公开(公告)号：US09997386B2

公开(公告)日：2018-06-12

申请号：US13069453

申请日：2011-03-23

申请人： Ryuji Higashisaka ,  Hideki Wakabayashi

发明人： Ryuji Higashisaka ,  Hideki Wakabayashi

IPC分类号： B05C13/02 ,  H01L21/673

CPC分类号： H01L21/67313 ,  H01L21/67346

摘要： A substrate holder mounting device is provided that is compact and has a simple structure. The substrate holder mounting device according to the present invention is provided with: a first and a second mounting mechanisms (5, 7) that are housed in a chamber and that are respectively configured to be capable of mounting a plurality of substrate holders along a row; row direction drive means that moves the first mounting mechanism to a row direction relatively with respect to the second mounting mechanism; a shifting mechanism (30) that shifts the substrate holders between the first and second mounting mechanisms; and a link-up mechanism that changes positions of the substrate holders in the row direction in the first or second mounting mechanism by a linkage between the shifting mechanism and the above-described row direction drive means.

公开(公告)号：US20100129539A1

公开(公告)日：2010-05-27

申请号：US12624944

申请日：2009-11-24

申请人： Ryuji Higashisaka ,  Hideki Wakabayashi

发明人： Ryuji Higashisaka ,  Hideki Wakabayashi

IPC分类号： G11B5/84 ,  B05C13/02

CPC分类号： H01L21/67313 ,  H01L21/67346

摘要： A substrate holder mounting device is provided that is compact and has a simple structure. The substrate holder mounting device according to the present invention is provided with: a first and a second mounting mechanisms (5, 7) that are housed in a chamber and that are respectively configured to be capable of mounting a plurality of substrate holders along a row; row direction drive means that moves the first mounting mechanism to a row direction relatively with respect to the second mounting mechanism; a shifting mechanism (30) that shifts the substrate holders between the first and second mounting mechanisms; and a link-up mechanism that changes positions of the substrate holders in the row direction in the first or second mounting mechanism by a linkage between the shifting mechanism and the above-described row direction drive means.

摘要翻译： 提供了一种紧凑且具有简单结构的基板支架安装装置。 根据本发明的基板保持器安装装置设置有：第一和第二安装机构（5,7），其容纳在室中，并且分别被构造成能够沿着一排安装多个基板保持器 ; 行方向驱动装置，其使所述第一安装机构相对于所述第二安装机构相对移动到行方向; 移动机构（30），其在第一和第二安装机构之间移动衬底保持器; 以及连接机构，其通过所述换档机构和所述行方向驱动装置之间的联动来改变所述第一或第二安装机构中的所述行方向上的所述基板保持器的位置。

公开(公告)号：US20110168086A1

公开(公告)日：2011-07-14

申请号：US13069453

申请日：2011-03-23

申请人： Ryuji Higashisaka ,  Hideki Wakabayashi

发明人： Ryuji Higashisaka ,  Hideki Wakabayashi

IPC分类号： B05C13/02

CPC分类号： H01L21/67313 ,  H01L21/67346

摘要： A substrate holder mounting device is provided that is compact and has a simple structure. The substrate holder mounting device according to the present invention is provided with: a first and a second mounting mechanisms (5, 7) that are housed in a chamber and that are respectively configured to be capable of mounting a plurality of substrate holders along a row; row direction drive means that moves the first mounting mechanism to a row direction relatively with respect to the second mounting mechanism; a shifting mechanism (30) that shifts the substrate holders between the first and second mounting mechanisms; and a link-up mechanism that changes positions of the substrate holders in the row direction in the first or second mounting mechanism by a linkage between the shifting mechanism and the above-described row direction drive means.

摘要翻译： 提供了一种紧凑且具有简单结构的基板支架安装装置。 根据本发明的基板保持器安装装置设置有：第一和第二安装机构（5,7），其容纳在室中，并且分别被构造成能够沿着一排安装多个基板保持器 ; 行方向驱动装置，其使所述第一安装机构相对于所述第二安装机构相对移动到行方向; 移动机构（30），其在第一和第二安装机构之间移动衬底保持器; 以及连接机构，其通过所述换档机构和所述行方向驱动装置之间的联动来改变所述第一或第二安装机构中的所述行方向上的所述基板保持器的位置。

公开(公告)号：US08202034B2

公开(公告)日：2012-06-19

申请号：US12873518

申请日：2010-09-01

申请人： Hiroshi Sone ,  Ryuji Higashisaka ,  Kazutoshi Yoshibayashi ,  Tatsunori Sato ,  Tatsuhiro Takahashi

发明人： Hiroshi Sone ,  Ryuji Higashisaka ,  Kazutoshi Yoshibayashi ,  Tatsunori Sato ,  Tatsuhiro Takahashi

IPC分类号： B65G49/07

CPC分类号： B25J9/042 ,  B25J15/0052 ,  H01L21/67173 ,  H01L21/67712 ,  H01L21/6776 ,  H01L21/67766 ,  Y10S414/141

摘要： A robot according to this invention includes a driving mechanism, a first arm rotatably connected to the driving mechanism, a second arm rotatably connected to the first arm, and an X-shaped end effector rotatably disposed at the distal end of the second arm. Of the four distal ends of the end effector, two distal ends include holding units which can hold substrates in one direction, and the remaining two distal ends include holding units which can hold substrates in the opposite direction.

摘要翻译： 根据本发明的机器人包括驱动机构，可旋转地连接到驱动机构的第一臂，可旋转地连接到第一臂的第二臂和可旋转地设置在第二臂的远端处的X形端部执行器。 在末端执行器的四个远端中，两个远端包括可在一个方向上保持基板的保持单元，而剩余的两个远端包括能够沿相反方向保持基板的保持单元。

公开(公告)号：US09200362B2

公开(公告)日：2015-12-01

申请号：US13177735

申请日：2011-07-07

申请人： Ryuji Higashisaka ,  Hiroshi Sone

发明人： Ryuji Higashisaka ,  Hiroshi Sone

IPC分类号： H01L21/677 ,  C23C14/56 ,  C23C14/50

CPC分类号： C23C14/568 ,  C23C14/50 ,  H01L21/67781

摘要： A substrate holder stocker device capable of reducing foot print is provided. The device includes: a movable table A which holds a plurality of substrate holders side by side in a plate thickness direction thereof and moves back and forth; a movable table B which is provided parallel to the movable table A and holds a plurality of the substrate holders side by side in a plate thickness direction thereof, and which moves back and forth; and an inter-table transfer mechanism for allowing the substrate holder which is held by one of the movable tables A and B stopped at predetermined positions to be held by the other of the movable tables A and B.

摘要翻译： 提供了能够减少脚印的基板保持架储存器装置。 该装置包括：可移动台A，其沿着板厚度方向并排地保持多个基板支架并且前后移动; 可移动台B，其平行于可移动台A设置并且在板厚度方向上并排地保持多个基板保持件，并且其前后移动; 以及台间传送机构，用于使由停止在预定位置的可移动台A和B中的一个保持的基板保持器由另一个可移动台A和B保持。

公开(公告)号：US20120006257A1

公开(公告)日：2012-01-12

申请号：US13177735

申请日：2011-07-07

申请人： Ryuji Higashisaka ,  Hiroshi Sone

发明人： Ryuji Higashisaka ,  Hiroshi Sone

IPC分类号： C23C14/00 ,  B65G47/00

CPC分类号： C23C14/568 ,  C23C14/50 ,  H01L21/67781

摘要： A substrate holder stocker device capable of reducing foot print is provided. The device includes: a movable table A which holds a plurality of substrate holders side by side in a plate thickness direction thereof and moves back and forth; a movable table B which is provided parallel to the movable table A and holds a plurality of the substrate holders side by side in a plate thickness direction thereof, and which moves back and forth; and an inter-table transfer mechanism for allowing the substrate holder which is held by one of the movable tables A and B stopped at predetermined positions to be held by the other of the movable tables A and B.

摘要翻译： 提供了能够减少脚印的基板保持架储存器装置。 该装置包括：可移动台A，其沿着板厚度方向并排地保持多个基板支架并且前后移动; 可移动台B，其平行于可移动台A设置并且在板厚度方向上并排地保持多个基板保持件，并且其前后移动; 以及台间传送机构，用于使由停止在预定位置的可移动台A和B中的一个保持的基板保持器由另一个可移动台A和B保持。