Non-regenerative optical ultrashortpulse amplifier
    8.
    发明授权
    Non-regenerative optical ultrashortpulse amplifier 有权
    非再生光学超短脉冲放大器

    公开(公告)号:US09590387B2

    公开(公告)日:2017-03-07

    申请号:US14330945

    申请日:2014-07-14

    申请人: neoLASE GmbH

    发明人: Maik Frede

    摘要: Non-regenerative optical amplifier has a first optical amplifying medium and at least one second optical amplifying medium. The non-regenerative optical amplifier may be an ultrashort pulse amplifier. The material properties of the first amplifying medium differ at least partially from the material properties of the second amplifying medium. The emission spectra of the amplifying media overlap partially, and the amplifying media are solid-state bulk crystals.

    摘要翻译: 非再生式光放大器具有第一光放大介质和至少一第二光放大介质。 非再生光放大器可以是超短脉冲放大器。 第一扩增介质的材料性质至少部分地与第二放大介质的材料性质不同。 放大介质的发射光谱部分重叠,扩散介质为固态块状晶体。

    EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    9.
    发明申请
    EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 有权
    极致超紫外光发生系统

    公开(公告)号:US20170027047A1

    公开(公告)日:2017-01-26

    申请号:US15284805

    申请日:2016-10-04

    申请人: Gigaphoton Inc.

    摘要: An extreme ultraviolet light (EUV) generation system is configured to improve conversion efficiency of energy of a laser system to EUV energy by improving the efficiency of plasma generation. The EUV generation system includes a target generation unit configured to output a target toward a plasma generation region in a chamber. The laser system is configured to generate a first pre-pulse laser beam, a second pre-pulse laser beam, and a main pulse laser beam so that the target is irradiated with the first pre-pulse laser beam, the second pre-pulse laser beam, and the main pulse laser beam in this order. In addition, the EUV generation system includes a controller configured to control the laser system so that a fluence of the second pre-pulse laser beam is equal to or higher than 1 J/cm2 and equal to or lower than a fluence of the main pulse laser beam.

    摘要翻译: 远端紫外线(EUV)发生系统被配置为通过提高等离子体产生的效率来提高激光系统的能量对EUV能量的转换效率。 EUV生成系统包括被配置为将目标朝向室内的等离子体产生区域输出的目标生成单元。 激光系统被配置为产生第一预脉冲激光束,第二预脉冲激光束和主脉冲激光束,使得靶被第一预脉冲激光束照射,第二预脉冲激光 光束和主脉冲激光束。 此外,EUV生成系统包括:控制器,被配置为控制激光系统,使得第二预脉冲激光束的能量密度等于或高于1J / cm 2,并且等于或低于主脉冲的能量密度 激光束。

    LASER APPARATUS
    10.
    发明申请
    LASER APPARATUS 审中-公开
    激光装置

    公开(公告)号:US20160218480A1

    公开(公告)日:2016-07-28

    申请号:US15024417

    申请日:2014-09-22

    IPC分类号: H01S3/094 H01S3/16 H01S3/0941

    摘要: A laser apparatus includes a semiconductor laser being a light source that emits light, an optical fiber that inputs the light emitted from the semiconductor laser and guides and outputs the light, and an optical resonator that has a laser medium into which the light output from the optical fiber is input and emits laser light. The optical fiber has a GI fiber constituting a part on a light input side and an SI fiber connected to the GI fiber and constituting a part on a light output side.

    摘要翻译: 激光装置包括作为发光的光源的半导体激光器,输入从半导体激光器发射的光并引导和输出光的光纤,以及具有激光介质的光学谐振器,从该激光介质输出光 输入光纤并发射激光。 光纤具有构成光输入侧的一部分的GI光纤和连接到GI光纤的SI光纤,并且构成光输出侧的一部分。