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公开(公告)号：US20210055264A1
公开(公告)日：2021-02-25
申请号：US16982854
申请日：2019-05-06
Inventor： Nizar JABER , Mohammad Ibrahim YOUNIS
IPC: G01N29/036 , G01N29/32
Abstract: A vapor and/or gas concentration and temperature sensor includes a resonating structure having a first side with a functionalized surface and a second side opposite the first side, a first resonant frequency of a first vibration mode, and a second resonating frequency of a second vibration mode. Drive and sensing electrodes face the second side of the resonating structure. A direct current bias source is coupled to the resonating structure. A first AC voltage source provides the resonating structure with a first voltage having a frequency corresponding to the first resonant frequency. A second AC voltage source provides the resonating structure with a second voltage having a frequency corresponding to the second resonant frequency. A read-out circuit determines a vapor and/or gas concentration based on a difference between the frequency of the first voltage and a first read-out frequency and determines a temperature based on a difference between the frequency of the second voltage and a second read-out frequency.
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公开(公告)号：US20190383715A1
公开(公告)日：2019-12-19
申请号：US16076049
申请日：2017-03-30
Inventor： Adam BOUCHAALA , Nizar JABER , Mohammad YOUNIS
IPC: G01N5/02 , G01N29/02 , G01N29/036
Abstract: Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams. In that context, embodiments of gas-triggered MEMS microbeam sensors and switches are described. The microbeam devices can be coated with a Metal-Organic Framework to achieve high sensitivity. For gas sensing, an amplitude-based tracking algorithm can be used to quantify an amount of gas captured by the devices according to frequency shift. Noise analysis is also conducted according to the embodiments, which shows that the microbeam devices have high stability against thermal noise. The microbeam devices are also suitable for the generation of binary sensing information for alarming, for example.
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3.发明公开公开(公告)号：US20230219804A1
公开(公告)日：2023-07-13
申请号：US18153795
申请日：2023-01-12
Applicant: KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS , King Abdullah University of Science and Technology
Inventor： Xuecui ZOU , Sally AHMED , Hossein FARIBORZI , Nizar JABER
CPC classification number: B81B3/0021 , B81C1/00158 , B81B2201/0278 , B81B2203/0127 , B81B2203/0307 , B81B2203/0315 , B81B2203/04 , B81B2207/017 , B81C2201/0156 , B81C2201/0188
Abstract: A MEMS temperature sensor including a clamped-clamped microbeam having a drive electrode on one side configured for applying an AC current, and a sense electrode diagonally situated on the other side, a first anchor at one end and a second anchor at the other end of the microbeam. The first anchor receive a DC bias currents, which heats the microbeam to an operating temperature. The sense electrode is configured to capacitively sense oscillations in the microbeam due to an applied AC current. The MEMS temperature sensor has a three wafer construction in which the components are formed. The device is encapsulated by aluminum, and metal wires connect the first and second anchor, the drive electrode and the sense electrode to side electrode pads outside of the encapsulation. The MEMS temperature sensor has a linear operating region of 30-60 degrees Celsius.
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公开(公告)号：US20210025851A1
公开(公告)日：2021-01-28
申请号：US17040099
申请日：2019-05-06
Inventor： Nizar JABER , Mohammad Ibrahim YOUNIS
IPC: G01N29/02 , G01N29/036
Abstract: A combined vapor and/or gas concentration sensor and switch includes a resonating structure having a first side with a functionalized surface and a second side opposite the first side, a first resonant frequency of a first vibration mode, and a third resonant frequency of a third vibration mode. A direct current bias source is coupled to the resonating structure. A first AC voltage source is coupled to the drive electrode and provides the resonating structure, via the drive electrode, with a first voltage having an amplitude causing the first vibration mode of the resonating structure to exhibit a pull-in band and having a frequency adjacent the pull-in band of the first mode. A second AC voltage source is coupled to the drive electrode and provides the resonating structure, via the drive electrode, with a second voltage having a frequency corresponding to the third resonant frequency. A read-out circuit is coupled to the sensing electrode and is configured to determine a vapor and/or gas concentration based on a difference between the frequency of the second voltage supplied by the second AC voltage source and a frequency obtained by the read-out circuit.
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