-
公开(公告)号：US10429296B2
公开(公告)日：2019-10-01
申请号：US16040798
申请日：2018-07-20
Applicant: KLA-Tencor Corporation
Inventor： Mark A. Neil , Mikhail Sushchik , Natalia Malkova
Abstract: A metrology system includes a controller coupled to a detector to generate a detection signal based on the reflection of an illumination beam from a multilayer film stack. The multilayer film stack may include one or more zones with a repeating pattern of two or more materials. The controller may generate a model of reflection of the illumination beam by modeling the zones as thick films having zone thicknesses and effective permittivity values using an effective medium model relating the effective permittivity values of the zones to permittivity values and volume fractions of constituent materials. The controller may further determine values of the zone thicknesses and the volume fractions using a regression of the detection signal based on the effective medium model and further determine average thickness values of the constituent materials based on the number of films, the zone thicknesses, the volume fractions, and the effective permittivity values.
-
公开(公告)号：US10151631B2
公开(公告)日：2018-12-11
申请号：US15644571
申请日：2017-07-07
Applicant: KLA-Tencor Corporation
Inventor： Mark A. Neil , Johannes D. de Veer
Abstract: A spectrometer for tailored spectral sampling includes a dispersive element for spatially dispersing a spectrum of a light beam, a detector including a plurality of pixels distributed along a sampling direction, and a spectrum reshaping element including at least one of a reflective surface or a transmissive surface for reshaping the spatially-dispersed spectrum of the light beam from the dispersive element along the sampling direction to provide a selected distribution of the spectrum to the detector. The detector may spatially sample the spectrum of incident light with the plurality of pixels at selected spectral intervals based on the selected distribution of the spectrum.
-
公开(公告)号：US20190033211A1
公开(公告)日：2019-01-31
申请号：US16040798
申请日：2018-07-20
Applicant: KLA-Tencor Corporation
Inventor： Mark A. Neil , Mikhail Sushchik , Natalia Malkova
CPC classification number: G01N21/39 , G01B11/0625 , G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/4788 , G01N21/8851 , G01N21/956 , G01N21/95623 , G01N2021/8438 , G01N2021/8883 , G01N2201/068 , G02B27/58 , G03F7/70633
Abstract: A metrology system includes a controller coupled to a detector to generate a detection signal based on the reflection of an illumination beam from a multilayer film stack. The multilayer film stack may include one or more zones with a repeating pattern of two or more materials. The controller may generate a model of reflection of the illumination beam by modeling the zones as thick films having zone thicknesses and effective permittivity values using an effective medium model relating the effective permittivity values of the zones to permittivity values and volume fractions of constituent materials. The controller may further determine values of the zone thicknesses and the volume fractions using a regression of the detection signal based on the effective medium model and further determine average thickness values of the constituent materials based on the number of films, the zone thicknesses, the volume fractions, and the effective permittivity values.
-
公开(公告)号：US20180094978A1
公开(公告)日：2018-04-05
申请号：US15644571
申请日：2017-07-07
Applicant: KLA-Tencor Corporation
Inventor： Mark A. Neil , Johannes D. de Veer
CPC classification number: G01J3/2803 , G01N21/31
Abstract: A spectrometer for tailored spectral sampling includes a dispersive element for spatially dispersing a spectrum of a light beam, a detector including a plurality of pixels distributed along a sampling direction, and a spectrum reshaping element including at least one of a reflective surface or a transmissive surface for reshaping the spatially-dispersed spectrum of the light beam from the dispersive element along the sampling direction to provide a selected distribution of the spectrum to the detector. The detector may spatially sample the spectrum of incident light with the plurality of pixels at selected spectral intervals based on the selected distribution of the spectrum.
-
-
-
Search Results
4
records
(took 0.015 seconds)
