公开(公告)号：US10190994B2

公开(公告)日：2019-01-29

申请号：US15265186

申请日：2016-09-14

Applicant: KLA-Tencor Corporation

Inventor： Carl Truyens

IPC: G01N21/95 ,  H01L21/66 ,  G01N21/88

Abstract: An apparatus, a method and a computer program product for inspecting at least side faces of a semiconductor device are disclosed. A frame construction is provided, which holds a camera, defining an imaging beam path. The semiconductor device is inserted into a mirror block. The mirror block has a first mirror, a second mirror, a third mirror and a fourth mirror, wherein the mirrors are arranged such that they surround a free space in the form of a rectangle. The opposing first mirror and third mirror are fixedly mounted and the opposing second mirror and fourth mirror movably mounted. A tilted mirror directs an image of the side faces of the semiconductor substrate generated by the mirror block to the camera.

公开(公告)号：US20150147141A1

公开(公告)日：2015-05-28

申请号：US14594810

申请日：2015-01-12

Applicant: KLA-Tencor Corporation

Inventor： Carl Truyens

IPC: B25J15/06 ,  B25J13/08

CPC classification number: B25J15/0052 ,  B25J15/0616 ,  B65G47/917 ,  B65G47/918

Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.

Abstract translation: 公开了一种用于从至少一个第一位置拾取多个工件并将多个工件放置在至少一个第二位置的拾取头。 拾取和放置头部呈现多个喷嘴，其中每个喷嘴构造成通过真空作用与一个工件接合。 至少一个喷嘴具有单独的真空源，并且至少两个另外的喷嘴具有共享的真空源。 还公开了相应的方法，该方法包括以相应喷嘴接近多个工件中的至少一个，然后在每个相应喷嘴处开始产生真空的步骤。 在至少一个喷嘴中产生真空是通过单独的真空源实现的，并且通过至少两个另外的喷嘴的共享的真空供应在至少两个另外的喷嘴中产生真空。

公开(公告)号：US20190381674A1

公开(公告)日：2019-12-19

申请号：US16555578

申请日：2019-08-29

Applicant: KLA-Tencor Corporation

Inventor： Carl Truyens

IPC: B25J15/00 ,  B25J15/06 ,  B65G47/91

Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.

公开(公告)号：US20190302033A1

公开(公告)日：2019-10-03

申请号：US16443616

申请日：2019-06-17

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95 ,  G01R31/28 ,  G01R31/01 ,  G01R31/26 ,  G01N21/88 ,  G01N21/956

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.

公开(公告)号：US09586325B2

公开(公告)日：2017-03-07

申请号：US14594810

申请日：2015-01-12

Applicant: KLA-Tencor Corporation

Inventor： Carl Truyens

IPC: B25J15/06 ,  B25J15/00 ,  B65G47/91

CPC classification number: B25J15/0052 ,  B25J15/0616 ,  B65G47/917 ,  B65G47/918

Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.

Abstract translation: 公开了一种用于从至少一个第一位置拾取多个工件并将多个工件放置在至少一个第二位置的拾取头。 拾取和放置头部呈现多个喷嘴，其中每个喷嘴构造成通过真空作用与一个工件接合。 至少一个喷嘴具有单独的真空源，并且至少两个另外的喷嘴具有共享的真空源。 还公开了相应的方法，该方法包括以相应喷嘴接近多个工件中的至少一个，然后在每个相应喷嘴处开始产生真空的步骤。 在至少一个喷嘴中产生真空是通过单独的真空源实现的，并且通过至少两个另外的喷嘴的共享的真空供应在至少两个另外的喷嘴中产生真空。

公开(公告)号：US20160313257A1

公开(公告)日：2016-10-27

申请号：US15200613

申请日：2016-07-01

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/9505 ,  G01N21/95684 ,  G01R31/01 ,  G01R31/26 ,  G01R31/28

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.

Abstract translation: 公开了一种用于工件中的缺陷检测的装置，方法和计算机程序产品。 提供至少一个光源，并且光源产生工件透明的波长范围的照明光。 相机通过镜头将来自工件的至少一个面的光图像到摄像机的检测器上。 工作台用于移动工件并用摄像机对半导体器件的至少一个面进行成像。 该计算机程序产品设置在非暂时的计算机可读介质上，用于工件中的缺陷检测。 计算机用于执行各种处理步骤并控制装置的各种装置。

公开(公告)号：US10324044B2

公开(公告)日：2019-06-18

申请号：US15200613

申请日：2016-07-01

Applicant: KLA-Tencor Corporation

Inventor： Tom Marivoet ,  Carl Truyens ,  Christophe Wouters

IPC: G01N21/95 ,  G01R31/01 ,  G01R31/26 ,  G01R31/28 ,  G01N21/88 ,  G01N21/956

Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.

公开(公告)号：US09776334B2

公开(公告)日：2017-10-03

申请号：US14243632

申请日：2014-04-02

Applicant: KLA-Tencor Corporation

Inventor： Bert Vangilbergen ,  Erik De Block ,  Jimmy Vermeulen ,  KW Cheung ,  KC Leung ,  Bruno Accou ,  Carl Truyens ,  Karel Van Gils

IPC: B25J15/00

CPC classification number: B25J15/0061

Abstract: An apparatus for automatic pitch conversion for pick and place heads, comprising at least one auto pitch station for adjusting a pitch in a X-coordinate direction and/or adjusting a pitch in a Y-coordinate direction of pickers/grippers of a pick and place heads; a first actuator, operated by a motor gear assembly of the at least one auto pitch station, wherein the first actuator changes the pitch in the X-coordinate direction distance between rows of pickers/grippers of the respective pick and place head; and a second actuator operated by the same motor gear assembly, wherein the second actuator changes the pitch in the Y-coordinate direction between the pickers/grippers within a row of the respective pick and place head. A method for automatic pitch conversion of pick and place heads and a pick and place head and a pick and place device.

公开(公告)号：US20170003231A1

公开(公告)日：2017-01-05

申请号：US15265186

申请日：2016-09-14

Applicant: KLA-Tencor Corporation

Inventor： Carl Truyens

IPC: G01N21/95 ,  H01L21/66 ,  G01N21/88 ,  H01L21/67

CPC classification number: G01N21/9503 ,  G01N21/8806 ,  G01N21/95684 ,  G01N2201/0636 ,  G01R31/308 ,  H01L22/12

Abstract: An apparatus, a method and a computer program product for inspecting at least side faces of a semiconductor device are disclosed. A frame construction is provided, which holds a camera, defining an imaging beam path. The semiconductor device is inserted into a mirror block. The mirror block has a first mirror, a second mirror, a third mirror and a fourth mirror, wherein the mirrors are arranged such that they surround a free space in the form of a rectangle. The opposing first mirror and third mirror are fixedly mounted and the opposing second mirror and fourth mirror movably mounted. A tilted mirror directs an image of the side faces of the semiconductor substrate generated by the mirror block to the camera.

Abstract translation: 公开了一种用于检查半导体器件的至少侧面的装置，方法和计算机程序产品。 提供了一种框架结构，其保持相机，限定成像光束路径。 将半导体器件插入镜块中。 镜块具有第一镜，第二镜，第三镜和第四镜，其中所述镜布置成使得它们围绕矩形形式的自由空间。 相对的第一反射镜和第三反射镜被固定地安装，并且相对的第二反射镜和第四反射镜可移动地安装。 倾斜的反射镜将由镜块产生的半导体衬底的侧面的图像引导到照相机。

公开(公告)号：US10543600B2

公开(公告)日：2020-01-28

申请号：US15409156

申请日：2017-01-18

Applicant: KLA-Tencor Corporation

Inventor： Carl Truyens

IPC: B25J15/06 ,  B25J15/00 ,  B65G47/91

Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.