公开(公告)号：US06597433B1

公开(公告)日：2003-07-22

申请号：US09551232

申请日：2000-04-17

申请人： Michael J. M. Renkens ,  Adrianus G. Bouwer ,  Johannes C. Driessen ,  Theodorus H. J. Bisschops ,  Hermanus M. J. R. Soemers ,  Jakob Vijfvinkel

发明人： Michael J. M. Renkens ,  Adrianus G. Bouwer ,  Johannes C. Driessen ,  Theodorus H. J. Bisschops ,  Hermanus M. J. R. Soemers ,  Jakob Vijfvinkel

IPC分类号： G03B2762

CPC分类号： G03F7/70358 ,  G03F7/70716 ,  G03F7/70725

摘要： A lithographic apparatus for step-and-scan operation has a three stage structure for the wafer stage. During step-and-scan operation, the long-stroke stage is moved steadily along the row or column of dies to be exposed sequentially. An intermediate scanning stage moves in a figure-of-eight motion relative to the long-stroke stage so that the net movement of the fine stage, which is carried by the scanning stage, is a meander path.

摘要翻译： 用于步进扫描操作的光刻设备具有用于晶片台的三级结构。 在扫描扫描期间，长行程段沿模具行或列逐渐移动，以顺序曝光。 中间扫描台以相对于长行程级的八位运动移动，使得由扫描台携带的细台的净移动是曲折路径。

公开(公告)号：US06618122B2

公开(公告)日：2003-09-09

申请号：US10171638

申请日：2002-06-17

申请人： Theodorus H. J. Bisschops ,  Hermanus M. J. R. Soemers ,  Jakob Vijfvinkel ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Hermanus M. J. R. Soemers ,  Jakob Vijfvinkel ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： G03B2758

CPC分类号： G03F7/70841 ,  F16C32/0603 ,  F16C33/748 ,  F16C2300/62 ,  G03F7/70716 ,  G03F7/70758

摘要： An object table is supported in a vacuum chamber by an elongate beam or beams extending through elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.

摘要翻译： 物体台通过细长的梁或梁支撑在真空室中，细长的梁或梁延伸穿过真空室的相对的壁中的细长槽。 通过横向和纵向地移动梁来实现横梁在两个正交方向的位移。 细长的槽由由气体轴承支撑的滑动板密封。 光束由平衡质量与光束之间的线性电机纵向驱动。 该梁由平衡质量块和滑板之间的直线电动机横向驱动。 两个平衡块可以是分开的或组合的。

公开(公告)号：US06445440B1

公开(公告)日：2002-09-03

申请号：US09551229

申请日：2000-04-17

申请人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： G03B2742

CPC分类号： G03F7/70766 ,  G03F7/70716 ,  G03F7/70758 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/70991

摘要： A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

摘要翻译： 通过在真空室壁中的孔上提供滑动密封将长行程运动馈送到真空室中。 要移动的物体（其可以是光刻设备中的掩模或晶片台）在真空室内连接或安装在滑动密封件上并通过滑动密封的移动而移动。 滑动密封件可以是板，碗或镶嵌板的迷宫。

公开(公告)号：US06421112B1

公开(公告)日：2002-07-16

申请号：US09551224

申请日：2000-04-17

申请人： Theodorus H. J. Bisschops ,  Hermanus M. J. R. Soemers ,  Jakob Vijfvinkel ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Hermanus M. J. R. Soemers ,  Jakob Vijfvinkel ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： G03B2742

CPC分类号： G03F7/70841 ,  F16C32/0603 ,  F16C33/748 ,  F16C2300/62 ,  G03F7/70716 ,  G03F7/70758

摘要： An object table is supported in a vacuum chamber by an elongate beam or beams extending though elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.

公开(公告)号：US06844922B2

公开(公告)日：2005-01-18

申请号：US10613094

申请日：2003-07-07

申请人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： F16C32/06 ,  G03F7/20 ,  H01L21/027 ,  G03B27/62 ,  G03B27/58 ,  G21G5/00

CPC分类号： F16C29/025 ,  F16C32/0614 ,  F16C33/748 ,  F16C2300/62 ,  G03F7/70716 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841

摘要： A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing

摘要翻译： 用于真空室的轴承包括将加压气体排放到两个构件之间的间隙中的气体轴承，以在这些构件之间保持预定的间隔。 为了避免形成气体轴承的气体是真空室中的不可接受的泄漏，在真空室和气体轴承之间提供真空泵

公开(公告)号：US06816238B2

公开(公告)日：2004-11-09

申请号：US10196712

申请日：2002-07-17

申请人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： G03B2758

CPC分类号： G03F7/70766 ,  G03F7/70716 ,  G03F7/70758 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/70991

摘要： A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

摘要翻译： 通过在真空室壁中的孔上提供滑动密封将长行程运动馈送到真空室中。 要移动的物体（其可以是光刻设备中的掩模或晶片台）在真空室内连接或安装在滑动密封件上并通过滑动密封件的移动而移动。 滑动密封件可以是板，碗或镶嵌板的迷宫。

公开(公告)号：US06603130B1

公开(公告)日：2003-08-05

申请号：US09551223

申请日：2000-04-17

申请人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： H01J3720

CPC分类号： F16C29/025 ,  F16C32/0614 ,  F16C33/748 ,  F16C2300/62 ,  G03F7/70716 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841

摘要： A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing.

摘要翻译： 用于真空室的轴承包括将加压气体排放到两个构件之间的间隙中的气体轴承，以在这些构件之间保持预定的间隔。 为了避免形成气体轴承的气体是不可接受的泄漏到真空室中，真空泵设置在真空室和气体轴承之间。