公开(公告)号：US20150235875A1

公开(公告)日：2015-08-20

申请号：US14701861

申请日：2015-05-01

Applicant: Intermolecular, Inc.

Inventor： Kurt Weiner ,  Aaron Francis ,  Ken Williams

IPC: H01L21/67 ,  B01J19/00 ,  H01L21/687

CPC classification number: H01L21/6715 ,  B01J19/0046 ,  B01J2219/00351 ,  B01J2219/00481 ,  B01J2219/00585 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/6719 ,  H01L21/68778

Abstract: A combinatorial processing system having modular dispense heads is provided. The modular dispense heads are disposed on a rail system enabling an adjustable pitch of the modular dispense heads for the combinatorial processing. The modular dispense heads are configured so that sections of the modular dispense heads are detachable in order to accommodate various processes through a first section without having to completely disconnect and re-connect facilities to a second section.

Abstract translation: 提供了具有模块化分配头的组合处理系统。 模块化分配头设置在轨道系统上，使得用于组合处理的模块化分配头的可调节距。 模块化分配头被配置为使得模块化分配头的部分可拆卸以便通过第一部分适应各种过程，而不必完全断开并将设备重新连接到第二部分。