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    Film thickness measuring apparatus using interference and film thickness measuring method using interference
    1.
    发明授权
    Film thickness measuring apparatus using interference and film thickness measuring method using interference 有权
    使用干涉的膜厚测量装置和使用干涉的膜厚测量方法

    公开(公告)号：US08619263B2

    公开(公告)日：2013-12-31

    申请号：US13266832

    申请日：2010-12-22

    申请人： Hirotoshi Oikaze ,  Takashi Urashima

    发明人： Hirotoshi Oikaze ,  Takashi Urashima

    IPC分类号： G01B11/02

    CPC分类号： G01B11/0625 ,  G01B9/02025 ,  G01B9/02088 ,  G01B9/0209 ,  G01B11/0675

    摘要： With a film thickness measuring apparatus of the present invention, a substrate having a transparent film formed on its front surface is placed on a placement unit. A half mirror divides light from a light source such that divided light beams are emitted to the front surface of the substrate and to a reference plane, and overlays reflected light from the front surface of the substrate and reflected light from the reference plane on each other to form interfering light. The interfering light is imaged by an imager. Based on the imaging result, the film thickness of the transparent film is calculated by an arithmetic unit. An optical filter with which an intensity spectrum of transmitted light exhibits a plurality of peaks, the optical filter is disposed between the light source and the half mirror.

    摘要翻译： 利用本发明的膜厚测量装置，将在其表面上形成有透明膜的基板放置在放置单元上。 半反射镜将来自光源的光分开，使得分离的光束被发射到基板的前表面和参考平面，并且覆盖来自基板的前表面的反射光和彼此相对于参考平面的反射光 以形成干扰光。 干涉光被成像仪成像。 基于成像结果，通过运算单元计算透明膜的膜厚。 一种滤光器，透射光的强度谱具有多个峰，滤光器设置在光源和半反射镜之间。

    OPTICAL THREE-DIMENSIONAL STRUCTURE MEASURING DEVICE AND STRUCTURE INFORMATION PROCESSING METHOD THEREFOR
    2.
    发明申请
    OPTICAL THREE-DIMENSIONAL STRUCTURE MEASURING DEVICE AND STRUCTURE INFORMATION PROCESSING METHOD THEREFOR 有权
    光学三维结构测量装置及其结构信息处理方法

    公开(公告)号：US20120010494A1

    公开(公告)日：2012-01-12

    申请号：US13257573

    申请日：2010-03-03

    申请人： Yuichi Teramura

    发明人： Yuichi Teramura

    IPC分类号： A61B6/00 ,  G06T15/00 ,  G01B11/24

    CPC分类号： G01B9/02069 ,  A61B3/00 ,  A61B3/1005 ,  A61B3/102 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/0084 ,  A61B5/7203 ,  A61B5/7264 ,  G01B9/02004 ,  G01B9/02085 ,  G01B9/02088 ,  G01B9/02091 ,  G01B2290/65 ,  G01N21/4795

    摘要： An optical three-dimensional structure measuring device including: optical three-dimensional structure information storing device (91) for storing optical three-dimensional structure information; specific layer extracting device (121) for comparing information values of the optical three-dimensional structure information stored in the optical three-dimensional structure information storing device with a predetermined threshold and extracting, as a specific layer area of the measurement target, an area equal to or greater than a predetermined range where the information values of the optical three-dimensional structure information equal to or greater than the predetermined threshold continue; missing area extracting device (122) for extracting, as missing areas, areas where the information values of the optical three-dimensional structure information are smaller than the predetermined threshold in the specific layer area; missing area range calculating device (123) for calculating sizes of ranges of the missing areas; and region-of-interest classifying device (124) for comparing the sizes of the ranges of the missing areas with a plurality of predetermined range determination reference values and classifying the missing areas into a plurality of types of regions of interest.

    摘要翻译： 一种光学三维结构测量装置，包括：用于存储光学三维结构信息的光学三维结构信息存储装置（91）; 特征层提取装置（121），用于将存储在光学三维结构信息存储装置中的光学三维结构信息的信息值与预定阈值进行比较，并提取作为测量对象的特定层面积的区域相等 达到或大于光学三维结构信息的信息值等于或大于预定阈值的预定范围; 丢失区域提取装置（122），用于将特定层区域中的光学三维结构信息的信息值小于预定阈值的区域提取为缺失区域; 缺少区域范围计算装置（123），用于计算缺失区域的范围的大小; 和区域感兴趣分类装置（124），用于将缺失区域的范围的大小与多个预定范围确定参考值进行比较，并将缺失区域分类为多种类型的感兴趣区域。

    Interferometry for determining characteristics of an object surface, with spatially coherent illumination
    4.
    发明授权
    Interferometry for determining characteristics of an object surface, with spatially coherent illumination 有权
    用于确定物体表面特征的干涉测量，具有空间相干照明

    公开(公告)号：US07884947B2

    公开(公告)日：2011-02-08

    申请号：US11758252

    申请日：2007-06-05

    申请人： Xavier Colonna De Lega ,  Peter De Groot

    发明人： Xavier Colonna De Lega ,  Peter De Groot

    IPC分类号： G01B11/02

    CPC分类号： G01B9/02027 ,  G01B9/02043 ,  G01B9/02044 ,  G01B9/02057 ,  G01B9/02074 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/211

    摘要： Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; and multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.

    摘要翻译： 公开了一种装置，其包括：干涉仪，其被配置为在宽度范围的照射角度下将宽带空间相干测试光引导到测试对象的测试表面，并随后将其与参考光组合以形成干涉图案，所述测试和参考光为 源自一个共同的来源; 多元素检测器; 以及一个或多个光学器件，被配置为将组合的光的至少一部分引导到检测器，使得检测器的不同元件对应于由测试光照射的测试表面的区域的不同照明角度。

    Memory-Based High-Speed Interferometer
    5.
    发明申请
    Memory-Based High-Speed Interferometer 有权
    基于内存的高速干涉仪

    公开(公告)号：US20090112500A1

    公开(公告)日：2009-04-30

    申请号：US11923786

    申请日：2007-10-25

    申请人： William S. Yerazunis ,  Dirk Brinkman

    发明人： William S. Yerazunis ,  Dirk Brinkman

    IPC分类号： G01R13/00 ,  G01R15/00

    CPC分类号： G01B9/02088 ,  G01B9/02081

    摘要： An interferometer produces a first optical signal and a second optical signal interfering with each other. The optical signals are converted digital signals form addresses. A memory stores data values corresponding to the first and second optical signals, and in which the addresses are used to directly read the data values stored at the addresses. The data values stored in the memory can be dynamically adapting while converting the first and second optical signals and reading the data values.

    摘要翻译： 干涉仪产生彼此干扰的第一光信号和第二光信号。 光信号是转换成地址的数字信号。 存储器存储对应于第一和第二光信号的数据值，并且其中地址用于直接读取存储在地址处的数据值。 存储在存储器中的数据值可以在转换第一和第二光学信号并读取数据值的同时动态地适应。

    Scatterometry by phase sensitive reflectometer
    10.
    发明授权
    Scatterometry by phase sensitive reflectometer 有权
    相位敏感反射计的散射

    公开(公告)号：US07088451B2

    公开(公告)日：2006-08-08

    申请号：US11256764

    申请日：2005-10-24

    申请人： Abdurrahman Sezginer

    发明人： Abdurrahman Sezginer

    IPC分类号： G01B9/02

    CPC分类号： G01B9/0201 ,  G01B9/02044 ,  G01B9/02069 ,  G01B9/02088 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2210/56 ,  G01B2290/70 ,  G01J3/453

    摘要： A phase-sensitive interferometric broadband reflectometer includes an illumination source for generating an optical beam. A beam splitter or other optical element splits the optical beam into probe beam and reference beam portions. The probe beam is reflected by a subject under test and then rejoined with the reference beam. The combination of the two beams creates an interference pattern that may be modulated by changing the length of the path traveled by the probe or reference beams. The combined beam is received and analyzed by a spectrometer.

    摘要翻译： 相敏干涉测量宽带反射计包括用于产生光束的照明源。 分束器或其他光学元件将光束分成探测光束和参考光束部分。 探测光束被被测物体反射，然后用参考光束重新连接。 两个光束的组合产生干涉图案，其可以通过改变由探针或参考光束行进的路径的长度来调制。 组合光束由光谱仪接收和分析。