公开(公告)号：US20240145559A1

公开(公告)日：2024-05-02

申请号：US18086053

申请日：2022-12-21

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chang-Yan HSIEH ,  Po-Tsung TU ,  Jui-Chin CHEN ,  Hui-Yu CHEN ,  Po-Chun YEH

IPC: H01L29/417 ,  H01L21/02 ,  H01L21/311 ,  H01L23/29 ,  H01L23/31 ,  H01L29/20 ,  H01L29/40 ,  H01L29/423 ,  H01L29/66 ,  H01L29/778

CPC classification number: H01L29/41775 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/31116 ,  H01L23/291 ,  H01L23/3192 ,  H01L29/2003 ,  H01L29/401 ,  H01L29/42364 ,  H01L29/66462 ,  H01L29/778

Abstract: A transistor structure includes a substrate, a source electrode, a drain electrode, a protective layer and a gate electrode. The source electrode and the drain electrode are provided on the substrate. The protective layer is provided on the substrate. The protective layer is provided between the source electrode and the drain electrode. The protective layer includes a SiNx layer and a SiOx layer. The SiOx layer is provided on the substrate, the SiNx layer is provided on the SiOx layer, and a through hole of the protective layer is formed to extend through the SiNx layer and the SiOx layer. The gate electrode is provided in the through hole, and the gate electrode is separated from at least part of the SiOx layer so as to form an air gap therebetween.

公开(公告)号：US20170343506A1

公开(公告)日：2017-11-30

申请号：US15352242

申请日：2016-11-15

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Jui-Chin CHEN ,  Pei-Jer TZENG ,  Tzu-Kun KU ,  Yu-Chen HSIN ,  Yiu-Hsiang CHANG

IPC: G01N27/417 ,  G01N33/487

CPC classification number: G01N27/417 ,  G01N27/27 ,  G01N27/327 ,  G01N27/403 ,  G01N33/4836 ,  G01N33/48721

Abstract: A structure of an electrochemical unit includes a substrate, a first metal layer disposed on the substrate, and an array of electrochemical cells disposed on the first metal layer. The array of the electrochemical cells includes a plurality of electrochemical cells. Each of the electrochemical cells includes the first metal layer disposed on the substrate, a first electrode disposed on the first metal layer, a polymer layer disposed on the substrate and adjacent to the first metal layer and the first electrode. A second metal layer is disposed on the polymer layer, and a second electrode is disposed on the second metal layer. A pore is constituted between the polymer layers of every the two electrochemical cells. A cavity located above the first electrode is defined between every the two electrochemical cells, wherein the cavity is communicated with the pore.