Fast parallel optical coherence tomographic image generating apparatus and method

    公开(公告)号:US10765322B2

    公开(公告)日:2020-09-08

    申请号:US16164543

    申请日:2018-10-18

    Abstract: Provided is a fast parallel optical coherence tomographic image generating method including dispersing light into N spectral regions Δλ1 through ΔλN sequentially from a low frequency wavelength to a high frequency wavelength, the light being emitted from a broadband light source of a fast parallel optical coherence tomographic image generating apparatus, N being an integer greater than or equal to 2, splitting the light emitted from the broadband light source to be incident on a sample and a reference mirror, partitioning the sample into N image regions P1 through PN, discretely controlling a beam scanner such that the light emitted from the broadband light source is incident on the sample at a position changed by a preset distance, acquiring an interference spectral image through interference light formed in response to interference of measurement light and reference light, and generating a tomographic image of the sample using the interference spectral image.

    DEVICE AND METHOD FOR MEASURING TIME-RESOLVED THERMAL IMAGE

    公开(公告)号:US20250012747A1

    公开(公告)日:2025-01-09

    申请号:US18711550

    申请日:2022-11-03

    Abstract: A device and a method for measuring a time-resolved thermal image. An embodiment comprises an optical imaging unit comprising a camera and a probe light source, the optical imaging unit emitting a probe optical signal from the probe light source to a sample during a time-resolution time; a control unit for outputting a first trigger signal to the camera, outputting a driving signal to the probe light source such that the probe light source emits the probe light source to the sample during the time-resolution time, outputting a second trigger signal to a bias unit in an turn-on interval, and outputting no second trigger signal to the bias unit in a turn-off interval; and a bias unit for applying a bias signal generated on the basis of the second trigger signal in the turn-on interval to the sample, and applying no bias signal to the sample in the turn-off interval.

    Temperature distribution measuring apparatus and method

    公开(公告)号:US10139284B2

    公开(公告)日:2018-11-27

    申请号:US15508357

    申请日:2015-08-24

    Abstract: Disclosed is a temperature distribution measuring device for measuring the temperature distribution or the heat generation distribution in a sample. An embodiment collects a reflection signal the reflectivity of which changes on the basis of a bias signal applied to a sample, detects a signal of interest, which has been reflected from a region of interest in the sample, from the reflected signal, converts the signal of interest to a frequency range signal, calculates the relative amount of change in reflectivity of the sample by using a direct current component extracted on the basis of filtering of the frequency range signal and a frequency component of the bias signal, and acquires a thermal image of the sample on the basis of the relative amount of change in reflectivity.

    DEVICE AND METHOD FOR ANALYZING DEFECTS BY USING HEAT DISTRIBUTION MEASUREMENT
    6.
    发明申请
    DEVICE AND METHOD FOR ANALYZING DEFECTS BY USING HEAT DISTRIBUTION MEASUREMENT 有权
    使用热分布测量分析缺陷的装置和方法

    公开(公告)号:US20150316496A1

    公开(公告)日:2015-11-05

    申请号:US14647772

    申请日:2013-11-26

    CPC classification number: G01N25/72 H01L22/12

    Abstract: The present invention provides a method for analyzing defects by using heat distribution measurement, comprising: a sample loading unit for loading a sample to check whether or not there is a defect through heat distribution characteristics; a light source for radiating visible light onto the sample; a power supply unit for generating a driving signal in order to periodically heat the sample; a detection unit for detecting reflected light from the surface of the sample; and a signal generator for synchronizing the detection unit with the driving signal of the power supply unit.

    Abstract translation: 本发明提供一种通过使用热分布测量来分析缺陷的方法,包括:样品加载单元,用于加载样品以通过热分布特性检查是否存在缺陷; 用于将可见光辐射到样品上的光源; 用于产生驱动信号以便周期性地加热样品的电源单元; 用于检测来自所述样品表面的反射光的检测单元; 以及用于使检测单元与电源单元的驱动信号同步的信号发生器。

    IMAGING SYSTEM USING OPTICAL FIBER ARRAY INTEGRATED WITH LENSES
    8.
    发明申请
    IMAGING SYSTEM USING OPTICAL FIBER ARRAY INTEGRATED WITH LENSES 审中-公开
    使用与镜片集成的光纤阵列的成像系统

    公开(公告)号:US20130146754A1

    公开(公告)日:2013-06-13

    申请号:US13708388

    申请日:2012-12-07

    Abstract: Provided is an imaging system using an optical fiber array probe integrated with lenses for emitting light transmitted from a light source to a sample, and guiding light generated from the sample. The imaging system includes an optical fiber array probe integrated with lenses including an optical fiber lens with a lens surface of a predetermined radius of curvature in which one ends of two optical fibers are integrally connected with each other by heating a predetermined region including the one ends of the two optical fibers using a heating means. Therefore, a compact imaging system may be realized while effectively improving optical coupling efficiency through a simple manufacturing process.

    Abstract translation: 提供了一种使用与透镜集成的光纤阵列探针的成像系统,用于发射从光源向样本透射的光,并且引导从样品产生的光。 成像系统包括与透镜组合的光纤阵列探针,该透镜包括具有预定曲率半径的透镜表面的光纤透镜,其中两个光纤的一端通过加热包括一端的预定区域而彼此一体地连接 的两根光纤。 因此,可以通过简单的制造过程有效地提高光耦合效率,实现紧凑的成像系统。

    Multi-mode thermal imaging device and operation method thereof

    公开(公告)号:US11300454B2

    公开(公告)日:2022-04-12

    申请号:US15733806

    申请日:2019-05-22

    Abstract: Disclosed are a multi-mode thermal imaging device and an operation method thereof. According to an embodiment of the present invention, in a first mode, a first sample is scanned with an optical signal from a light source, signals reflected from the first sample by the scanning are detected separately for each wavelength, a reflectance change spectrum according to the wavelength is derived on the basis of the signals detected separately for each wavelength, a wavelength is selected on the basis of the derived reflectance change spectrum, and a thermal image of the first sample is obtained, through a filter, by detecting an optical signal limited to the selected wavelength from among the signals reflected from the first sample. In a second mode, thermal radiation of a second sample is detected to obtain a thermal image of the second sample.

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