公开(公告)号：US11512943B2

公开(公告)日：2022-11-29

申请号：US16462247

申请日：2016-11-23

Applicant: NOVA LTD.

Inventor： Danny Grossman ,  Shahar Gov ,  Moshe Vanhotsker ,  Guy Engel ,  Elad Dotan

IPC: G01B11/24 ,  H01L21/66 ,  G01N21/95

Abstract: An optical system and method are presented for use in measurements on an upper surface of a layered sample when located in a measurement plane. The optical system is configured as a normal-incidence system having an illumination channel and a collection channel, and comprises an objective lens unit and a light propagation affecting device. The objective lens unit is accommodated in the illumination and collection channels, thereby defining a common optical path for propagation of illuminating light from the illumination channel toward an illuminating region in the measurement plane and for propagation of light returned from measurement plane to the collection channel. The light propagation affecting device comprises an apertured structure located in at least one of the illumination and collection channels, and configured to provide angular obscuration of light propagation path for blocking angular segments associated with light propagation from regions outside the illuminated region.

公开(公告)号：US11946875B2

公开(公告)日：2024-04-02

申请号：US17935930

申请日：2022-09-27

Applicant: NOVA LTD.

Inventor： Gilad Barak ,  Dror Shafir ,  Yanir Hainick ,  Shahar Gov

IPC: G01N21/956 ,  G01N21/95 ,  G03F7/00

CPC classification number: G01N21/956 ,  G01N21/9501 ,  G03F7/70616 ,  G03F7/70625 ,  G01B2210/56

Abstract: A method for use in optical measurements on patterned structures, the method including performing a number of optical measurements on a structure with a measurement spot configured to provide detection of light reflected from an illuminating spot at least partially covering at least two different regions of the structure, the measurements including detecting light reflected from the at least part of the at least two different regions within the measurement spot, the detected light including interference of at least two complex electric fields reflected from the at least part of the at least two different regions, and being therefore indicative of a phase response of the structure, carrying information about properties of the structure.

公开(公告)号：US11460415B2

公开(公告)日：2022-10-04

申请号：US16882784

申请日：2020-05-26

Applicant: NOVA LTD.

Inventor： Gilad Barak ,  Dror Shafir ,  Yanir Hainick ,  Shahar Gov

IPC: G01N21/956 ,  G01N21/95 ,  G03F7/20

Abstract: A method for use in optical measurements on patterned structures, the method including performing a number of optical measurements on a structure with a measurement spot configured to provide detection of light reflected from an illuminating spot at least partially covering at least two different regions of the structure, the measurements including detecting light reflected from the at least part of the at least two different regions within the measurement spot, the detected light including interference of at least two complex electric fields reflected from the at least part of the at least two different regions, and being therefore indicative of a phase response of the structure, carrying information about properties of the structure.

公开(公告)号：US20240068964A1

公开(公告)日：2024-02-29

申请号：US18260036

申请日：2021-12-30

Applicant: NOVA LTD.

Inventor： Shahar Gov ,  Daniel Kandel ,  Heath POIS ,  Parker Lund ,  Michal Haim YACHINI ,  Vladimir Machavariani

IPC: G01N23/20

CPC classification number: G01N23/20

Abstract: A method, a system, and a non-transitory computer readable medium for evaluating x-ray signals. The method may include calculating an estimated field for each of multiple non-perturbed objects, the multiple non-perturbed objects represent perturbances of the perturbed object; the perturbances are of an order of a wavelength of the non-diffused x-ray signals; and evaluating the non-diffused x-ray signals based on the field of the multiple non-perturbed objects.

公开(公告)号：US20230130231A1

公开(公告)日：2023-04-27

申请号：US17935930

申请日：2022-09-27

Applicant: NOVA LTD.

Inventor： Gilad BARAK ,  Dror SHAFIR ,  Yanir HAINICK ,  Shahar Gov

IPC: G01N21/956 ,  G03F7/20 ,  G01N21/95

Abstract: A method for use in optical measurements on patterned structures, the method including performing a number of optical measurements on a structure with a measurement spot configured to provide detection of light reflected from an illuminating spot at least partially covering at least two different regions of the structure, the measurements including detecting light reflected from the at least part of the at least two different regions within the measurement spot, the detected light including interference of at least two complex electric fields reflected from the at least part of the at least two different regions, and being therefore indicative of a phase response of the structure, carrying information about properties of the structure.