Carbon nanofibers with sharp tip ends and a carbon nanofibers growth method using a palladium catalyst

    公开(公告)号:US09970130B2

    公开(公告)日:2018-05-15

    申请号:US14808683

    申请日:2015-07-24

    CPC classification number: D01F9/127

    Abstract: The present invention relates to a carbon nanofibers growth method including (S1) depositing an alumina layer on a silicon substrate, (S2) depositing palladium on the alumina layer to form a palladium catalyst layer, and (S3) growing carbon nanofibers on the palladium catalyst layer by a chemical vapor deposition (CVD) method, and carbon nanofibers vertically grown on an alumina layer-deposited silicon substrate, the carbon nanofibers having tip ends with a radius of curvature less than or equal to 5 nm, a diameter less than or equal to 50 nm, a length more than or equal to 1 mm, and a length-diameter aspect ratio more than or equal to 50,000.

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