Photolithographic pattern-forming material and method for formation of fine pattern therwith
    1.
    发明授权
    Photolithographic pattern-forming material and method for formation of fine pattern therwith 失效
    光刻图案形成材料和形成精细图案的方法

    公开(公告)号:US06692894B1

    公开(公告)日:2004-02-17

    申请号:US09651730

    申请日:2000-08-30

    IPC分类号: G03F700

    CPC分类号: G03F7/11 G03F7/2008

    摘要: Disclosed is a photolithographic pattern-forming material capable of giving a fine patterned resist layer rapidly and being used repeatedly. The pattern-forming material is a multilayered body comprising a substrate and a photoresist layer thereon which is overlaid with a three-layered composite film for near-field light generation consisting of an intermediate layer of a non-linear optical material such as antimony sandwiched between two dielectric layers. When irradiated with active rays focused on the optically nonlinear layer, a fine optical window or light scattering point is formed therein where a near-field light is generated to pattern-wise expose the photoresist layer.

    摘要翻译: 公开了一种光刻图案形成材料,其能够快速赋予精细的图案化抗蚀剂层并重复使用。 图案形成材料是包括基板和其上的光致抗蚀剂层的多层体,其上覆盖有用于近场光产生的三层复合膜,由诸如锑之类的非线性光学材料的中间层夹在 两个电介质层。 当聚焦在光学非线性层上的活性射线照射时,在其中形成精细的光学窗口或光散射点,其中产生近场光以图案地曝光光致抗蚀剂层。

    Optical probe array head device
    2.
    发明授权
    Optical probe array head device 失效
    光探头阵列头装置

    公开(公告)号:US06542455B1

    公开(公告)日:2003-04-01

    申请号:US09651731

    申请日:2000-08-30

    IPC分类号: G11B700

    摘要: Provided is an optical probe array head device in which a single optical detector or a plurality of optical detectors are disposed to each of the optical probes constituting an optical probe array having a plurality of apertures. The optical detectors are arranged to surround the aperture so as to be able to efficiently detect scattering of a feeble near-field light enabling similtaneous detection of a multipilicity of optical signals. In this device, an optical lens system necessary for optical detection can be omitted by integrating the optical probe array and the optical detectors. In addition, the output signals from the optical detectors can be utilized for conducting position control of the optical probe array head.

    摘要翻译: 提供了一种光学探针阵列头装置,其中单个光学检测器或多个光学检测器设置在构成具有多个孔的光学探针阵列的每个光学探针中。 光学检测器被布置成围绕孔径,以便能够有效地检测弱视近场光的散射,从而能够进行光信号的多重性的即时检测。 在该装置中,通过集成光学探针阵列和光学检测器,可以省略光学检测所需的光学透镜系统。 此外,来自光学检测器的输出信号可以用于对光学探头阵列头进行位置控制。

    Near field light emitting element and optical head
    3.
    发明授权
    Near field light emitting element and optical head 失效
    近场发光元件和光头

    公开(公告)号:US06498776B1

    公开(公告)日:2002-12-24

    申请号:US09494180

    申请日:2000-01-31

    IPC分类号: G11B7135

    CPC分类号: G01Q60/22 G11B7/1387

    摘要: A near field light emitting element has a first film made of e.g. Al, an intermediate film made of e.g. SiN and a second film made of e.g. Al on an emergent surface of a solid immersion lens made of a high-refractive material. A first hole is made in the first film, and a second hole is made in the second film. The second hole is smaller in area than the first hole.

    摘要翻译: 近场发光元件具有由例如玻璃制成的第一膜。 Al,例如由中间膜制成的中间膜。 SiN和由例如硅胶制成的第二膜。 Al在由高折射材料制成的固体浸没透镜的紧急表面上。 在第一膜中形成第一孔,在第二膜中形成第二孔。 第二个孔的面积小于第一个孔。

    Readout method and apparatus for optical information medium
    4.
    发明授权
    Readout method and apparatus for optical information medium 有权
    光信息媒体的读出方法和装置

    公开(公告)号:US07016290B2

    公开(公告)日:2006-03-21

    申请号:US10270047

    申请日:2002-10-15

    IPC分类号: G11B7/00

    摘要: In an optical information medium comprising an information recording layer having a mark train of marks and spaces, the mark train is read out by scanning it with a laser beam and detecting a light intensity change pattern of reflected laser beam. Provided that the reflected laser beam includes polarized light components which define an angle θ with the mark train, a polarized light component giving θ=0 is x0 component, and a polarized light component giving θ=90° is y0 component, the mark train is read out utilizing at least a light intensity change of x0 component. When pits or recorded marks having a size approximate to or below the resolution limit are read out, the present invention allows high read outputs to be obtained and prevents omission of readout signals.

    摘要翻译: 在包括具有标记和空格的标记列的信息记录层的光学信息介质中,通过用激光束扫描并检测反射的激光束的光强度变化图案来读出标记列。 假设反射的激光束包括与标记列限定角度θ的偏振光分量,则给出θ= 0的偏振光分量是x 0分量,并且给出θ= 90°的偏振光分量 是零分量,则利用至少x 0分量的光强度变化来读出标记列。 当读出尺寸接近或低于分辨率极限的凹坑或记录标记时,本发明允许获得高读取输出并且防止省略读出信号。

    Method and apparatus for reproducing an optical signal
    5.
    发明授权
    Method and apparatus for reproducing an optical signal 失效
    用于再现光信号的方法和装置

    公开(公告)号:US06901036B2

    公开(公告)日:2005-05-31

    申请号:US09942036

    申请日:2001-08-30

    摘要: An apparatus for reproducing information stored in an optical recording medium which comprises marks or pits which are arranged at a pitch less than λ/2NA, wherein λ is a wavelength of light used for reproduction and NA is an numerical aperture of an objective lens. The apparatus generally comprises a laser diode, a polarization beam splitter, an objective lens, beam splitters, a low-frequency light detecting system with a photodetector, a high-frequency light detecting system with a photodetector, and a signal processing circuit for combining detection signals from the photodetectors. In the high-frequency light detecting system, before a convergent lens, a shielding band is provided so as to shield the middle of a bundle of rays of reproduction light.

    摘要翻译: 一种用于再现存储在光学记录介质中的信息的装置,包括以小于λ/ 2NA的间距排列的标记或凹坑,其中λ是用于再现的光的波长,NA是物镜的数值孔径。 该装置通常包括激光二极管,偏振分束器,物镜,分束器,具有光电检测器的低频光检测系统,具有光电检测器的高频光检测系统,以及用于组合检测的信号处理电路 来自光电探测器的信号。 在高频光检测系统中,在会聚透镜之前,设置屏蔽带以屏蔽再生光束的中间。

    Optical recording medium with transmissivity controlling layer
    6.
    发明授权
    Optical recording medium with transmissivity controlling layer 失效
    具有透射率控制层的光记录介质

    公开(公告)号:US06226258B1

    公开(公告)日:2001-05-01

    申请号:US09256103

    申请日:1999-02-24

    IPC分类号: G11B370

    摘要: Disclosed is a novel optical recording medium which is a multi-layered body comprising: (a) a substrate disk of a transparent material; (b) a first protective layer formed on one surface of the substrate disk; (c) a recording layer formed on the first protective layer, which is made from a material capable of causing a change in the optical properties in response to light or heat; (d) a second protective layer formed on the recording layer; (e) a transmissivity-controlling layer formed on the second protective layer, which is made from a material capable of reversibly and continuously causing a change in the optical properties in response to light or heat at a speed higher than the speed of changes in the recording layer; and, optionally, (f) a third protective layer formed on the transmissivity-controlling layer. Method and apparatus for recording of signals and reproduction of recorded signals by using the above defined optical recording medium are also disclosed.

    摘要翻译: 公开了一种新型的光记录介质,它是一种多层体,它包括:(a)透明材料的基片盘; (b)形成在基板盘的一个表面上的第一保护层; (c)形成在第一保护层上的记录层,其由能够引起光或热的光学特性变化的材料制成; (d)形成在记录层上的第二保护层; (e)形成在所述第二保护层上的透射率控制层,其由能够可逆地且连续地以高于所述第二保护层的变化速度的速度响应于光或热而导致的光学特性的变化的材料制成 记录层 和(f)形成在透射率控制层上的第三保护层。 还公开了通过使用上述定义的光记录介质来记录信号和再现记录信号的方法和装置。

    Variable-aperture optical near-field probe
    7.
    发明授权
    Variable-aperture optical near-field probe 失效
    可变孔径光学近场探头

    公开(公告)号:US06340813B1

    公开(公告)日:2002-01-22

    申请号:US09496050

    申请日:2000-02-02

    IPC分类号: H01J314

    CPC分类号: G01Q60/22

    摘要: Disclosed is an improved optical near-field probe for optical near-field microscopy or optical near-field recording having an effective aperture diameter variable to comply with different applications. The improvement comprises attaching, to the aperture end opening of an optical fiber-based probe, a thin film made from a substance which is opaque but capable of being rendered transparent, such as antimony or photo-chromic compounds, by irradiation with light so that the center area only of the end opening becomes transparent and transmits the laser beam to serve as an effective aperture of a diameter variable depending on the intensity of the light.

    摘要翻译: 公开了一种用于光学近场显微镜或光学近场记录的改进的光学近场探测器,其具有有效孔径可变以符合不同的应用。 改进之处在于,通过光照射将由不透明但能够变得透明的物质(例如锑或光铬化合物)制成的薄膜附着到基于光纤的探针的孔径端开口上,使得 端部开口的中心区域变得透明,并且透射激光束以作为根据光的强度的直径变化的有效孔径。

    Optical recording medium and optical recording and reproduction apparatus
    9.
    发明授权
    Optical recording medium and optical recording and reproduction apparatus 失效
    光学记录介质和光学记录和再现设备

    公开(公告)号:US06741549B2

    公开(公告)日:2004-05-25

    申请号:US09922026

    申请日:2001-07-10

    IPC分类号: G11B370

    摘要: An optical recording medium in accordance with the present invention is provided with a substrate, a mask layer, provided on the substrate, whose index of refraction changes due to light or heat of the substrate, and a recording layer that is provided away from the mask layer by a distance that is not more than a distance which allows the near-field light to reach. The mask layer generates a minute opaque region in a light spot and the recording layer is a magneto-optical layer. An optical recording and reproduction apparatus in accordance with the present invention uses the optical recording medium. This allows to provide an optical recording medium and an optical recording and reproduction apparatus that can suppress the erasure of recorded marks and carry out the reproduction again and again.

    摘要翻译: 根据本发明的光记录介质设置有设置在基板上的基板,掩模层,其折射率由于基板的光或热而变化,以及远离掩模设置的记录层 层距离不大于允许近场光到达的距离。 掩模层在光点中产生微小的不透明区域,记录层是磁光层。 根据本发明的光学记录和再现装置使用光学记录介质。 这允许提供可以抑制记录标记的擦除并且一次又一次地执行再现的光学记录介质和光学记录和再现装置。

    Optical recording medium
    10.
    发明授权
    Optical recording medium 失效
    光记录介质

    公开(公告)号:US06319582B1

    公开(公告)日:2001-11-20

    申请号:US09506322

    申请日:2000-02-18

    IPC分类号: B32B302

    摘要: Disclosed is an optical recording layer in which the microaperture for reproducing optical near-field light is controllable so as to read out the optical near-field signals with stability by keeping the signal-reproducing head at a height safe from crashing with the recording medium even when the recording marks are smaller than 100 nm. The optical recording medium is a layered body comprising: (a) a transparent substrate; (b) a first protective layer formed on the substrate; (c) an optically or thermally active layer, which is capable of reversibly generating a micro-aperture by application of light or heat, formed on the first protective layer; (d) a second protective layer, which is under a compressive stress of 200 MPa to 1 GPa, formed on the active layer; (e) an optical recording layer formed on the second protective layer; and (f) a third protective layer formed on the optical recording layer.

    摘要翻译: 公开了一种光学记录层,其中用于再现光学近场光的微孔可以被控制,以便通过将信号重放头保持在高度上而不会与记录介质碰撞,从而稳定地读出光学近场信号 当记录标记小于100nm时。 光记录介质是层叠体,其包括:(a)透明基板; (b)形成在所述基板上的第一保护层; (c)光学或热活性层,其能够通过施加光或热而可逆地产生形成在第一保护层上的微孔; (d)形成在活性层上的处于200MPa〜1GPa的压缩应力的第二保护层; (e)形成在第二保护层上的光学记录层; 和(f)形成在光学记录层上的第三保护层。