公开(公告)号：US20180155184A1

公开(公告)日：2018-06-07

申请号：US15832276

申请日：2017-12-05

Applicant: Innovative Micro Technology

Inventor： Christopher S. GUDEMAN ,  Marin SIGURDSON

IPC: B81B3/00 ,  H01L23/48 ,  H01L23/66

CPC classification number: B81B3/0024 ,  B81B3/0086 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2207/07 ,  B81B2207/094 ,  H01L23/481 ,  H01L23/66 ,  H01L2223/6616

Abstract: We describe here a method that employs through substrate vias (TSVs) to frustrate the standing waves that are formed in the metal trace. TSVs may be formed at intervals in the first substrate, electrically coupling the metal bondline to the ground plane.

公开(公告)号：US20170146793A1

公开(公告)日：2017-05-25

申请号：US15355461

申请日：2016-11-18

Applicant: Innovative Micro Technology

Inventor： Christopher S. GUDEMAN ,  Sangwoo Kim ,  Stuart Hutchinson ,  Marin SIGURDSON

IPC: G02B26/08 ,  G03F7/26 ,  G02B1/11 ,  G03F7/20 ,  B81B3/00 ,  B81C1/00

CPC classification number: G03F7/26 ,  B81B7/0067 ,  B81B2201/042 ,  B81B2201/047 ,  B81C2203/0109 ,  G02B1/11 ,  G02B27/0983 ,  G03F7/2004 ,  G03F7/2008 ,  G03F7/201

Abstract: A microfabricated optical apparatus that includes a light source or light detector in combination with an integrated turning surface to form a microfabricated optical subassembly. The integrated turning surface may be formed directly in the substrate material using gray scale lithography.

公开(公告)号：US20190066937A1

公开(公告)日：2019-02-28

申请号：US16104145

申请日：2018-08-17

Applicant: Innovative Micro Technology

Inventor： Christopher S. GUDEMAN ,  Marin SIGURDSON

IPC: H01H1/00 ,  H01H11/00

Abstract: Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the contacts. The switch may generally be closed, with the shunt bar resting on the contacts. However, a magnetically permeable material may also be inlaid into the movable plate. The switch may then be opened by placing either a permanent magnet or an electromagnet in proximity to the switch.

公开(公告)号：US20210202196A1

公开(公告)日：2021-07-01

申请号：US17200954

申请日：2021-03-15

Applicant: Innovative Micro Technology

Inventor： Christopher S. GUDEMAN ,  Marin SIGURDSON

IPC: H01H50/00 ,  H01H50/54 ,  H01H50/64 ,  H01H50/36 ,  H01H49/00

Abstract: Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the contacts. The switch may generally be closed, with the shunt bar resting on the contacts. However, a magnetically permeable material may also be inlaid into the movable plate. The switch may then be opened by placing either a permanent magnet or an electromagnet in proximity to the switch.