CRYSTALLINE ALLOY HAVING GLASS FORMING ABILITY, METHOD FOR MANUFACTURING SAME, ALLOY TARGET FOR SPUTTERING, AND METHOD FOR MANUFACTURING SAME
    3.
    发明申请
    CRYSTALLINE ALLOY HAVING GLASS FORMING ABILITY, METHOD FOR MANUFACTURING SAME, ALLOY TARGET FOR SPUTTERING, AND METHOD FOR MANUFACTURING SAME 审中-公开
    具有玻璃形成能力的结晶合金,其制造方法,用于喷射的合金靶及其制造方法

    公开(公告)号:US20160076137A1

    公开(公告)日:2016-03-17

    申请号:US14787017

    申请日:2014-06-05

    Abstract: The purpose of the present invention is to provide a crystalline alloy having glass forming ability which has significantly superior thermal stability for being amorphous while having glass forming ability, and a manufacturing method for same. In addition, another purpose of the present invention is to provide an alloy target for sputtering, manufactured by using the crystalline alloy, and a method for manufacturing same. According to one aspect of the present invention, provided is the crystalline alloy having glass forming ability and comprising three or more elements having glass forming ability, wherein the average grain size of the alloy is 0.1-5 μm, and wherein the alloy comprises 67-78 atomic percentage of Zr, 4-13 atomic percentage of Al and/or Co, and 15-24 atomic percentage of Cu and/or Ni.

    Abstract translation: 本发明的目的是提供一种具有玻璃形成能力的结晶合金及其制造方法,该结晶合金具有显着优异的非晶态热稳定性,同时具有玻璃形成能力。 此外,本发明的另一目的是提供一种通过使用该结晶合金制造的用于溅射的合金靶及其制造方法。 根据本发明的一个方面,提供了具有玻璃形成能力的结晶合金,并且包括三种或更多种具有玻璃形成能力的元素,其中合金的平均晶粒尺寸为0.1-5μm,其中合金包含67- 78原子百分比的Zr,4-13原子百分比的Al和/或Co,以及15-24原子百分比的Cu和/或Ni。

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