公开(公告)号：US20190064089A1

公开(公告)日：2019-02-28

申请号：US16040779

申请日：2018-07-20

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro YOKOYAMA ,  Takeshi HAGINO

IPC: G01N25/16 ,  G01B21/00

Abstract: A coefficient-of-thermal-expansion measuring device includes: a temperature detector detecting an object's temperature; an optical interferometer measuring an object's length using single-wavelength light; an actual data acquiring unit changing the object's temperature to temperatures and acquiring actual data of the length measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data for each actual data by setting an order of interference within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data, the data sets having different combinations of selection of the pieces of verification data; and a judging unit calculating a linear approximation function for each data set, and judging, using an evaluation index value based on differences of the verification data in each data set from the linear approximation function, applicability of each data set.

公开(公告)号：US20150003494A1

公开(公告)日：2015-01-01

申请号：US14295781

申请日：2014-06-04

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro YOKOYAMA ,  Takeshi HAGINO

IPC: G01N25/16 ,  G01N1/44

CPC classification number: G01N25/16 ,  G01N1/44

Abstract: A temperature-controlled bath capable of swiftly changing the temperature of a sample to a target temperature and maintaining the temperature of the sample at a fixed temperature after the temperature change is provided. A temperature-controlled bath includes a temperature changing means, a temperature-controlled chamber, a sample holding chamber, and connection cut-off means. The temperature changing means is disposed in the temperature-controlled chamber, and the temperature of the temperature-controlled chamber is adjusted by the temperature changing means. The sample holding chamber is separated from the temperature-controlled chamber by a thermally conducive wall, and contains a sample therein. The connection cut-off means change a connection between the temperature-controlled chamber and the sample holding chamber to a connected state or a cut-off state.

Abstract translation: 提供能够迅速将样品温度改变到目标温度并且在温度变化之后将样品温度保持在固定温度的温度控制浴。 温度控制浴包括温度改变装置，温度控制室，样品保持室和连接切断装置。 温度调节装置设置在温度控制室中，温度控制室的温度由温度变化装置调节。 样品保持室通过热导壁从温度控制室分离，并在其中包含样品。 连接切断装置将温度控制室和样品保持室之间的连接改变为连接状态或截止状态。

公开(公告)号：US20170089683A1

公开(公告)日：2017-03-30

申请号：US15271593

申请日：2016-09-21

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro YOKOYAMA ,  Takeshi HAGINO ,  Yutaka KURIYAMA

IPC: G01B5/008

CPC classification number: G01B5/008 ,  G01N25/16

Abstract: A measurement target and a reference gauge are placed in parallel in an inside of a temperature-controlled chamber. After an interior temperature of the temperature-controlled chamber is set at a first temperature, a relative measurement of a length from a first surface to a second surface of the measurement target is performed with reference to a length from a first reference surface to a second reference surface of the reference gauge. Then, the interior temperature of the temperature-controlled chamber is set at a second temperature and a relative measurement of the length from the first surface to the second surface is similarly performed with reference to the length from the first reference surface to the second reference surface. A CTE of the measurement target is calculated based on the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.

公开(公告)号：US20230127538A1

公开(公告)日：2023-04-27

申请号：US17967128

申请日：2022-10-17

Applicant: MITUTOYO CORPORATION

Inventor： Takeshi HAGINO

IPC: G01B21/04

Abstract: An uncertainty estimation method including: acquiring first variable values, which are a plurality of variable values included in a function indicating a relationship between a measurement dimension and a maximum permissible length measurement error when a predetermined measurement condition value of a coordinate measuring machine is a first value, and second variable values, which are the plurality of variable values occurring when the measurement condition value is a second value; calculating a maximum permissible length measurement error corresponding to a third value by calculating the variable values occurring when the measurement condition value is the third value on the basis of the plurality of first variable values and the plurality of second variable values; and estimating the measurement uncertainty of the coordinate measuring machine on the basis of the calculated maximum permissible length measurement error.

公开(公告)号：US20200072591A1

公开(公告)日：2020-03-05

申请号：US16558730

申请日：2019-09-03

Applicant: MITUTOYO CORPORATION

Inventor： Takeshi HAGINO ,  Yuto INOUE ,  Masayuki NARA

IPC: G01B5/008

Abstract: A measurement point determination method for determining the number or an arrangement of measurement points for a measurement apparatus that performs measurement processing of a measurement item at a plurality of measurement points, the method comprises the steps of acquiring a minimum value and a maximum value of the number of measurement points, acquiring a target value of uncertainty for the measurement item of the measurement apparatus, estimating uncertainties when the measurement item is measured by the measurement apparatus using two or more of the numbers of measurement points between the minimum value and the maximum value of the number of measurement points, and determining the number of measurement points of the measurement apparatus on the basis of the target value and the estimated uncertainties.

公开(公告)号：US20190064090A1

公开(公告)日：2019-02-28

申请号：US16040946

申请日：2018-07-20

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro YOKOYAMA ,  Takeshi HAGINO

IPC: G01N25/16

Abstract: A coefficient-of-thermal-expansion measuring device includes temperature control device, optical interferometer, and control device including: an actual data acquiring unit sequentially changing an object's temperature and acquiring actual data measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data by setting an order of interference of the actual data within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data at each temperature; and a judging unit deriving approximation functions with different orders from each data set, determining an evaluation index value based on differences of verification data from each approximation function, selecting a candidate data set with the smallest evaluation index value for each approximation function, and determining whether the candidate data set is the same for each approximation function to judge applicability of the candidate data set.

公开(公告)号：US20180180396A1

公开(公告)日：2018-06-28

申请号：US15827589

申请日：2017-11-30

Applicant: MITUTOYO CORPORATION

Inventor： Takeshi HAGINO ,  Yuichiro YOKOYAMA

IPC: G01B5/00 ,  G01B5/28 ,  G01B7/34

CPC classification number: G01B5/0014 ,  G01B5/0009 ,  G01B5/008 ,  G01B5/28 ,  G01B7/34 ,  G01N25/16

Abstract: A step gauge and a reference gauge block are placed in a temperature-controlled chamber in parallel with each other. A temperature of the step gauge is changed to a first temperature and a second temperature using a measurement-target temperature adjuster and the temperature-controlled chamber. A distance between a first surface and a second surface of the step gauge is relatively measured at each of the first and second temperatures with reference to a distance between a first reference surface and a second reference surface of the reference gauge block. A coefficient of thermal expansion of the measurement target is calculated from the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.