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    STRUCTURE OF METAL E-FUSE
    1.
    发明申请
    STRUCTURE OF METAL E-FUSE 失效
    金属电子熔断器的结构

    公开(公告)号：US20120126363A1

    公开(公告)日：2012-05-24

    申请号：US12952317

    申请日：2010-11-23

    申请人： Ping-Chuan Wang ,  Chunyan E. Tian ,  Ronald Filippi ,  Wai-ki Li

    发明人： Ping-Chuan Wang ,  Chunyan E. Tian ,  Ronald Filippi ,  Wai-ki Li

    IPC分类号： H01L23/525

    CPC分类号： H01L23/5256 ,  H01L2924/0002 ,  H01L2924/00

    摘要： Structures of electronic fuses (e-fuse) are provided. An un-programmed e-fuse includes a via of a first conductive material having a bottom and sidewalls with a portion of the sidewalls being covered by a conductive liner and the bottom of the via being formed on top of a dielectric layer, and a first and a second conductive path of a second conductive material formed on top of the dielectric layer with the first and second conductive paths being conductively connected through, and only through, the via at the sidewalls. A programmed e-fuse includes a via; a first conductive path at a first side of the via and being separated from sidewalls of the via by a void; and a second conductive path at a second different side of the via and being in conductive contact with the via through sidewalls of the via.

    摘要翻译： 提供电子保险丝（e-fuse）的结构。 未编程的电子熔断器包括具有底部和侧壁的第一导电材料的通孔，侧壁的一部分被导电衬垫覆盖，并且通孔的底部形成在电介质层的顶部上，并且第一 以及形成在电介质层顶部上的第二导电材料的第二导电路径，其中第一和第二导电路径通过侧壁导通地连接，并且仅通过通孔。 编程的电子熔丝包括通孔; 在通孔的第一侧处的第一导电路径，并且通过空隙与通路的侧壁分离; 以及在所述通孔的第二不同侧的第二导电路径，并且与通孔通过所述通孔的侧壁导电接触。

    Electrically programmable metal fuse
    2.
    发明授权
    Electrically programmable metal fuse 有权
    电子可编程金属保险丝

    公开(公告)号：US08421186B2

    公开(公告)日：2013-04-16

    申请号：US13149108

    申请日：2011-05-31

    申请人： Baozhen Li ,  Chunyan E. Tian ,  Chih-Chao Yang

    发明人： Baozhen Li ,  Chunyan E. Tian ,  Chih-Chao Yang

    IPC分类号： H01L29/00 ,  H01L23/525 ,  H01H37/76

    CPC分类号： H01L23/5256 ,  G11C17/16 ,  G11C29/785 ,  H01L27/0207 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A metal electrically programmable fuse (“eFuse”) includes a metal strip, having a strip width, of a metal line adjoined to wide metal line portions, having widths greater than the metal strip width, at both ends of the metal strip. The strip width can be a lithographic minimum dimension, and the ratio of the length of the metal strip to the strip width is greater than 5 to localize heating around the center of the metal strip during programming. Localization of heating reduces required power for programming the metal eFuse. Further, a gradual temperature gradient is formed during the programming within a portion of the metal strip that is longer than the Blech length so that electromigration of metal gradually occurs reliably at the center portion of the metal strip. Metal line portions are provides at the same level as the metal eFuse to physically block debris generated during programming.

    摘要翻译： 金属电可编程保险丝（eFuse）包括在金属条的两端处具有与宽金属线部分相邻的金属线的具有宽度大于金属带宽度的宽度的金属带。 条带宽度可以是光刻最小尺寸，并且金属条带的长度与条带宽度的比率大于5以在编程期间定位围绕金属条的中心的加热。 加热的本地化减少了用于编程金属eFuse所需的电力。 此外，在金属带的长于Blech长度的部分内的编程期间形成逐渐的温度梯度，使得金属的电迁移在金属带的中心部分逐渐发生。 金属线部分提供与金属eFuse相同的水平，以物理阻挡编程期间产生的碎屑。

    ELECTRICALLY PROGRAMMABLE METAL FUSE
    4.
    发明申请
    ELECTRICALLY PROGRAMMABLE METAL FUSE 有权
    电气可编程金属保险丝

    公开(公告)号：US20120306048A1

    公开(公告)日：2012-12-06

    申请号：US13149108

    申请日：2011-05-31

    申请人： Baozhen Li ,  Chunyan E. Tian ,  Chih-Chao Yang

    发明人： Baozhen Li ,  Chunyan E. Tian ,  Chih-Chao Yang

    IPC分类号： H01L23/525 ,  H01L21/02

    CPC分类号： H01L23/5256 ,  G11C17/16 ,  G11C29/785 ,  H01L27/0207 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A metal electrically programmable fuse (“eFuse”) includes a metal strip, having a strip width, of a metal line adjoined to wide metal line portions, having widths greater than the metal strip width, at both ends of the metal strip. The strip width can be a lithographic minimum dimension, and the ratio of the length of the metal strip to the strip width is greater than 5 to localize heating around the center of the metal strip during programming. Localization of heating reduces required power for programming the metal eFuse. Further, a gradual temperature gradient is formed during the programming within a portion of the metal strip that is longer than the Blech length so that electromigration of metal gradually occurs reliably at the center portion of the metal strip. Metal line portions are provides at the same level as the metal eFuse to physically block debris generated during programming.

    摘要翻译： 金属电可编程保险丝（eFuse）包括在金属条的两端处具有与宽金属线部分相邻的金属线的具有宽度大于金属带宽度的宽度的金属带。 条带宽度可以是光刻最小尺寸，并且金属条带的长度与条带宽度的比率大于5以在编程期间定位围绕金属条的中心的加热。 加热的本地化减少了用于编程金属eFuse所需的电力。 此外，在金属带的长于Blech长度的部分内的编程期间形成逐渐的温度梯度，使得金属的电迁移在金属带的中心部分逐渐发生。 金属线部分提供与金属eFuse相同的水平，以物理阻挡编程期间产生的碎屑。