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公开(公告)号：US10741354B1
公开(公告)日：2020-08-11
申请号：US16106272
申请日：2018-08-21
Applicant: KLA-TENCOR CORPORATION
Inventor： Gildardo R. Delgado , Katerina Ioakeimidi , Rudy Garcia , Zefram Marks , Gary V. Lopez Lopez , Frances A. Hill , Michael E. Romero
IPC: H01J37/00 , H01J37/073 , H01J37/22 , G01N23/20058 , G02B5/18 , G02B3/00 , H01J37/28
Abstract: The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.
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Patent Agency Ranking
公开(公告)号：US10714294B2
公开(公告)日：2020-07-14
申请号：US16419184
申请日：2019-05-22
Applicant: KLA-TENCOR CORPORATION
Inventor： Frances Hill , Gildardo R. Delgado , Rudy F. Garcia , Gary V. Lopez Lopez , Michael E. Romero , Katerina Ioakeimidi , Zefram Marks
IPC: H01J1/16 , H01J1/304 , H01J37/073
Abstract: An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.
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公开(公告)号：US20200090895A1
公开(公告)日：2020-03-19
申请号：US16259317
申请日：2019-01-28
Applicant: KLA-TENCOR CORPORATION
Inventor： Gildardo R. Delgado , Katerina Ioakeimidi , Frances Hill , Gary V. Lopez Lopez , Rudy F. Garcia
Abstract: A photocathode structure, which can include one or more of Cs2Te, CsKTe, CsI, CsBr, GaAs, GaN, InSb, CsKSb, or a metal, has a protective film on an exterior surface. The protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof. The protective film can have a thickness from 1 nm to 10 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.
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公开(公告)号：US20190362927A1
公开(公告)日：2019-11-28
申请号：US16419184
申请日：2019-05-22
Applicant: KLA-TENCOR CORPORATION
Inventor： Frances Hill , Gildardo R. Delgado , Rudy F. Garcia , Gary V. Lopez Lopez , Michael E. Romero , Katerina Ioakeimidi , Zefram Marks
IPC: H01J1/304 , H01J37/073
Abstract: An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.
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公开(公告)号：US20200279713A1
公开(公告)日：2020-09-03
申请号：US16106272
申请日：2018-08-21
Applicant: KLA-TENCOR CORPORATION
Inventor： Gildardo R. Delgado , Katerina Ioakeimidi , Rudy Garcia , Zefram Marks , Gary V. Lopez Lopez , Frances A. Hill , Michael E. Romero
IPC: H01J37/073 , H01J37/22 , G01N23/20058
Abstract: The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.
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公开(公告)号：US10714295B2
公开(公告)日：2020-07-14
申请号：US16259317
申请日：2019-01-28
Applicant: KLA-TENCOR CORPORATION
Inventor： Gildardo R. Delgado , Katerina Ioakeimidi , Frances Hill , Gary V. Lopez Lopez , Rudy F. Garcia
Abstract: A photocathode structure, which can include one or more of Cs2Te, CsKTe, CsI, CsBr, GaAs, GaN, InSb, CsKSb, or a metal, has a protective film on an exterior surface. The protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof. The protective film can have a thickness from 1 nm to 10 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.
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