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公开(公告)号:US12255123B2
公开(公告)日:2025-03-18
申请号:US17699049
申请日:2022-03-18
Applicant: Microfabrica Inc.
Inventor: Onnik Yaglioglu , Richard T. Chen , Will J. Tan , Jia Li , Uri Frodis , Nina C. Levy , Dennis R. Smalley
IPC: H01L23/473 , F28F3/12 , F28F13/06 , H01L21/48 , H05K7/20
Abstract: Embodiments of the present invention are directed to heat transfer arrays, cold plates including heat transfer arrays along with inlets and outlets, and thermal management systems including cold-plates, pumps and heat exchangers. These devices and systems may be used to provide cooling of semiconductor devices or other devices and particularly such devices that produce high heat concentrations. The heat transfer arrays may include microjets, multi-stage microjets, microchannels, fins, wells, wells with flow passages, well with stress relief or stress propagation inhibitors, and integrated microjets and fins.
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公开(公告)号:US20240094252A1
公开(公告)日:2024-03-21
申请号:US17493802
申请日:2021-10-04
Applicant: Microfabrica Inc.
Inventor: Jia Li , Arun S. Veeramani , Stefano Felici , Dennis R. Smalley
CPC classification number: G01R1/06761 , G01R1/06716 , G01R3/00
Abstract: Dual shield probes are provided having one or more of a plurality of different features including: discontinuous dielectric spacers, fixed nodes, sliding nodes, shield nodes, bridges, stops, interlocked dielectric and conductive elements, along with methods of using and making such probes.
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公开(公告)号:US20230207426A1
公开(公告)日:2023-06-29
申请号:US17699049
申请日:2022-03-18
Applicant: Microfabrica Inc.
Inventor: Onnik Yaglioglu , Richard T. Chen , Will J. Tan , Jia Li , Uri Frodis , Nina C. Levy , Dennis R. Smalley
IPC: H01L23/473 , F28F3/12 , F28F13/06 , H01L21/48 , H05K7/20
CPC classification number: H01L23/4735 , F28F3/12 , F28F13/06 , H01L21/4871 , H01L23/473 , H01L21/4882 , H05K7/20254 , H05K7/20272 , H05K7/20281 , F28F2260/02
Abstract: Embodiments of the present invention are directed to heat transfer arrays, cold plates including heat transfer arrays along with inlets and outlets, and thermal management systems including cold-plates, pumps and heat exchangers. These devices and systems may be used to provide cooling of semiconductor devices or other devices and particularly such devices that produce high heat concentrations. The heat transfer arrays may include microjets, multi-stage microjets, microchannels, fins, wells, wells with flow passages, well with stress relief or stress propagation inhibitors, and integrated microjets and fins.
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