公开(公告)号：US20180031415A1

公开(公告)日：2018-02-01

申请号：US15782097

申请日：2017-10-12

Applicant: MITUTOYO CORPORATION

Inventor： Han HAITJEMA ,  Johannes Anna QUAEDACKERS ,  Adriaan Tiemen ZUIDERWEG

IPC: G01J1/02 ,  G02B27/10 ,  G01B9/02 ,  G02B27/28

CPC classification number: G01J1/02 ,  G01B9/02012 ,  G01B9/02067 ,  G01B9/0209 ,  G02B27/10 ,  G02B27/283

Abstract: An interferometer system to generate an interference signal of a surface of a sample includes a broadband illuminator to provide a broadband illumination beam, a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample, and a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.

公开(公告)号：US20170052018A1

公开(公告)日：2017-02-23

申请号：US15198261

申请日：2016-06-30

Applicant: MITUTOYO CORPORATION

Inventor： Johannes Anna QUAEDACKERS ,  Adriaan Tiemen ZUIDERWEG

IPC: G01B11/06

CPC classification number: G01B11/0608 ,  G01B9/0209 ,  G01B11/24 ,  G01B2290/65

Abstract: A method for measuring a height map of multiple fields of view on a surface of a substrate with an optical profilometer and combining them to a composite height map, the method includes: moving the profilometer relative to the surface from field to field along a route; measuring height maps of fields on the surface along the route with the profilometer; and, combining a plurality of height maps of measured fields by normalizing said height maps to each other to produce a composite height map of the surface; wherein the route is configured to minimize sensitivity to height drifting of the profilometer during combining a plurality of the height maps.

Abstract translation: 一种用光学轮廓仪测量衬底表面上的多个视野的高度图的方法，并将它们组合成复合高度图，该方法包括：沿着路线从外场移动轮廓仪相对于表面; 用轮廓仪测量沿着路面的表面上的场的高度图; 以及通过将所述高度图彼此归一化以形成所述表面的复合高度图，来组合测量场的多个高度图; 其中所述路线被配置为在组合多个所述高度图时使所述轮廓仪的高度漂移的敏感度最小化。

公开(公告)号：US20160027194A1

公开(公告)日：2016-01-28

申请号：US14808230

申请日：2015-07-24

Applicant: MITUTOYO CORPORATION

Inventor： Adriaan Tiemen ZUIDERWEG ,  Johannes Anna QUAEDACKERS ,  Harm VISSCHER

IPC: G06T11/20 ,  G01B11/00 ,  G01B11/22

CPC classification number: G06T11/206 ,  G01B11/2441 ,  G01B11/245 ,  G01B2210/52

Abstract: Method for measuring a height map of a test, including measuring a coarse height map of the test surface with a pre-map sensor provided to an optical profiler with a relatively long working distance and/or a large field of view, storing the coarse height map in a memory, subdividing the coarse height map into sections appropriate for the field of view of a high resolution optical profiler sensor provided to the optical profiler, calculating corresponding X, Y and Z positions for the optical profiler sensor with respect to the test surface, calculating a trajectory in the X, Y, Z-direction for the optical profiler sensor with respect to the test surface using the calculated X, Y, Z-positions, moving the optical profiler in the X, Y, Z-direction with respect to the test surface according to the trajectory, and measuring a high accuracy height map with the high resolution optical profiler sensor.

Abstract translation: 用于测量测试的高度图的方法，包括使用提供给具有相对长的工作距离和/或大视野的光学轮廓仪的预先映射传感器测量测试表面的粗略高度图，存储粗糙高度 映射到存储器中，将粗略的高度图划分成适合于提供给光学轮廓仪的高分辨率光学轮廓仪传感器的视野的部分，计算光学轮廓传感器相对于测试表面的相应的X，Y和Z位置 使用计算出的X，Y，Z位置，计算光学轮廓传感器相对于测试面的X，Y，Z方向的轨迹，将光学轮廓仪沿X，Y，Z方向移动， 根据轨迹到测试表面，并用高分辨率光学轮廓仪传感器测量高精度高度图。

公开(公告)号：US20140362383A1

公开(公告)日：2014-12-11

申请号：US14291710

申请日：2014-05-30

Applicant: MITUTOYO CORPORATION

Inventor： Han HAITJEMA ,  Johannes Anna QUAEDACKERS ,  Adriaan Tiemen ZUIDERWEG

IPC: G01B9/02 ,  G01J1/02

CPC classification number: G01J1/02 ,  G01B9/02012 ,  G01B9/02067 ,  G01B9/0209 ,  G02B27/10 ,  G02B27/283

Abstract: An interferometer system to generate an interference signal of a surface of a sample includes a broadband illuminator to provide a broadband illumination beam, a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample, and a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.

Abstract translation: 用于产生样品表面的干涉信号的干涉仪系统包括宽带照明器以提供宽带照明光束，分束器将参考光束中的宽带照明光束分离以用于参考反射器上的反射和用于反射的测量光束 以及检测器，用于接收由参考反射器反射的参考光束与来自样品表面的反射测量光束之间产生的干涉辐射强度，以产生干涉信号。 干涉仪系统在分束器和/或参考反射器中具有连续的可变宽带反射器，以调整测量光束和参考光束之间的宽带辐射强度平衡。

公开(公告)号：US20210180943A1

公开(公告)日：2021-06-17

申请号：US17119246

申请日：2020-12-11

Applicant: MITUTOYO CORPORATION

Inventor： Hendrik KETELAARS ,  Adriaan Tiemen ZUIDERWEG ,  Lukasz REDLARSKI ,  John QUAEDACKERS

IPC: G01B11/22

Abstract: A method for measuring a height map of a test surface having a varying reflectivity using a multi-sensor apparatus including a pre-scan sensor and a height measuring sensor is disclosed. The multi-sensor apparatus further comprises one or more light sources configured to illuminate the test surface and a spatial light modulator. The spatial light modulator is placed in a light path between the one or more light sources and a measuring location of the multi-sensor apparatus and is configured to modulate light emitted from at least one of the light sources. The method comprises performing a measurement for determining an illumination intensity map of the test surface and a measurement for performing a height map of the test surface.

公开(公告)号：US20190277628A1

公开(公告)日：2019-09-12

申请号：US16293027

申请日：2019-03-05

Applicant: MITUTOYO CORPORATION

Inventor： Ken MOTOHASHI ,  Johannes Anna QUAEDACKERS ,  Adriaan Tiemen ZUIDERWEG

IPC: G01B11/24 ,  G01B9/02

Abstract: An interferometric optical device that measures the curved wall shape of a cylindrical object and includes: an interferometric optical system that emits measurement light at the curved wall of the object, collects the light reflected by the object, and creates a composite wave that combines the reflected light and a reference light; a rotation drive assembly that is connected to the interferometric optical system and rotationally displaces the interferometric optical system centered about a rotation axis that coincides with a center axis of the cylindrical shape of the object; a sensor that acquires a two-dimensional distribution of the intensity of the composite wave using a plurality of photoreceptor elements arrayed two-dimensionally; and a computation device that computes the internal wall shape of the object based on the plurality of two-dimensional distributions acquired in a state where a rotation angle for the rotation drive mechanism varies.