公开(公告)号：US11340293B2

公开(公告)日：2022-05-24

申请号：US17061352

申请日：2020-10-01

Applicant: PDF SOLUTIONS, INC.

Inventor： Indranil De ,  Marian Mankos ,  Dennis Ciplickas ,  Christopher Hess ,  Jeremy Cheng ,  Balasubramanian Murugan ,  Qi Hu

IPC: G01R31/26 ,  G01R31/306 ,  G01R31/302 ,  G01R31/265

Abstract: Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US11668746B2

公开(公告)日：2023-06-06

申请号：US17750405

申请日：2022-05-23

Applicant: PDF SOLUTIONS, INC.

Inventor： Indranil De ,  Marian Mankos ,  Dennis Ciplickas ,  Christopher Hess ,  Jeremy Cheng ,  Balasubramanian Murugan ,  Qi Hu

IPC: G01R31/306 ,  G01R31/302 ,  G01R31/265

CPC classification number: G01R31/306 ,  G01R31/2653 ,  G01R31/3025

Abstract: Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US12038476B2

公开(公告)日：2024-07-16

申请号：US18144146

申请日：2023-05-05

Applicant: PDF SOLUTIONS, INC.

Inventor： Indranil De ,  Marian Mankos ,  Dennis Ciplickas ,  Christopher Hess ,  Jeremy Cheng ,  Balasubramanian Murugan ,  Qi Hu

IPC: G01R31/306 ,  G01R31/265 ,  G01R31/302

CPC classification number: G01R31/306 ,  G01R31/2653 ,  G01R31/3025

Abstract: Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US09496119B1

公开(公告)日：2016-11-15

申请号：US14989743

申请日：2016-01-06

Applicant: PDF Solutions, Inc.

Inventor： Indranil De ,  Marian Mankos ,  Christopher Hess ,  Dennis J. Ciplickas

IPC: H01L23/58 ,  H01J37/22 ,  H01J37/285 ,  H01J37/147

CPC classification number: H01J37/222 ,  G01N23/2251 ,  G01R31/2644 ,  H01J37/147 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01L22/12 ,  H01L22/20 ,  H01L22/30

Abstract: The present invention discloses an e-beam inspection tool, and an apparatus for detecting defects. In one aspect is described an apparatus for detecting defects that includes a dual-deflection system that moves the e-beam over the integrated circuit to each of the plurality of predetermined locations, the dual deflection system including a magnetic deflection component that provides by magnetic deflection for movement of the e-beam through a plurality of areas on the integrated circuit and an electrostatic deflection component that provides by electrostatic deflection for movement of the e-beam within each of the plurality of areas.

Abstract translation: 本发明公开了一种电子束检查工具和用于检测缺陷的装置。 在一个方面中描述了一种用于检测缺陷的装置，其包括将集成电路上的电子束移动到多个预定位置中的每一个的双偏转系统，双偏转系统包括通过磁偏转提供的磁偏转部件 用于电子束通过集成电路上的多个区域的移动;以及静电偏转部件，静电偏转部件通过静电偏转来提供电子束在多个区域的每一个内的移动。