Small footprint modular processing system
    1.
    发明申请
    Small footprint modular processing system 审中-公开
    小尺寸模块化处理系统

    公开(公告)号:US20080019806A1

    公开(公告)日:2008-01-24

    申请号:US11491577

    申请日:2006-07-24

    IPC分类号: H01L21/677

    CPC分类号: H01L21/67196

    摘要: A method and apparatus for a modular processing system is described. The apparatus includes a transfer chamber as the foundation for the system and includes sidewalls adapted to receive at least three 200 mm and/or 300 mm process chambers. The transfer chamber includes a robot capable of withstanding high temperatures and is configured to transfer 200 mm and 300 mm substrates. The modularity of the transfer chamber is highly transportable and provides a research and development platform at a low cost of ownership and may be modularly built into a production system as additional chambers and peripheral hardware is added.

    摘要翻译: 描述了用于模块化处理系统的方法和装置。 该装置包括作为系统的基础的传送室,并且包括适于容纳至少三个200mm和/或300mm处理室的侧壁。 传送室包括能承受高温的机器人,并被配置成传送200mm和300mm的基片。 传送室的模块化高度可移植,并以低成本提供研发平台,并且可以将模块化内置在生产系统中,因为添加了附加的室和外围硬件。

    Processing chamber with rapid wafer exchange
    2.
    发明授权
    Processing chamber with rapid wafer exchange 有权
    处理室具有快速的晶片交换

    公开(公告)号:US06231716B1

    公开(公告)日:2001-05-15

    申请号:US09188872

    申请日:1998-11-09

    IPC分类号: B65G4907

    摘要: An apparatus for processing substrates includes a chamber, a substrate transfer element for transferring a substrate to and from the chamber, and a substrate support for receiving and holding a substrate within the chamber. The apparatus also includes multiple pins positioned and configured to be received by respective holes in the chamber bottom and moveable between a retracted position and an extended position. A pin actuation system is provided for moving the pins between the retracted position and the extended position. The pin actuation system controls the velocity at which the pins move and varies the speed of the pins by accelerating or decelerating at particular points during the pin cycle. A reduction in the cycle time is facilitated by accelerating the lift pins to relatively high speeds and then slowing the pins down prior to their arrival at locations where the substrate or wafer may be damaged. The throughput of the chamber can be increased, the likelihood of damage to the substrate can be reduced, and bouncing of the substrate while supported by the pins can be reduced.

    摘要翻译: 一种用于处理衬底的设备包括:室,用于将衬底传送到腔室的衬底传送元件和用于在腔室内接收和保持衬底的衬底支撑件。 该装置还包括定位和构造成由腔室底部中的相应孔容纳并且可在缩回位置和延伸位置之间移动的多个销。 提供销致动系统,用于在缩回位置和伸出位置之间移动销。 引脚驱动系统控制引脚移动的速度,并通过在引脚周期内的特定点加速或减速来改变引脚的速度。 通过将提升销加速到相对较高的速度,然后在它们到达衬底或晶片可能被损坏的位置之前将销降低速度来减轻循环时间的减少。 可以提高室的通过量,可以减少对基板的损坏的可能性,并且可以减少由引脚支撑的基板的弹跳。

    Intelligent Enclosures
    3.
    发明申请
    Intelligent Enclosures 审中-公开
    智能机柜

    公开(公告)号:US20120235786A1

    公开(公告)日:2012-09-20

    申请号:US13232043

    申请日:2011-09-14

    IPC分类号: G05B19/00

    CPC分类号: G06Q10/083 G07F17/12

    摘要: The invention provides a system for controlling access for a storage enclosure. The storage enclosure has one or more walls and an opening defined by at least one of the walls. There is a closure for the opening and a fastener adapted to hold the closure in a closed position relative to the opening and adapted to allow the closure to assume an open position relative to the opening upon receipt of a suitable signal. The system includes a user interface adapted to enable the suitable signal to be received by the fastener upon entry of an access code, means for generating the access code after delivery of an item into the storage enclosure, and means for transmitting the access code to a recipient for the item.

    摘要翻译: 本发明提供一种用于控制存储外壳的访问的系统。 存储外壳具有一个或多个壁和由至少一个壁限定的开口。 存在用于开口的封闭件和紧固件,其适于将封闭件相对于开口保持在关闭位置,并且适于在接收到合适的信号时允许封闭件相对于开口呈现打开位置。 该系统包括适于在进入访问代码时使适配信号能够被紧固件接收的用户界面,用于在将物品送入存储机壳之后生成访问代码的装置,以及用于将访问代码发送到 收件人的项目。

    Hand truck
    5.
    发明申请
    Hand truck 失效
    手推车

    公开(公告)号:US20070152413A1

    公开(公告)日:2007-07-05

    申请号:US10586066

    申请日:2005-01-13

    申请人: Anthony White

    发明人: Anthony White

    IPC分类号: B62B1/00

    摘要: A hand truck (20) for transporting a load is disclosed. The hand truck (20) comprises a sub-frame (22) with a foot portion (47) extending therefrom so that the sub-frame is able to support the load, a main frame (21) engaged with the sub-frame (22) such that the sub-frame (22) is able to be extended and retracted with respect to a lower end (32) of the main frame (21), at least one wheel (62, 63) secured relative to the main frame (21) so that the truck 20 is able to be wheeled about, a motor (70), a controller (74) coupled to the motor (70) for enabling a user to control the operation of the motor (70), and a flexible linkage (77) coupling the motor (70), main frame (21) and sub-frame (22) together such that the motor (70) is operable to move the linkage (77) to thereby extend or retract the sub-frame (22).

    摘要翻译: 公开了一种用于运输负载的手推车(20)。 手推车(20)包括具有从其延伸的脚部(47)的子框架(22),使得子框架能够支撑负载;与子框架(22)接合的主框架(21) ),使得子框架(22)能够相对于主框架(21)的下端(32)延伸和缩回,至少一个相对于主框架(62,63)固定的轮(62,63) 21),使得卡车20能够绕车,马达(70),联接到马达(70)的控制器(74),以使用户能够控制马达(70)的操作,以及柔性 将所述电动机(70),所述主框架(21)和所述副框架(22)联接在一起,使得所述电动机(70)可操作以使所述连杆机构(77)移动从而使所述副车架 22)。

    Apparatus and method for accessing a secured storage space
    8.
    发明授权
    Apparatus and method for accessing a secured storage space 有权
    用于访问安全存储空间的装置和方法

    公开(公告)号:US08698596B2

    公开(公告)日:2014-04-15

    申请号:US12881772

    申请日:2010-09-14

    IPC分类号: H04L9/32

    CPC分类号: G06Q10/083 G07F17/12

    摘要: Access to one or more storage areas is controlled. An indication that a packaged asset is available for delivery to an intended recipient, an indication of a size of the asset, and an identity of the intended recipient are received. An available storage space is determined based at least in part upon the size of the asset and the identity of the intended recipient. When a storage space is determined to be available for the packaged asset, an access code is transmitted to the intended recipient allowing the intended recipient to access the available storage space using the access code.

    摘要翻译: 控制一个或多个存储区域的访问。 收到包装资产可用于交付给预期收件人的指示,资产大小的指示和预期收件人的身份。 至少部分地基于资产的大小和预期接收者的身份确定可用的存储空间。 当确定存储空间对于打包的资产是可用的时,访问代码被发送到预期的接收者,允许预期的接收者使用访问代码访问可用的存储空间。

    Apparatus and method for accessing a secured storage space
    9.
    发明申请
    Apparatus and method for accessing a secured storage space 有权
    用于访问安全存储空间的装置和方法

    公开(公告)号:US20120062362A1

    公开(公告)日:2012-03-15

    申请号:US12881772

    申请日:2010-09-14

    IPC分类号: G06F7/04

    CPC分类号: G06Q10/083 G07F17/12

    摘要: Access to one or more storage areas is controlled. An indication that a packaged asset is available for delivery to an intended recipient, an indication of a size of the asset, and an identity of the intended recipient are received. An available storage space is determined based at least in part upon the size of the asset and the identity of the intended recipient. When a storage space is determined to be available for the packaged asset, an access code is transmitted to the intended recipient allowing the intended recipient to access the available storage space using the access code.

    摘要翻译: 控制一个或多个存储区域的访问。 收到包装资产可用于交付给预期收件人的指示,资产大小的指示和预期收件人的身份。 至少部分地基于资产的大小和预期接收者的身份确定可用的存储空间。 当确定存储空间对于打包的资产是可用的时,访问代码被发送到预期的接收者,允许预期的接收者使用访问代码访问可用的存储空间。

    Blind me not
    10.
    发明申请
    Blind me not 审中-公开
    不要盲我

    公开(公告)号:US20070236040A1

    公开(公告)日:2007-10-11

    申请号:US11398070

    申请日:2006-04-06

    申请人: Anthony White

    发明人: Anthony White

    IPC分类号: B60J3/02

    CPC分类号: B60J3/0208

    摘要: This invention is an attachable/detachable, clip on, horizontal automoble sun visor extension which slides open or slides to close. It is simple, yet, when I went to purchase one, I was told that they didn't exist.

    摘要翻译: 本发明是一种可附接/可拆卸的水平自动遮阳板延伸件,其滑动打开或滑动以关闭。 很简单,但是当我去购买一个,我被告知他们不存在。