Assembly and method for monitoring the alignment of a workpiece
    1.
    发明授权
    Assembly and method for monitoring the alignment of a workpiece 失效
    用于监测工件对准的装配和方法

    公开(公告)号:US4887905A

    公开(公告)日:1989-12-19

    申请号:US212814

    申请日:1988-06-19

    CPC classification number: G01B11/26

    Abstract: An assembly and method for monitoring the alignment of a workpiece with respect to a reference. The assembly and method employ an element which preferably comprises a capability for optical phase conjugation. Advantages which can result from the use of the element include enhanced sensitivity to alignment variations for both large and very small angle deviations from the reference.

    Abstract translation: 一种用于监测工件相对于基准的对准的组件和方法。 组件和方法采用优选地包括用于光学相位共轭的能力的元件。 通过使用元件可以产生的优点包括对参考的大和非常小的角度偏差的对准变化的增强的灵敏度。

    Optical scanner for maintaining focus over a flat image plane
    2.
    发明授权
    Optical scanner for maintaining focus over a flat image plane 失效
    光学扫描仪用于在平面图像平面上保持对焦

    公开(公告)号:US5058968A

    公开(公告)日:1991-10-22

    申请号:US566194

    申请日:1990-08-13

    Inventor: Richard A. Stark

    CPC classification number: G06K15/1204 G02B26/10 H04N1/113

    Abstract: An optical scanning system of the type in which an oscillating mirror located between the focusing lens and the image plane is provided to scan the reflected optical axis of a focusing lens across a flat field, wherein the pivot axis of the mirror is translated during oscillation of the mirror. The pivot axis of the mirror is translated at an angle of 45.degree. with respect to the optical axis of the focusing lens thereby enabling the mirror to be translated at a uniform velocity during scanning to provide a uniform velocity scan.

    Abstract translation: 提供了一种其中设置在聚焦透镜和图像平面之间的振动反射镜的类型的光学扫描系统,用于扫描聚焦透镜在平坦场上的反射光轴,其中反射镜的枢转轴在 镜子。 反射镜的枢转轴相对于聚焦透镜的光轴以45°的角度平移,从而使得在扫描期间可以以均匀的速度平移反射镜以提供均匀的速度扫描。

    Scanning apparatus
    4.
    发明授权
    Scanning apparatus 失效
    扫描仪

    公开(公告)号:US4904034A

    公开(公告)日:1990-02-27

    申请号:US150469

    申请日:1988-01-29

    Abstract: A scanner including a source of coherent light, a radial hologon, a f.theta. lens and a target. Between the light source and the hologon there are means for forming light from the source into a collimated beam having an oblong cross-sectional shape and for directing the beam onto the hologon at a predetermined incident angle and with the long axis of the oblong cross-sectional shape of the beam radial of the axis of rotation of the hologon. Prismatic means are provided between the hologon and the lens means for so modifying the cross-sectional shape of the beam that the spot at the target station has a selected shape and orientation. This allows the shape, orientation and size of the beam on the hologon to be optimum for duty cycle of the hologon and for spot size on the target. The prismatic means allows the spot shape and orientation on target to be optimized. The prismatic means tends to introduce undesirable bow into the scan line, therefore the wavelength of the light and the grating factor (n .lambda.)/d of the hologon are selected to produce an approximately equivalent opposite bow.

    Abstract translation: 扫描仪,包括相干光源,径向光圈,fθ透镜和靶。 在光源和hologon之间存在用于将来自源的光形成具有长圆形横截面形状的准直光束并用于以预定入射角将光束引导到hologon上并且与长方形横截面的长轴对准的装置, hologon旋转轴线径向的横截面形状。 在hologon和透镜装置之间提供棱镜装置,以便改变射束的横截面形状,使得目标台上的斑点具有选定的形状和取向。 这允许hologon上的梁的形状,取向和尺寸对于hologon的占空比和目标上的点尺寸是最佳的。 棱镜装置可以优化目标上的斑点形状和取向。 棱镜装置倾向于将不期望的弓引入扫描线,因此选择光的波长和光圈因子(nλ)/ d以产生大致相当的弓。

    Assembly and method for monitoring the alignment of a workpiece
    5.
    发明授权
    Assembly and method for monitoring the alignment of a workpiece 失效
    用于监测工件对准的装配和方法

    公开(公告)号:US5017011A

    公开(公告)日:1991-05-21

    申请号:US218404

    申请日:1988-07-12

    CPC classification number: G01B11/27 G01B11/26

    Abstract: An assembly and method for monitoring the alignment of a workpiece with respect to a reference. The assembly and method employ an element which preferably comprises a capability for optical phase conjugation. Advantage which can result from the use of the element include enhanced sensitivity to alignment variations for both large and very small angle deviations from the reference.

    Abstract translation: 一种用于监测工件相对于基准的对准的组件和方法。 组件和方法采用优选地包括用于光学相位共轭的能力的元件。 使用元件可能产生的优点包括对参考的大和非常小角度偏差的对准变化的增强灵敏度。

    Scanning apparatus
    6.
    发明授权
    Scanning apparatus 失效
    扫描仪

    公开(公告)号:US4707055A

    公开(公告)日:1987-11-17

    申请号:US848427

    申请日:1986-04-04

    Inventor: Richard A. Stark

    Abstract: A scanner including a source of coherent radiation, a radial hologon, a f.theta. lens and a target. Between the light source and the hologon there are means for forming radiation from the source into a collimated beam having an oblong cross-sectional shape and for directing the beam onto the hologon at a predetermined incident angle and with the long axis of the oblong cross sectional shape of the beam radial of the axis of rotation of the hologon. Two prisms are provided between the hologon and the lens means for so modifying the cross-sectional shape of the beam that the spot at the target station has a selected shape and orientation. The prisms are mounted in an articulated mount having adjustment means, which allows rotation of the prisms to as to correct both bow in the scan line and incorrect placement of the scan line on the target. Such bow and incorrect placement could be created by a change of the wavelength of the radiation and by the pitch of the grating lines of the hologon being different to nominal.

    Abstract translation: 包括相干辐射源的扫描器,径向hologon,fθ透镜和靶。 在光源和hologon之间存在用于将来自源的辐射形成为具有长方形横截面形状的准直束并用于将光束以预定入射角引导到hologon上并且与长椭圆形横截面的长轴 光束的旋转轴线径向的形状。 在hologon和透镜装置之间设置两个棱镜,用于改变光束的横截面形状,使得目标工位的光斑具有选定的形状和取向。 棱镜安装在具有调节装置的关节式安装座中,该调节装置允许棱镜的旋转以便校正扫描线中的弓和在目标上的扫描线的不正确放置。 这种弓形和不正确的放置可以通过辐射的波长的改变和hologon的光栅线的间距与标称不同而产生。

    Chip capacitor device
    7.
    发明授权
    Chip capacitor device 失效
    贴片电容器

    公开(公告)号:US4151579A

    公开(公告)日:1979-04-24

    申请号:US831900

    申请日:1977-09-09

    Inventor: Richard A. Stark

    Abstract: The present invention is directed to a capacitor device and method of forming same, and more particularly to a monolithic ceramic capacitor incorporating an improved conductive termination arrangement providing a compliant connector for mechanically and electrically connecting the capacitor to a substrate, said termination arrangement providing increased resistance to damage to the capacitor as a result of differential coefficient of expansion between the capacitor and the substrate on which it is mounted.

    Abstract translation: 本发明涉及一种电容器器件及其形成方法,更具体地说,涉及一种具有改进的导电端接装置的单片陶瓷电容器,其提供用于将电容器与基板机械地和电连接的柔性连接器,所述端接装置提供增加的电阻 由于电容器和其上安装的基板之间的差分的膨胀系数,损坏电容器。

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