公开(公告)号：US09846175B2

公开(公告)日：2017-12-19

申请号：US14606858

申请日：2015-01-27

Applicant: InvenSense, Inc.

Inventor： Steven S. Nasiri ,  Goksen G. Yaralioglu ,  Joseph Seeger ,  Babak Taheri

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  B60R21/0132

CPC classification number: G01P15/0888 ,  B60R2021/01327 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18

Abstract: A rotational sensor for measuring rotational acceleration is disclosed. The rotational sensor comprises a sense substrate; at least two proof masses, and a set of two transducers. Each of the at least two proof masses is anchored to the sense substrate via at least one flexure and electrically isolated from each other; and the at least two proof masses are capable of rotating in-plane about a Z-axis relative to the sense substrate, wherein the Z-axis is normal to the substrate. Each of the transducers can sense rotation of each proof mass with respect to the sense substrate in response to a rotation of the rotational sensor.

公开(公告)号：US09302902B2

公开(公告)日：2016-04-05

申请号：US14176964

申请日：2014-02-10

Applicant: InvenSense, Inc.

Inventor： Goksen G. Yaralioglu ,  Martin Lim

IPC: H01L23/34 ,  B81B7/00 ,  B81C1/00 ,  H01L23/00

CPC classification number: B81B7/0087 ,  B81B2207/012 ,  B81C1/0069 ,  H01L23/345 ,  H01L24/48 ,  H01L2224/48091 ,  H01L2924/00014 ,  H01L2924/01322 ,  H01L2924/1461 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A system and method for controlling temperature of a MEMS sensor are disclosed. In a first aspect, the system comprises a MEMS cap encapsulating the MEMS sensor and a CMOS die vertically arranged to the MEMS cap. The system includes a heater integrated into the MEMS cap. The integrated heater is activated to control the temperature of the MEMS sensor. In a second aspect, the method comprises encapsulating the MEMS sensor with a MEMS cap and coupling a CMOS die to the MEMS cap. The method includes integrating a heater into the MEMS cap. The integrated heater is activated to control the temperature of the MEMS sensor.

Abstract translation: 公开了一种用于控制MEMS传感器的温度的系统和方法。 在第一方面，该系统包括封装MEMS传感器的MEMS盖和垂直地布置到MEMS盖的CMOS模头。 该系统包括集成到MEMS盖中的加热器。 集成加热器被激活以控制MEMS传感器的温度。 在第二方面，该方法包括用MEMS盖封装MEMS传感器，并将CMOS管芯耦合到MEMS盖。 该方法包括将加热器集成到MEMS盖中。 集成加热器被激活以控制MEMS传感器的温度。