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1.发明申请PROCESS FOR FORMING CONCAVO-CONVEX PATTERNS, AND PROCESS FOR MANUFACTURING MAGNETIC RECORDING MEDIA USING THE SAME 审中-公开形成凹凸图案的方法以及使用该方法制造磁记录介质的方法公开(公告)号：US20110003176A1
公开(公告)日：2011-01-06
申请号：US12865649
申请日：2009-01-28
CPC分类号： G11B5/855
摘要： An object of the present invention is to provide a process for forming concavo-convex patterns which uses a resist-forming material having excellent oxygen etching resistance and long working life and which enables to carry out the imprinting (mold pressing) with good rectangular shape properties at normal temperature.The process for forming a concavo-convex pattern of the present invention comprises a step (1) of applying a solution containing a silsesquioxane compound of Composition Formula (A) below to a surface of a workpiece to form a thin film, a step (2) of pressing a stamper having a concavo-convex pattern to the thin film; and a step (3) of separating the stamper from the thin film; R1R2Si2O3 (A) wherein R1 and R2 are each independently a specific group.
摘要翻译： 本发明的目的是提供一种形成凹凸图案的方法，其使用具有优异的耐氧蚀刻性和长使用寿命的抗蚀剂形成材料，并且能够进行具有良好矩形形状性能的压印（模压） 在常温下。 形成本发明的凹凸图案的方法包括将含有下述组合式（A）的倍半硅氧烷化合物的溶液施加到工件表面以形成薄膜的步骤（1），步骤（2） ）将具有凹凸图案的压模按压到所述薄膜上; 以及将压模与薄膜分离的工序（3） R1R2Si2O3（A）其中R1和R2各自独立地为特定基团。
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公开(公告)号：US08637225B2
公开(公告)日：2014-01-28
申请号：US12933348
申请日：2009-03-10
申请人： Yoshikazu Arai , Hiroshi Uchida , Naoyuki Imai , Masato Fukushima
发明人： Yoshikazu Arai , Hiroshi Uchida , Naoyuki Imai , Masato Fukushima
CPC分类号： G11B5/855 , C09D183/06 , G03F7/0757
摘要： A method for producing a magnetic recording medium comprising at least a recording layer and a protective film provided on top of a non-magnetic substrate, the method comprising, in the following order, forming a continuous recording layer on the substrate, forming a patterned resist layer, partially removing the recording layer based on a resist pattern, applying an organosilicon compound having an active energy beam-curable functional group onto the recording layer and regions from which the recording layer has been removed, curing the organosilicon compound with an active energy beam, etching the organosilicon compound to expose a magnetic layer, and forming a protective film.
摘要翻译： 一种制造磁记录介质的方法，所述磁记录介质至少包括设置在非磁性基板上的记录层和保护膜，所述方法包括以下顺序在所述基板上形成连续记录层，形成图案化抗蚀剂 层，基于抗蚀剂图案部分地去除记录层，将具有活性能量束固化性官能团的有机硅化合物施加到记录层上以及从其除去记录层的区域，用活性能量束固化有机硅化合物 ，蚀刻有机硅化合物以暴露磁性层，并形成保护膜。
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3.发明申请METHOD FOR PRODUCING MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING/REPRODUCING APPARATUS 有权用于制造磁记录介质，磁记录介质和磁记录/再现装置的方法公开(公告)号：US20110019307A1
公开(公告)日：2011-01-27
申请号：US12933348
申请日：2009-03-10
申请人： Yoshikazu Arai , Hiroshi Uchida , Naoyuki Imai , Masato Fukushima
发明人： Yoshikazu Arai , Hiroshi Uchida , Naoyuki Imai , Masato Fukushima
CPC分类号： G11B5/855 , C09D183/06 , G03F7/0757
摘要： A method for producing a magnetic recording medium comprising at least a recording layer and a protective film provided on top of a non-magnetic substrate, the method comprising, in the following order, forming a continuous recording layer on the substrate, forming a patterned resist layer, partially removing the recording layer based on a resist pattern, applying an organosilicon compound having an active energy beam-curable functional group onto the recording layer and regions from which the recording layer has been removed, curing the organosilicon compound with an active energy beam, etching the organosilicon compound to expose a magnetic layer, and forming a protective film.
摘要翻译： 一种制造磁记录介质的方法，所述磁记录介质至少包括设置在非磁性基板上的记录层和保护膜，所述方法包括以下顺序在所述基板上形成连续记录层，形成图案化抗蚀剂 层，基于抗蚀剂图案部分地去除记录层，将具有活性能量束固化性官能团的有机硅化合物施加到记录层上以及从其除去记录层的区域，用活性能量束固化有机硅化合物 ，蚀刻有机硅化合物以暴露磁性层，并形成保护膜。
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4.发明申请DOUBLE-SIDE COATING APPARATUS, METHOD FOR COATING DOUBLE SIDES WITH COATING SOLUTION, EDGE RINSING APPARATUS, AND EDGE RINSING METHOD 审中-公开双面涂布装置，涂层双面涂布方法，边缘冲洗装置和边缘冲洗方法公开(公告)号：US20110027478A1
公开(公告)日：2011-02-03
申请号：US12935553
申请日：2009-03-30
摘要： Provided is a double-side coating apparatus which can uniformly coat both surfaces of a substrate to be processed with a coating solution and form uniform coating films on both the surfaces of the substrate to be processed. A double-side coating apparatus (1) includes a holding mechanism (3a) which holds a substrate (2) to be processed so that the thickness direction of the substrate (2) to be processed is a horizontal direction; a rotational driving mechanism which rotates the substrate (2) to be processed in a circumferential direction; a first coating solution nozzle (18a) which jets a coating solution onto one main surface (2a) of the substrate (2) to be processed; and a second coating solution nozzle which jets the coating solution onto the other main surface (2b) of the substrate (2) to be processed. The first coating solution nozzle (18a) and the second coating solution nozzle are symmetrically arranged with respect to a thickness center surface of the substrate (2) to be processed. Provided is an edge rinsing apparatus which can accurately and stably rinse only a fixed width of an outer peripheral portion of the substrate and can easily control the width of the outer peripheral portion to be rinsed even if the width of the outer peripheral portion to be rinsed is small.
摘要翻译： 提供一种双面涂布装置，其能够均匀地涂布被处理基板的两面，并且在被处理基板的两面上形成均匀的涂膜。 双面涂布装置（1）包括：保持机构（3a），其保持要处理的基板（2），使得待处理的基板（2）的厚度方向为水平方向; 旋转驱动机构，其使圆周方向的被处理基板旋转; 第一涂布溶液喷嘴（18a），其将涂布溶液喷射到待处理的基板（2）的一个主表面（2a）上; 以及第二涂布溶液喷嘴，其将涂布溶液喷射到待处理的基板（2）的另一个主表面（2b）上。 第一涂布溶液喷嘴（18a）和第二涂布液喷嘴相对于待处理的基板（2）的厚度中心表面对称地布置。 本发明提供一种边缘冲洗装置，其能够精确稳定地仅冲洗基板的外周部的固定宽度，并且即使要冲洗的外周部的宽度也容易控制要冲洗的外周部的宽度 是小。
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5.发明授权公开(公告)号：US08007860B2
公开(公告)日：2011-08-30
申请号：US12574319
申请日：2009-10-06
IPC分类号： G11B5/82
摘要： There is provided a method for manufacturing a magnetic recording medium which can easily produce a magnetic recording medium, the magnetic recording medium having a plurality of magnetically separated recording layers suitable as the recording layers in a discrete track medium or patterned medium, and also having excellent surface flatness, in which spaces between the adjacent recording layers are filled in with a non-magnetic material.Such a method for manufacturing a magnetic recording medium is a method for manufacturing a magnetic recording medium (10) including: a step for forming a magnetic layer on top of a non-magnetic substrate (1), and then forming a resist pattern constituted of a non-magnetic material on top of the magnetic layer; a step for forming a concave section (4a), which is to become a separation layer (5), and a plurality of recording layers (4) that are magnetically separated in plan view by the concave section (4a) by removing the magnetic layer that is exposed from the resist pattern; and a step for forming the separation layer (5) by melting the resist pattern to prepare a melted resist and filling in the concave section (4a) with the melted resist, followed by curing of the melted resist.
摘要翻译： 提供了一种制造能够容易地制造磁记录介质的磁记录介质的方法，该磁记录介质具有多个在离散轨道介质或图案介质中适合作为记录层的磁分离记录层，并且还具有优异的 表面平坦度，其中相邻记录层之间的空间用非磁性材料填充。 这种制造磁记录介质的方法是一种制造磁记录介质的方法，包括：在非磁性基板（1）的顶部上形成磁性层的步骤，然后形成由 在磁性层顶部的非磁性材料; 用于形成要成为分离层（5）的凹部（4a）的步骤和通过凹部（4a）在平面图中通过除去磁性层而磁性分离的多个记录层（4） 从抗蚀剂图案露出; 以及通过熔融抗蚀剂图案形成分离层（5）以制备熔融的抗蚀剂并用熔融的抗蚀剂填充到凹部（4a）中，随后熔融的抗蚀剂固化的步骤。
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公开(公告)号：US20150037910A1
公开(公告)日：2015-02-05
申请号：US14380969
申请日：2013-02-28
申请人： Naoyuki Imai , Kyousuke Masuya , Masaru Tajima
发明人： Naoyuki Imai , Kyousuke Masuya , Masaru Tajima
IPC分类号： H01L51/56
CPC分类号： H01L51/56 , H01L51/5012 , H01L51/5209 , H01L51/5225
摘要： A method of manufacturing an organic electroluminescent element including: a first manufacturing process of stacking at least a first electrode layer, a dielectric layer, and a second electrode layer on a substrate in this order, the organic electroluminescent element having a light-emitting portion that is in contact with an inner surface of a concave portion formed to penetrate the dielectric layer; measuring a brightness distribution of the organic electroluminescent element while causing the light-emitting portion to emit light by applying a voltage to the first electrode layer and the second electrode layer of the organic electroluminescent element manufactured in the first manufacturing process, and obtaining uneven brightness information of the organic electroluminescent element; and a second manufacturing process of adjusting concave portion density on the basis of the uneven brightness information obtained in the brightness distribution measurement process, and reducing uneven brightness of the organic electroluminescent element.
摘要翻译： 一种制造有机电致发光元件的方法，包括：依次堆叠至少第一电极层，电介质层和第二电极层的第一制造工艺，所述有机电致发光元件具有发光部分， 与形成为穿透介电层的凹部的内表面接触; 在通过向第一制造工序中制造的有机电致发光元件的第一电极层和第二电极层施加电压使发光部分发光的同时测量有机电致发光元件的亮度分布，并获得不均匀的亮度信息 的有机电致发光元件; 以及基于在亮度分布测量处理中获得的不均匀亮度信息来调整凹部密度并减少有机电致发光元件的不均匀亮度的第二制造工艺。
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