公开(公告)号：US06541757B2

公开(公告)日：2003-04-01

申请号：US09789653

申请日：2001-02-21

申请人： Leonard H. Bieman ,  Edward W. Roney

发明人： Leonard H. Bieman ,  Edward W. Roney

IPC分类号： G06M700

CPC分类号： B05C5/0216 ,  B23K9/1274 ,  B25J19/023 ,  B25J19/025 ,  G06T1/0007

摘要： The subject invention is an optical detection assembly (26) for detecting dispensed material (28). The detection assembly (26) includes a housing (38) having a number of optical sensors (42) mounted to the housing (38). A material applicator (30) is mounted within a central opening (44) of the housing (38) and extends through the opening (44) such that the sensors (42) substantially surround the applicator (30) to continuously detect the material (28) being dispensed through the applicator (30). The subject invention also includes the method of detecting the material (28) being dispensed upon a workpiece (32) utilizing a robotic apparatus (20) having an articulated arm (24) with the housing (38) mounted to the arm (24).

公开(公告)号：US5959425A

公开(公告)日：1999-09-28

申请号：US172836

申请日：1998-10-15

申请人： Leonard H. Bieman ,  Gary J. Rutledge

发明人： Leonard H. Bieman ,  Gary J. Rutledge

IPC分类号： B25J9/22 ,  G05B19/41 ,  G05B19/42

CPC分类号： G05B19/4207 ,  G05B2219/36441 ,  G05B2219/40613

摘要： A method of controlling a robot system (20) includes using a camera (40) to generate a first, two-dimensional image of a marking (42) on a workpiece (32). A second, two-dimensional image of the marking (42) is generated from a second perspective. The two images are then used to generate a three-dimensional location of the marking in real space relative to the robot (22). Since the visible marking (42) corresponds to a desired path (48), the three-dimensional location information is used to automatically program the robot (22) to follow the desired path.

摘要翻译： 一种控制机器人系统（20）的方法包括使用照相机（40）在工件（32）上产生标记（42）的第一，二维图像。 从第二角度生成标记（42）的第二二维图像。 然后，两个图像用于相对于机器人（22）在实际空间中生成标记的三维位置。 由于可视标记（42）对应于期望的路径（48），因此三维位置信息用于自动地对机器人（22）进行编程以跟随期望的路径。

公开(公告)号：US5646733A

公开(公告)日：1997-07-08

申请号：US593095

申请日：1996-01-29

申请人： Leonard H. Bieman

发明人： Leonard H. Bieman

IPC分类号： G01B11/24 ,  G01B11/25

CPC分类号： G01B11/2522

摘要： A method and system are provided including an optical head which moves relative to an object at a vision station to scan a projected pattern of imagable electromagnetic radiation across the surface of an object to be inspected at a relatively constant linear rate to generate an imagable electromagnetic radiation signal. In one embodiment, the electromagnetic radiation is light to develop dimensional information associated with the object. The optical head includes at least one projector which projects a grid of lines and an imaging subsystem which includes a trilinear array camera as a detector. The camera and the at least one projector are maintained in fixed relation to each other. Three linear detector elements of the array camera extend in a direction parallel with the grid of lines. The geometry of the optical head is arranged in such a way that each linear detector element picks up a different phase in the grid pattern. As the optical head is scanned across the surface of interest, the detector elements are continuously read out. Depth an each point on the surface is calculated from the intensity reading obtained from each of the detector elements that correspond to the same point on the surface. In this way, the phases of the pattern are calculated from the three intensity readings obtained for each point. In another embodiment, the imagable electromagnetic radiation is polarized and the response of the detector elements is polarization sensitive. The generated images are based on polarization for the surface.

摘要翻译： 提供了一种方法和系统，其包括光学头，其在视觉站处相对于物体移动，以相对恒定的线性速率扫描穿过被检查物体的表面的可成像电磁辐射的投射图案，以产生可成像的电磁辐射 信号。 在一个实施例中，电磁辐射是轻的以产生与物体相关联的尺寸信息。 光学头包括至少一个投影线的投影仪和包括三线阵列相机作为检测器的成像子系统。 照相机和至少一个投影仪保持彼此固定的关系。 阵列相机的三个线性检测器元件在与线条平行的方向上延伸。 光学头的几何形状被布置成使得每个线性检测器元件拾取网格图案中的不同相位。 当光头扫描感兴趣的表面时，检测器元件被连续地读出。 从对应于表面上相同点的每个检测器元件获得的强度读数计算表面上每个点的深度。 以这种方式，从针对每个点获得的三个强度读数计算图案的相位。 在另一个实施例中，可成像的电磁辐射被极化，并且检测器元件的响应是极化敏感的。 生成的图像基于表面的极化。

公开(公告)号：US06956963B2

公开(公告)日：2005-10-18

申请号：US09757834

申请日：2001-01-08

申请人： Franz W. Ulrich ,  Leonard H. Bieman

发明人： Franz W. Ulrich ,  Leonard H. Bieman

IPC分类号： G01B11/25 ,  G01N21/956 ,  G03F7/20 ,  H01L21/00 ,  G06K9/00

CPC分类号： H01L21/00 ,  G01B11/2513 ,  G01B11/2518 ,  G01N21/95607 ,  G03F7/70483 ,  G06T7/521

摘要： Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a light source for propagating light to the device and an image detector that receives light from the device. Also included is a light sensor assembly for receiving a portion of the light from the light source. The light sensor assembly produces an output signal responsive to the intensity of the light received at the light sensor assembly. A controller controls the amount of light received by the image detector to a desired intensity range in response to the output from the light sensor. The image detector may include an array of imaging pixels. The imaging system may also include a memory device which stores correction values for at least one of the pixels in the array of imaging pixels. To minimize or control thermal drift of signals output from an array of imaging pixels, the machine-vision system may also include a cooling element attached to the imaging device. The light source for propagating light to the device may be strobed. The image detector that receives light from the device remains in a fixed position with respect to the strobed light source. A translation element moves the strobed light source and image detector with respect to the device. The strobed light may be alternated between a first and second level.

摘要翻译： 生产线包括用于监测生产零件质量的检测系统。 用于制造半导体器件的制造线通常检查每个制造的部件。 获得的信息用于解决半导体晶圆厂的制造问题。 用于检查装置的机器视觉系统包括用于将光传播到装置的光源和从装置接收光的图像检测器。 还包括用于接收来自光源的一部分光的光传感器组件。 光传感器组件响应于在光传感器组件处接收的光的强度而产生输出信号。 响应于来自光传感器的输出，控制器将图像检测器接收的光量控制在期望的强度范围。 图像检测器可以包括成像像素的阵列。 成像系统还可以包括存储器件，其存储成像像素阵列中的至少一个像素的校正值。 为了最小化或控制从成像像素阵列输出的信号的热漂移，机器视觉系统还可以包括附接到成像装置的冷却元件。 可以选通用于将光传播到设备的光源。 从设备接收光的图像检测器相对于选通的光源保持在固定位置。 平移元件相对于设备移动选通的光源和图像检测器。 频闪灯可以在第一和第二电平之间交替。

公开(公告)号：US6122062A

公开(公告)日：2000-09-19

申请号：US303887

申请日：1999-05-03

申请人： Leonard H. Bieman ,  Gary Rutledge

发明人： Leonard H. Bieman ,  Gary Rutledge

IPC分类号： G01B11/25 ,  G01B11/24

CPC分类号： G01B11/2527

摘要： A 3-D camera system (10) includes a light source (12) and a grating (14) spaced at a predetermined distance from the light source (12). The light source (12) and grating (14) project a shadow of the grating (14) on an object (16). Images of the object (16) with the grating (14) shadows projected thereon are captured by a sensor (18) in a video camera (17). A processor (19) converts the images to a three dimensional bit map of the object (16). The light source (12) includes a plurality of at least three rows of light sources (20) defining a matrix (22) whereby different rows of the matrix (22) may be illuminated to produce different grating (14) shadows on the object (16).

摘要翻译： 3-D照相机系统（10）包括光源（12）和与光源（12）隔开预定距离的光栅（14）。 光源（12）和光栅（14）将光栅（14）的阴影投射在物体（16）上。 具有投影在其上的光栅（14）阴影的物体（16）的图像由摄像机（17）中的传感器（18）捕获。 处理器（19）将图像转换成对象（16）的三维位图。 光源（12）包括限定矩阵（22）的多个至少三行光源（20），由此矩阵（22）的不同行可被照亮以在物体上产生不同的光栅（14）阴影（ 16）。

公开(公告)号：USRE39978E1

公开(公告)日：2008-01-01

申请号：US09111978

申请日：1998-07-08

申请人： Leonard H. Bieman

发明人： Leonard H. Bieman

IPC分类号： G01B11/24

CPC分类号： G01B11/2522

摘要： A method and system are provided including an optical head which moves relative to an object at a vision station to scan a projected pattern of imagable electromagnetic radiation across the surface of an object to be inspected at a relatively constant linear rate to generate an imagable electromagnetic radiation signal. In one embodiment, the electromagnetic radiation is light to develop dimensional information associated with the object. The optical head includes at least one projector which projects a grid of lines and an imaging subsystem which includes a trilinear array camera as a detector. The camera and the at least one projector are maintained in fixed relation to each other. Three linear detector elements of the array camera extend in a direction parallel with the grid of lines. The geometry of the optical head is arranged in such a way that each linear detector element picks up a different phase in the grid pattern. As the optical head is scanned across the surface of interest, the detector elements are continuously read out. Depth an each point on the surface is calculated from the intensity reading obtained from each of the detector elements that correspond to the same point on the surface. In this way, the phases of the pattern are calculated from the three intensity readings obtained for each point. In another embodiment, the imagable electromagnetic radiation is polarized and the response of the detector elements is polarization sensitive. The generated images are based on polarization for the surface.

摘要翻译： 提供了一种方法和系统，其包括光学头，其在视觉站处相对于物体移动，以相对恒定的线性速率扫描穿过被检查物体的表面的可成像电磁辐射的投射图案，以产生可成像的电磁辐射 信号。 在一个实施例中，电磁辐射是轻的以产生与物体相关联的尺寸信息。 光学头包括至少一个投影线的投影仪和包括三线阵列相机作为检测器的成像子系统。 照相机和至少一个投影仪保持彼此固定的关系。 阵列相机的三个线性检测器元件在与线条平行的方向上延伸。 光学头的几何形状被布置成使得每个线性检测器元件拾取网格图案中的不同相位。 当光头扫描感兴趣的表面时，检测器元件被连续地读出。 从对应于表面上相同点的每个检测器元件获得的强度读数计算表面上每个点的深度。 以这种方式，从针对每个点获得的三个强度读数计算图案的相位。 在另一个实施例中，可成像的电磁辐射被极化，并且检测器元件的响应是极化敏感的。 生成的图像基于表面的极化。

公开(公告)号：US5933231A

公开(公告)日：1999-08-03

申请号：US676634

申请日：1996-07-10

申请人： Leonard H. Bieman ,  Kevin G. Harding

发明人： Leonard H. Bieman ,  Kevin G. Harding

IPC分类号： G01B11/12 ,  G01N21/00

CPC分类号： G01B11/12

摘要： An optical method and system for measuring bore hole diameter, out-of-roundness and lobing and a probe for use therein are provided. A ring of structured light is initially formed or projected on the inner surface of a bore hole by optical components supported within a housing of the probe. A lens system also supported within the housing images the ring of light. Image merging lenses of the lens system reform the image at a video camera located at a window of the housing such that two or more arcs of the ring form a magnified image with the image of the arcs being shifted in space such that all the arcs can be viewed by the camera. The video camera image is captured by a frame grabber/computer. A computer calculates the location of the arcs and from this information determine bore diameter and other bore properties such as out-of-roundness and lobing. The method, system and probe have the ability to capture information around the entire bore without movement of the camera or any of the optical components supported within the housing.

摘要翻译： 提供了一种用于测量钻孔直径，不圆度和波纹的光学方法和系统以及用于其中的探针。 最初通过支撑在探针的壳体内的光学部件在钻孔的内表面上形成或投射结构化的光环。 镜头系统还支持在外壳内形成光环。 透镜系统的图像融合透镜在位于壳体的窗口处的摄像机处改变图像，使得环的两个或多个弧形成放大图像，其中弧的图像在空间中移位，使得所有的弧可以 由相机查看。 摄像机图像由帧抓取器/计算机捕获。 计算机计算弧的位置，并根据该信息确定孔直径和其他孔性质，例如不圆度和偏移。 该方法，系统和探头具有在不移动相机或支撑在壳体内的任何光学部件的情况下捕获围绕整个孔的信息的能力。

公开(公告)号：US5636025A

公开(公告)日：1997-06-03

申请号：US262130

申请日：1994-06-17

申请人： Leonard H. Bieman ,  Mark A. Michniewicz

发明人： Leonard H. Bieman ,  Mark A. Michniewicz

IPC分类号： G01B11/25 ,  G01B11/24 ,  G01B11/00

CPC分类号： G01B11/2527

摘要： An optical measuring system comprises an illumination arrangement including a light source, grating, and lens, and an image acquisition arrangement, including a lens, grating, and camera. A mechanical translation device moves the grating in a plane parallel to a reference surface to effect a phase shift of a projected image of the grating on the contoured surface to be measured. A second mechanical translation device moves the lens to effect a change in the contour interval. A first phase of the points on the contoured surface is taken, via a four-bucket algorithm, at a first contour interval. A second phase of the points is taken at a second contour interval. A controller, including a computer, determines a coarse measurement using the difference between the first and second phases. The controller further determines a fine measurement using either the first or second phase. The displacement or distance, relative to the reference plane, of each point is determined, via the controller, using the fine and coarse measurements.

摘要翻译： 光学测量系统包括包括光源，光栅和透镜的照明装置，以及包括透镜，光栅和照相机的图像采集装置。 机械平移装置在平行于参考表面的平面中移动光栅，以实现要测量的轮廓表面上的光栅的投影图像的相移。 第二机械平移装置移动透镜以实现轮廓间隔的变化。 轮廓表面上的点的第一阶段通过四桶算法以第一轮廓间隔进行。 点的第二阶段是以第二轮廓间隔进行。 包括计算机的控制器使用第一和第二相之间的差来确定粗略测量。 控制器还使用第一或第二阶段来确定精细测量。 通过控制器确定每个点相对于参考平面的位移或距离，使用精细和粗略的测量。

公开(公告)号：US4647208A

公开(公告)日：1987-03-03

申请号：US757423

申请日：1985-07-22

申请人： Leonard H. Bieman

发明人： Leonard H. Bieman

IPC分类号： G01B11/00

CPC分类号： G01B11/00

摘要： The three-dimensional position of a hole through a workpiece is determined using back lighting or front lighting (feature lighting) to determine the centroid of the hole's image in two-dimensional computer memory image space. The centroid determines a line of sight between the center of the hole's image and the actual center of the hole in real space. Next a crosshair lighting pattern (structured lighting) is projected onto the plane of the workpiece in the neighborhood of the hole. From the reflected crosshair pattern an equation representing the plane containing the hole is determined in image space. The intersection of the plane equation and the line of sight is computed and the three-dimensional, real space position of the hole is determined for comparision with an ideal position established during calibration.

摘要翻译： 使用背光或前照明（特征照明）确定穿过工件的孔的三维位置，以确定二维计算机存储器图像空间中孔的图像的质心。 重心确定了孔洞图像的中心与实际空间孔洞实际中心之间的视线。 接下来，将十字准线照明图案（结构化照明）投影到在孔附近的工件的平面上。 从反射的十字线图案中，在图像空间中确定表示包含孔的平面的方程。 计算平面方程和视线的交点，确定孔的三维实空间位置，以便与校准期间建立的理想位置进行比较。