelengths of laser beams oscillated from the lasers are measured by the optical comb.

摘要翻译： 通过使用光梳来测量可变波长激光器的振荡波长，并且进行反馈控制，由此获得多个预定波长的激光束，或者使可变波长激光器以多个任意波长振荡以获得多个距离 测量值。 获得各距离测量值时激光束的波长（频率）通过光梳测量，并用于计算几何距离。 使用多个激光器，并且通过光梳测量从激光器振荡的激光束的波长，获得几何距离。

公开(公告)号：US08081315B2

公开(公告)日：2011-12-20

申请号：US12458828

申请日：2009-07-23

申请人： Kaoru Miyata

发明人： Kaoru Miyata

IPC分类号： G01B9/02

CPC分类号： G01B9/0207 ,  G01B2290/15 ,  G01B2290/60 ,  G01B2290/70

摘要： A laser interferometric measuring instrument includes: a light source that emits a laser beam of 1064 nm and another laser beam of 532 nm; a polarizing beam splitter; a dichroic mirror that splits a long-wavelength laser beam provided in a measurement optical path; a long-wavelength corner cube that reflects the split laser beam; a measurement corner cube that is displaceable along the measurement optical path; a reference corner cube that is displaceable along a reference optical path; a optical path changing unit that changes an optical path length of the long-wavelength laser beam; a phase detector that outputs interference signals; a sum signal computer that calculates a sum signal; a displacement controller that displaces the reference corner cube so as not to change a phase of the sum signal; a reference displacement detector that detects a displacement of the reference corner cube; and a measurement displacement computer that calculates a displacement of the measurement corner cube.

摘要翻译： 激光干涉测量仪器包括：发射1064nm激光的光源和532nm的另一激光束; 偏振分束器; 二分色镜，其分离设置在测量光路中的长波长激光束; 反射分裂激光束的长波长角立方体; 可沿测量光路移动的测量角立方体; 参考角立方体，其可以沿着参考光学路径移位; 改变长波长激光束的光路长度的光路改变单元; 输出干扰信号的相位检测器; 和信号计算机，计算和信号; 位移控制器，其移位参考角立方体，以便不改变和信号的相位; 参考位移检测器，其检测参考角立方体的位移; 以及计算测量角立方体的位移的测量位移计算机。

公开(公告)号：US20090310141A1

公开(公告)日：2009-12-17

申请号：US12481733

申请日：2009-06-10

申请人： Kaoru Miyata

发明人： Kaoru Miyata

IPC分类号： G01B9/02

CPC分类号： G01B9/02062 ,  G01B9/02007 ,  G01B2290/45 ,  G01B2290/70

摘要： A two-wavelength laser interferometer includes: a two-wavelength laser light source that emits two laser beams having different wavelengths; a two-wavelength polarizing beam splitter that includes a beam splitter and a beam superposer, the beam splitter splitting each of the two laser beams having the different wavelengths into a reference beam and a measurement beam, the beam superposer superposing the reference beam and the measurement beam reflected by a reference surface and a target measurement surface together; and a calculator that obtains a displacement amount of the target measurement surface per wavelength from the beams superposed together and obtains a displacement amount of the target measurement surface applied with atmospheric refractive index correction through a calculation in which the displacement amount obtained per wavelength is used. In the two-wavelength laser interferometer, an optical-axis superposer is provided between the two-wavelength laser light source and the beam splitter. The optical-axis superposer initially separates the two laser beams having the different wavelengths emitted from the two-wavelength laser light source and subsequently superposes optical axes of the two laser beams together.

摘要翻译： 双波长激光干涉仪包括：发射具有不同波长的两个激光束的双波长激光光源; 包括分束器和光束叠加器的双波长偏振分束器，分束器将具有不同波长的两个激光束中的每一个分成参考光束和测量光束，叠加参考光束的光束叠加器和测量 由参考表面和目标测量表面一起反射的光束; 以及计算器，其从叠加在一起的光束获得目标测量表面的位移量，并且通过使用每波长获得的位移量的计算获得施加大气折射率校正的目标测量表面的位移量。 在双波长激光干涉仪中，在双波长激光光源和分束器之间设置有光轴叠加器。 光轴叠加器首先分离具有从双波长激光光源发射的不同波长的两个激光束，然后将两个激光束的光轴叠加在一起。