Vacuum processing apparatus
    2.
    发明授权
    Vacuum processing apparatus 失效
    真空加工设备

    公开(公告)号:US4637342A

    公开(公告)日:1987-01-20

    申请号:US705522

    申请日:1985-02-26

    CPC分类号: B01J3/006 C23C16/54 H01J37/18

    摘要: A vacuum processing apparatus for applying a vacuum working process to a substrate to be processed by a plurality of processing steps comprises vacuum containers exclusively for use for processing disposed in place for each of the processing steps, and a vacuum container exclusively for use for conveyance movable between the vacuum containers exclusively for use for processing. The vacuum containers are provided with opening-closing gates which can be connected to each other. The substrate to be processed is transferably movable between the vacuum containers exclusively for use for processing and the vacuum container exclusively for use for conveyance.

    摘要翻译: 一种用于通过多个处理步骤将真空加工过程施加到待加工基板的真空处理设备包括专门用于每个处理步骤所设置的处理的真空容器和专门用于可移动的输送的真空容器 在专用于加工的真空容器之间。 真空容器设置有彼此连接的开闭门。 待处理的基材可以在专门用于加工的真空容器和专门用于输送的真空容器之间转移。

    Light receiving member having a-Si(GE,SN) photosensitive layer and
multi-layered surface layer containing reflection preventive layer and
abrasion resistant layer on a support having spherical dimples with
inside faces having minute irregularities
    3.
    发明授权
    Light receiving member having a-Si(GE,SN) photosensitive layer and multi-layered surface layer containing reflection preventive layer and abrasion resistant layer on a support having spherical dimples with inside faces having minute irregularities 失效
    具有a-Si(GE,SN)感光层的光接收元件和包含防反射层和耐磨层的多层表面层在具有具有微小不规则性的内表面的球形凹坑的支撑体上

    公开(公告)号:US4797336A

    公开(公告)日:1989-01-10

    申请号:US924265

    申请日:1986-10-29

    摘要: There is provided a light receiving member which comprises a support, a photosensitive layer composed of amorphous material containing silicon atoms and at least either germanium atoms or tin atoms and a surface layer, said surface layer being of multi-layered structure having at least an abrasion-resistant layer at the outermost side and a reflection preventive layer in the inside, and said support having a surface provided with irregularities composed of spherical dimples each of which having an inside face provided with minute irregularities. The light receiving member overcomes all of the problems in the conventional light receiving member comprising a light receiving layer composed of an amorphous silicon and, in particular, effectively prevents the occurrence of interference fringe in the formed images due to the interference phenomenon thereby forming visible images of excellent quality even in the case of using coherent laser beams possible producing interference as a light source.

    摘要翻译: 提供了一种光接收元件,其包括支撑体,由含有硅原子和至少锗原子或锡原子的至少一种或多种锗原子的无定形材料构成的感光层和表面层,所述多层结构的表面层至少具有磨损 在最外侧的耐光层和内侧的防反射层,并且所述支撑体具有设置有由球面凹坑构成的凹凸的表面,每个凹坑具有设置有微小凹凸的内侧面。 光接收部件克服了包括由非晶硅构成的光接收层的常规光接收部件中的所有问题,并且特别地有效地防止了由于干涉现象而导致形成的图像中的干涉条纹的发生从而形成可视图像 即使在使用可能产生干扰的相干激光束作为光源的情况下也具有优异的质量。

    Member having substrate with protruding surface portions and light
receiving layer with amorphous silicon matrix
    4.
    发明授权
    Member having substrate with protruding surface portions and light receiving layer with amorphous silicon matrix 失效
    具有具有突出表面部分的基底和具有非晶硅基质的光接收层的构件

    公开(公告)号:US4705735A

    公开(公告)日:1987-11-10

    申请号:US741300

    申请日:1985-06-04

    IPC分类号: G03G5/082 G03G5/10 G03G5/085

    CPC分类号: G03G5/10 G03G5/08214

    摘要: A light-receiving member comprises a substrate having a large number of protruding portions on a surface thereof, each of said protruding portions having at a predetermined cut position a sectional shape comprising a main projection and a subprojection, the main projection and the subprojection overlapping each other, and a light-receiving layer of a multi-layer structure having a first layer comprising an amorphous material containing silicon atoms and germanium atoms, a second layer comprising an amorphous material containing silicon atoms and exhibiting photoconductivity and a surface layer having reflection preventive function provided on the substrate successively from the substrate side.

    摘要翻译: 光接收部件包括在其表面上具有大量突出部分的基板,每个所述突出部分在预定切割位置具有包括主投影和子投影的截面形状,所述主投影和子投影各自重叠 以及具有包含含有硅原子和锗原子的非晶态材料的第一层的多层结构的光接收层,包含含硅原子并具有光电导性的非晶态材料的第二层和具有反射防止功能的表面层 从基板侧依次设置在基板上。

    Member having light receiving layer of A-Si: Ge (C,N,O) A-Si/surface
antireflection layer with non-parallel interfaces
    7.
    发明授权
    Member having light receiving layer of A-Si: Ge (C,N,O) A-Si/surface antireflection layer with non-parallel interfaces 失效
    具有具有非平行界面的A-Si:Ge(C,N,O)A-Si /表面抗反射层的光接收层的构件

    公开(公告)号:US4678733A

    公开(公告)日:1987-07-07

    申请号:US786970

    申请日:1985-10-11

    摘要: A light receiving member comprises a light receiving layer of a multi-layer structure having a first layer comprising an amorphous material containing silicon atoms and germanium atoms, a second layer comprising an amorphous material containing silicon atoms and exhibiting photoconductivity and a surface layer having reflection preventive function provided on a substrate successively from the substrate side, said light receiving layer containing at least one selected from oxygen atoms, carbon atoms and nitrogen atoms and having at least one pair of non-parallel interfaces within a short range and said non-parallel interfaces being arranged in a large number in at least one direction within the plane perpendicular to the layer thickness direction.

    摘要翻译: 光接收元件包括具有第一层的多层结构的光接收层,该第一层包括含有硅原子和锗原子的非晶态材料,第二层包括含有硅原子并具有光电导性的非晶态材料和具有反射预防性的表面层 功能,从衬底侧依次提供在衬底上,所述光接收层包含选自氧原子,碳原子和氮原子中的至少一个,并且在短范围内具有至少一对非平行界面,并且所述非平行界面 在垂直于层厚度方向的平面内沿至少一个方向大量布置。

    Process for producing photoconductive member from gaseous silicon
compounds
    8.
    发明授权
    Process for producing photoconductive member from gaseous silicon compounds 失效
    从气态硅化合物制备光导体的方法

    公开(公告)号:US4468443A

    公开(公告)日:1984-08-28

    申请号:US354898

    申请日:1982-03-04

    摘要: A process for producing a photoconductive member, which comprises forming a photoconductive layer on a substrate for formation of a photoconductive layer by introducing starting substances for formation of a photoconductive layer under gaseous state into a deposition chamber maintained under a desired reduced pressure and exciting discharging under the gas atmosphere of said starting substances is characterized in that said starting substances are constituted of at least one substance selected from the first group consisting of substances(O) containing oxygen atoms as constituent atom, substances(N) containing nitrogen atoms as constituent atom and substances(C) containing carbon atoms as constituent atom, and at least two compounds selected from the second group consisting of the compounds of the formula:Si.sub.n H.sub.2n+2 (A)wherein n is a positive integer and the compounds of the formula:Si.sub.m H.sub.l X.sub.k (B)wherein m and k are positive integers, l is 0 or a positive integer, l+k=2m+2, and X represents a halogen atom, n and m being called "order number" hereinafter, and said at least two compounds selected from the second group consisting of the compounds represented by the formulas (A) and (B) to be introduced into said deposition chamber being controlled in amounts such that the proportion of the total of high order compounds is at least 1 vol. % based on the total of the minimum order compounds, the minimum order compound being one whose order number is the minimum among order numbers of said at least two compounds, the high order compound being one whose order number is higher than the order number of the minimum order compound.

    摘要翻译: 一种感光体的制造方法,其特征在于,在用于形成光电导层的基板上形成光电导层,通过将在气态下形成光电导层的起始物质引入到保持在期望的减压下的沉积室中,并且激发放电 所述起始物质的气体气氛的特征在于,所述起始物质由选自由含有氧原子作为构成原子的物质(O),含有氮原子作为构成原子的物质(N))构成的第一组中的至少一种物质和 含有碳原子作为构成原子的物质(C)和至少两种选自下列化合物的化合物:下式化合物SinH2n + 2(A)其中n为正整数,式为SimHlXk( B)其中m和k是正整数,l是0或正整数,l + k = 2m + 2,X表示 卤素原子,n和m在下文中称为“次数”,并且所述至少两种选自由待引入所述沉积室的由式(A)和(B)表示的化合物组成的第二组中的化合物是 控制量使得高级化合物的总量的比例至少为1体积%。 基于最小订单化合物的总量的%,最小订单化合物是其序列号是所述至少两种化合物的订单号中最小值的化合物,高级化合物是其订货号高于 最小订单复合。

    Light receiving members with spherically dimpled support
    9.
    发明授权
    Light receiving members with spherically dimpled support 失效
    具有球形支撑的光接收构件

    公开(公告)号:US4808504A

    公开(公告)日:1989-02-28

    申请号:US911355

    申请日:1986-09-24

    摘要: A light receiving member has a support and a light receiving layer. The support has an uneven-shaped surface of a plurality of spherical dimples, each dimple having an identical radius of curvature R and an identical width D, wherein the ratio D/R of the width D to the radius of curvature R is from 0.03 to 0.07. The light receiving layer is a multi-layered structure having an outer layer which formed from an amorphous material containing silicon atoms as the main constituent and at least one of hydrogen atoms and halogen atoms. The light receiving layer contains an inner layer of amorphous silicon which also contains germanium and/or tin and hydrogen and/or halogen.The light receiving member, when used with a coherent laser beam as an optical source, acts to prevent the occurrence of an interference fringe pattern during image formation.

    Electrophotographic light receiving members comprising amorphous silicon
and substrate having minute irregularities
    10.
    发明授权
    Electrophotographic light receiving members comprising amorphous silicon and substrate having minute irregularities 失效
    包含非晶硅和具有微小不规则的衬底的电子照相光接收元件

    公开(公告)号:US4762762A

    公开(公告)日:1988-08-09

    申请号:US921638

    申请日:1986-10-22

    IPC分类号: G03G5/082 G03G5/10 G03G5/14

    摘要: A light receiving member comprises a support and a light receiving layer of a multi-layered structure having at least a photosensitive layer composed of an amorphous silicon, said support having a surface provided with irregularities composed of spherical dimples each of which having an inside face provided with minute irregularities. The light receiving layer may contain a surface layer comprising an outer abrasion-resistant layer and an inner reflection prevention layer, wherein the optical band gap possessed by the surface layer and optical band gap possessed by the photosensitive layer on which the surface layer is disposed are matched at their interface. The light receiving member can effectively prevent the occurrence of interference fringes in the formed images, forming visible images of excellent quality even when coherent laser beams are used as the light source. The member can also effectively prevent reflection of incident light at the interface between the surface layer and the photosensitive layer.

    摘要翻译: 光接收元件包括支撑体和具有至少由非晶硅组成的感光层的多层结构的光接收层,所述支撑体具有设置有由球面凹坑构成的凹凸的表面,每个凹坑具有内表面, 有微小的不规则。 光接收层可以含有包含外部耐磨层和内反射防止层的表层,其中表面层具有的光学带隙和其上设置表面层的感光层具有的光学带隙为 在他们的界面匹配。 光接收部件能够有效地防止在形成的图像中产生干涉条纹,即使在使用相干激光作为光源的情况下,也能够形成品质优异的可视图像。 该构件还可以有效地防止入射光在表面层和感光层之间的界面处的反射。