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公开(公告)号：US11549917B2
公开(公告)日：2023-01-10
申请号：US16053177
申请日：2018-08-02
Applicant: Infineon Technologies AG
Inventor： David Tumpold , Alfons Dehe
IPC: G01N29/24 , G01N29/30 , G01N29/44 , G01N29/036
Abstract: A reference chamber for a fluid sensor comprises a housing, a deflectable structure, which is arranged movably within the housing, a control device configured to drive the deflectable structure at a first point in time such that the deflectable structure assumes a defined position, and to drive the deflectable structure at a second point in time such that the deflectable structure moves out of the defined position and a movement of the deflectable structure in the housing is obtained. The reference chamber comprises an evaluation device configured to determine a movement characteristic of the movement of the deflectable structure on the basis of the moving into the defined position or on the basis of the moving out of the defined position and to determine an atmospheric property in the housing on the basis of the movement characteristic.
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公开(公告)号：US11530980B2
公开(公告)日：2022-12-20
申请号：US17336663
申请日：2021-06-02
Applicant: Infineon Technologies AG , Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.
Inventor： Stefan Kolb , Alfons Dehe , Jochen Huber , Franz Jost , Horst Theuss , Wilhelm Wiedmeier , Juergen Woellenstein
Abstract: A gas sensor includes a multi-wafer stack of a plurality of layers and a measurement chamber. The plurality of layers includes a first layer comprising a sensor element that has a microelectromechanical system (MEMS) membrane; and a second layer comprising an emitter element configured to emit electromagnetic radiation. The measurement chamber is interposed between the first layer and the second layer. The measurement chamber is configured to receive a measurement gas and further receive the electromagnetic radiation emitted by the emitter element as the electromagnetic radiation travels along a radiation path from a first end of the measurement chamber to a second end of the measurement chamber that is opposite to the first end.
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公开(公告)号：US11530968B2
公开(公告)日：2022-12-20
申请号：US16926790
申请日：2020-07-13
Applicant: INFINEON TECHNOLOGIES AG
Inventor： Alfons Dehe , Christian Bretthauer
IPC: G01N15/06 , G01N29/032 , G01N15/02 , G01N15/00
Abstract: An apparatus for analyzing the particulate matter content of an aerosol includes an aerosol chamber configured to receive an aerosol, the particulate matter content of which should be analyzed, at least one ultrasonic generator configured to produce ultrasonic waves in the aerosol received in the aerosol chamber, an ultrasonic detector configured to detect ultrasonic waves produced by the at least one ultrasonic generator in the aerosol, and an evaluator having a data exchange communication link with the ultrasonic detector and configured to ascertain the matter content on the basis of signals output by the ultrasonic detector. The ultrasonic generator and the ultrasonic detector are positioned relative to one another such that a path length to be traversed by ultrasonic waves between the ultrasonic generator and the ultrasonic detector is less than 1 cm.
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公开(公告)号：US11387747B2
公开(公告)日：2022-07-12
申请号：US16274720
申请日：2019-02-13
Applicant: Infineon Technologies AG
Inventor： David Tumpold , Alfons Dehe , Christoph Glacer
Abstract: According to an embodiment, a microelectromechanical systems MEMS device includes a first membrane attached to a support structure that a first plurality of acoustic vents; a second membrane attached to the support structure that includes a second plurality of acoustic vents, where the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and a closing mechanism coupled to the first membrane and the second membrane.
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公开(公告)号：US11292097B2
公开(公告)日：2022-04-05
申请号：US16402248
申请日：2019-05-03
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Reinhard Gabl , Ulrich Krumbein
Abstract: A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.
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Patent Agency Ranking
6.发明授权公开(公告)号：US11161735B2
公开(公告)日：2021-11-02
申请号：US16850560
申请日：2020-04-16
Applicant: Infineon Technologies AG
Inventor： Johann Strasser , Alfons Dehe , Gerhard Metzger-Brueckl , Juergen Wagner , Arnaud Walther
Abstract: A production method for a double-membrane MEMS component includes: providing a layer arrangement on a carrier substrate, wherein the layer arrangement comprises a first membrane structure, a sacrificial material layer adjoining the first membrane structure, and a counterelectrode structure in the sacrificial material layer and at a distance from the first membrane structure, wherein at least one through opening is formed in the sacrificial material layer as far as the first membrane structure; forming a filling material structure in the at least one through opening by applying a first filling material layer on the wall region of the at least one through opening; applying a second membrane structure on the layer arrangement with the sacrificial material; and removing the sacrificial material from an intermediate region to expose the filling material structure in the intermediate region.
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公开(公告)号：US11117798B2
公开(公告)日：2021-09-14
申请号：US16270219
申请日：2019-02-07
Applicant: Infineon Technologies AG
Inventor： Gunar Lorenz , Alfons Dehe , Marc Fueldner , Bernd Goller , Ulrich Krumbein , Andreas Wiesbauer
Abstract: A MEMS sensor includes a housing with an interior volume, wherein the housing has an access port to the interior volume, a MEMS component in the housing, and a protection structure, which reduces an introduction of electromagnetic disturbance radiation with a wavelength in the range between 10 nm and 20 μm into the interior volume through the access port and reduces a propagation of the electromagnetic disturbance radiation in the interior volume.
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公开(公告)号：US11067542B2
公开(公告)日：2021-07-20
申请号：US16686670
申请日：2019-11-18
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Stefan Kolb , Horst Theuss
Abstract: Photoacoustic gas sensor having a light pulse emitter, a microphone in a reference gas housing having a reference gas, and a sample gas housing to be filled with a gas to be analyzed. A wall separates the sample gas housing from the reference gas housing, and has a transparent region that is transparent to light within a frequency range of emitted light pulses. Remaining inner walls of the sample gas housing have a reflecting surface that reflect light pulses emitted by the emitter so that a portion of the light pulses not absorbed by the gas to be analyzed pass through the transparent region into the reference gas volume. The microphone generates a sensor signal indicating information on an acoustic wave caused by the light pulses interacting with the reference gas after crossing the gas to be analyzed.
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9.发明申请公开(公告)号：US20200239302A1
公开(公告)日：2020-07-30
申请号：US16850560
申请日：2020-04-16
Applicant: Infineon Technologies AG
Inventor： Johann Strasser , Alfons Dehe , Gerhard Metzger-Brueckl , Juergen Wagner , Arnaud Walther
Abstract: A production method for a double-membrane MEMS component includes: providing a layer arrangement on a carrier substrate, wherein the layer arrangement comprises a first membrane structure, a sacrificial material layer adjoining the first membrane structure, and a counterelectrode structure in the sacrificial material layer and at a distance from the first membrane structure, wherein at least one through opening is formed in the sacrificial material layer as far as the first membrane structure; forming a filling material structure in the at least one through opening by applying a first filling material layer on the wall region of the at least one through opening; applying a second membrane structure on the layer arrangement with the sacrificial material; and removing the sacrificial material from an intermediate region to expose the filling material structure in the intermediate region.
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公开(公告)号：US10676346B2
公开(公告)日：2020-06-09
申请号：US16136986
申请日：2018-09-20
Applicant: Infineon Technologies AG
Inventor： Arnaud Walther , Alfons Dehe , Gerhard Metzger-Brueckl , Johann Strasser
Abstract: A production method for a MEMS component includes providing a layer arrangement on a carrier substrate, where the layer arrangement includes a first and second layer structure. A sacrificial material is arranged in an intermediate region between the first and second layer structures, an etch stop structure extending between the first and second layer structures subdivides the intermediate region into an exposure region and an edge region laterally adjoining the exposure region, and at least one of the first layer structure or the second layer structure has access openings to the exposure region. The method further includes removing the sacrificial material from the exposure region through the access openings using an etching process to expose the exposure region. The etch stop structure provides a lateral delimitation for the etching process, and the sacrificial material present in the edge region provides a mechanical connection between the first and second layer structures.
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