公开(公告)号：US20140362383A1

公开(公告)日：2014-12-11

申请号：US14291710

申请日：2014-05-30

Applicant: MITUTOYO CORPORATION

Inventor： Han HAITJEMA ,  Johannes Anna QUAEDACKERS ,  Adriaan Tiemen ZUIDERWEG

IPC: G01B9/02 ,  G01J1/02

CPC classification number: G01J1/02 ,  G01B9/02012 ,  G01B9/02067 ,  G01B9/0209 ,  G02B27/10 ,  G02B27/283

Abstract: An interferometer system to generate an interference signal of a surface of a sample includes a broadband illuminator to provide a broadband illumination beam, a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample, and a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.

Abstract translation: 用于产生样品表面的干涉信号的干涉仪系统包括宽带照明器以提供宽带照明光束，分束器将参考光束中的宽带照明光束分离以用于参考反射器上的反射和用于反射的测量光束 以及检测器，用于接收由参考反射器反射的参考光束与来自样品表面的反射测量光束之间产生的干涉辐射强度，以产生干涉信号。 干涉仪系统在分束器和/或参考反射器中具有连续的可变宽带反射器，以调整测量光束和参考光束之间的宽带辐射强度平衡。

公开(公告)号：US20190271535A1

公开(公告)日：2019-09-05

申请号：US16054340

申请日：2018-08-03

Applicant: MITUTOYO CORPORATION

Inventor： Han HAITJEMA ,  Hendrik KETELAARS

IPC: G01B11/12 ,  G01B11/255

Abstract: In a method and apparatus for measuring a property of a transparent tubular object, a laser beam scans the object, and laser light originating from the object is detected in a first detection direction parallel to the laser beam direction, or in the first and in a second detection direction at an angle thereto, in particular at 90°. The inner radius of the object may be calculated from the refractive index, scanning speed, outer diameter detected in the first detection direction, and, in the second detection direction, the time difference between laser light reflected from the outer surface of the object and laser light refracted into the object and reflected at the inner surface thereof. If the time of detecting laser light refracted into the object and reflected at the inner surface thereof in the first detection direction is known, the refractive index is not required.

公开(公告)号：US20180031415A1

公开(公告)日：2018-02-01

申请号：US15782097

申请日：2017-10-12

Applicant: MITUTOYO CORPORATION

Inventor： Han HAITJEMA ,  Johannes Anna QUAEDACKERS ,  Adriaan Tiemen ZUIDERWEG

IPC: G01J1/02 ,  G02B27/10 ,  G01B9/02 ,  G02B27/28

CPC classification number: G01J1/02 ,  G01B9/02012 ,  G01B9/02067 ,  G01B9/0209 ,  G02B27/10 ,  G02B27/283

Abstract: An interferometer system to generate an interference signal of a surface of a sample includes a broadband illuminator to provide a broadband illumination beam, a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample, and a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.

公开(公告)号：US20150219441A1

公开(公告)日：2015-08-06

申请号：US14612370

申请日：2015-02-03

Applicant: MITUTOYO CORPORATION

Inventor： Han HAITJEMA ,  Frans de NOOIJ ,  Lukasz REDLARSKI

IPC: G01B11/06 ,  G02B21/36

CPC classification number: G01B11/0608 ,  G01B11/2513 ,  G01B11/2527 ,  G02B21/364

Abstract: In a method and apparatus for determining the height of a plurality of spatial positions on a surface of a specimen, a light beam is projected on the surface. The light beam has a sinusoidal spatial pattern in at least two directions perpendicular to an optical axis of the light beam, and which is moved to different spatial pattern positions. The surface is scanned along the optical axis in different scanning positions. A fixed relationship between a moving distance between subsequent spatial pattern positions, and a scanning distance between subsequent scanning positions exists. The light reflected by the surface is detected in scanning positions with the spatial pattern having corresponding spatial pattern positions. From the detected light for each spatial position of the surface, an envelope curve of intensity values corresponding to scanning positions is determined. A maximum of the envelope curve and its corresponding scanning position being representative of the height of the spatial position of the surface is selected. The spatial pattern is moved in a sequence of 2n steps (n>2) in a first and a second spatial direction over a distance of ¼ and 1/n pattern wavelength, respectively.

Abstract translation: 在用于确定样本表面上的多个空间位置的高度的方法和装置中，光束被投射在表面上。 光束在与光束的光轴垂直的至少两个方向上具有正弦空间图案，并且移动到不同的空间图案位置。 沿不同扫描位置的光轴扫描表面。 存在随后的空间图案位置之间的移动距离与后续扫描位置之间的扫描距离之间的固定关系。 在具有对应的空间图案位置的空间图案的扫描位置中检测由表面反射的光。 从针对表面的每个空间位置的检测光，确定与扫描位置对应的强度值的包络线。 选择最大包络线及其对应的扫描位置代表表面空间位置的高度。 空间图案分别在1/4和1 / n图案波长的距离上沿第一和第二空间方向以2n个步长（n> 2）的顺序移动。

公开(公告)号：US20130335747A1

公开(公告)日：2013-12-19

申请号：US13918134

申请日：2013-06-14

Applicant: Mitutoyo Corporation

Inventor： Han HAITJEMA ,  Johannes Anna QUAEDACKERS

IPC: G01B9/02 ,  G01B11/06

CPC classification number: G01B9/02088 ,  G01B9/02087 ,  G01B9/0209 ,  G01B11/0675 ,  G01N21/45 ,  G01N2021/4126

Abstract: Method of determining a property of a sample from a correlogram obtainable by scanning of a surface of the sample through a focal plane of an objective using broad-band interferometry is provided. The correlogram may be displaying interference radiation intensity as a function of the scanning distance from the surface. The correlogram may be correlated with a secondary correlogram to obtain a cross correlogram or with the same correlogram to obtain an autocorrelogram. A property of the sample may be determined from the auto or cross correlogram.

Abstract translation: 提供了从通过使用宽带干涉测量的物镜的焦平面扫描样品可获得的相关图来确定样品的性质的方法。 相关图可以将干涉辐射强度显示为与表面的扫描距离的函数。 相关图可以与二次相关图相关，以获得交叉相关图或用相同的相关图获得自相关图。 样品的属性可以从自动或交叉相关图确定。